JPH0266232U - - Google Patents

Info

Publication number
JPH0266232U
JPH0266232U JP14332588U JP14332588U JPH0266232U JP H0266232 U JPH0266232 U JP H0266232U JP 14332588 U JP14332588 U JP 14332588U JP 14332588 U JP14332588 U JP 14332588U JP H0266232 U JPH0266232 U JP H0266232U
Authority
JP
Japan
Prior art keywords
reaction gas
reaction
laser beam
nozzle
supplying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14332588U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14332588U priority Critical patent/JPH0266232U/ja
Publication of JPH0266232U publication Critical patent/JPH0266232U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)

Description

【図面の簡単な説明】
第1図は本考案の説明図、第2図は本考案の要
部の斜視図、第3図は従来の超微粒子製造装置の
説明図である。 22…反応チヤンバ、24…レンズ、26…反
応ノズル、28…反応ガス供給管、28a…先端
部、30…回収皿。

Claims (1)

    【実用新案登録請求の範囲】
  1. 反応ガスを集中させるように噴出させる反応ノ
    ズルと、この反応ノズルに反応ガスを供給する反
    応ガス供給管と、前記集中した反応ガスに向けて
    レーザ光を照射するレーザ光照射手段と、反応ガ
    スの集中点に前記レーザ光の焦点を結ばせるレン
    ズ手段とを有する超微粒子製造装置。
JP14332588U 1988-11-01 1988-11-01 Pending JPH0266232U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14332588U JPH0266232U (ja) 1988-11-01 1988-11-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14332588U JPH0266232U (ja) 1988-11-01 1988-11-01

Publications (1)

Publication Number Publication Date
JPH0266232U true JPH0266232U (ja) 1990-05-18

Family

ID=31410044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14332588U Pending JPH0266232U (ja) 1988-11-01 1988-11-01

Country Status (1)

Country Link
JP (1) JPH0266232U (ja)

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