JPH0266527A - Wavelength conversion element - Google Patents
Wavelength conversion elementInfo
- Publication number
- JPH0266527A JPH0266527A JP63218747A JP21874788A JPH0266527A JP H0266527 A JPH0266527 A JP H0266527A JP 63218747 A JP63218747 A JP 63218747A JP 21874788 A JP21874788 A JP 21874788A JP H0266527 A JPH0266527 A JP H0266527A
- Authority
- JP
- Japan
- Prior art keywords
- nonlinear optical
- substrate
- single crystal
- modulus
- wavelength conversion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 title claims abstract description 21
- 230000003287 optical effect Effects 0.000 claims abstract description 36
- 239000000463 material Substances 0.000 claims abstract description 31
- 229920000642 polymer Polymers 0.000 claims abstract description 9
- 239000000126 substance Substances 0.000 claims description 12
- 150000001875 compounds Chemical class 0.000 claims description 8
- 230000005855 radiation Effects 0.000 claims description 5
- 239000000758 substrate Substances 0.000 abstract description 20
- 239000013078 crystal Substances 0.000 abstract description 17
- 238000004519 manufacturing process Methods 0.000 abstract description 11
- 230000007547 defect Effects 0.000 abstract description 9
- UHOVQNZJYSORNB-UHFFFAOYSA-N monobenzene Natural products C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 abstract description 7
- 239000010409 thin film Substances 0.000 abstract description 7
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical group C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 abstract description 3
- 239000012462 polypropylene substrate Substances 0.000 abstract description 3
- PJANXHGTPQOBST-VAWYXSNFSA-N Stilbene Natural products C=1C=CC=CC=1/C=C/C1=CC=CC=C1 PJANXHGTPQOBST-VAWYXSNFSA-N 0.000 abstract description 2
- VBEGHXKAFSLLGE-UHFFFAOYSA-N n-phenylnitramide Chemical compound [O-][N+](=O)NC1=CC=CC=C1 VBEGHXKAFSLLGE-UHFFFAOYSA-N 0.000 abstract description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 abstract description 2
- PJANXHGTPQOBST-UHFFFAOYSA-N stilbene Chemical compound C=1C=CC=CC=1C=CC1=CC=CC=C1 PJANXHGTPQOBST-UHFFFAOYSA-N 0.000 abstract description 2
- 235000021286 stilbenes Nutrition 0.000 abstract description 2
- 238000004299 exfoliation Methods 0.000 abstract 2
- 238000002844 melting Methods 0.000 description 13
- 230000008018 melting Effects 0.000 description 13
- 238000010586 diagram Methods 0.000 description 7
- -1 polypropylene Polymers 0.000 description 6
- 239000012535 impurity Substances 0.000 description 5
- 239000004698 Polyethylene Substances 0.000 description 4
- 229920000573 polyethylene Polymers 0.000 description 4
- MWOOGOJBHIARFG-UHFFFAOYSA-N vanillin Chemical compound COC1=CC(C=O)=CC=C1O MWOOGOJBHIARFG-UHFFFAOYSA-N 0.000 description 4
- FGQOOHJZONJGDT-UHFFFAOYSA-N vanillin Natural products COC1=CC(O)=CC(C=O)=C1 FGQOOHJZONJGDT-UHFFFAOYSA-N 0.000 description 4
- 235000012141 vanillin Nutrition 0.000 description 4
- 238000005336 cracking Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 229920001903 high density polyethylene Polymers 0.000 description 3
- 239000004700 high-density polyethylene Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 3
- XTTIQGSLJBWVIV-UHFFFAOYSA-N 2-methyl-4-nitroaniline Chemical compound CC1=CC([N+]([O-])=O)=CC=C1N XTTIQGSLJBWVIV-UHFFFAOYSA-N 0.000 description 2
- XJCVRTZCHMZPBD-UHFFFAOYSA-N 3-nitroaniline Chemical compound NC1=CC=CC([N+]([O-])=O)=C1 XJCVRTZCHMZPBD-UHFFFAOYSA-N 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical group C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 235000010270 methyl p-hydroxybenzoate Nutrition 0.000 description 2
- 239000004292 methyl p-hydroxybenzoate Substances 0.000 description 2
- LXCFILQKKLGQFO-UHFFFAOYSA-N methylparaben Chemical compound COC(=O)C1=CC=C(O)C=C1 LXCFILQKKLGQFO-UHFFFAOYSA-N 0.000 description 2
- 229960002216 methylparaben Drugs 0.000 description 2
- 235000019796 monopotassium phosphate Nutrition 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 238000004857 zone melting Methods 0.000 description 2
- SSOURMYKACOBIV-UHFFFAOYSA-N 3-methyl-4-nitro-1-oxidopyridin-1-ium Chemical compound CC1=C[N+]([O-])=CC=C1[N+]([O-])=O SSOURMYKACOBIV-UHFFFAOYSA-N 0.000 description 1
- 239000007836 KH2PO4 Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 229920001328 Polyvinylidene chloride Polymers 0.000 description 1
- CZPWVGJYEJSRLH-UHFFFAOYSA-N Pyrimidine Chemical group C1=CN=CN=C1 CZPWVGJYEJSRLH-UHFFFAOYSA-N 0.000 description 1
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 229920001893 acrylonitrile styrene Polymers 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 235000008429 bread Nutrition 0.000 description 1
- 239000004202 carbamide Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 125000006575 electron-withdrawing group Chemical group 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910000402 monopotassium phosphate Inorganic materials 0.000 description 1
- 125000001624 naphthyl group Chemical group 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920006289 polycarbonate film Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000005033 polyvinylidene chloride Substances 0.000 description 1
- GNSKLFRGEWLPPA-UHFFFAOYSA-M potassium dihydrogen phosphate Chemical compound [K+].OP(O)([O-])=O GNSKLFRGEWLPPA-UHFFFAOYSA-M 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- SCUZVMOVTVSBLE-UHFFFAOYSA-N prop-2-enenitrile;styrene Chemical compound C=CC#N.C=CC1=CC=CC=C1 SCUZVMOVTVSBLE-UHFFFAOYSA-N 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- ILVXOBCQQYKLDS-UHFFFAOYSA-N pyridine N-oxide Chemical compound [O-][N+]1=CC=CC=C1 ILVXOBCQQYKLDS-UHFFFAOYSA-N 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
Landscapes
- Radiation-Therapy Devices (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野J
本発明は、レーザー光の波長変換に用いられる光高調波
発生装置等に用いる波長変換素子に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application J] The present invention relates to a wavelength conversion element used in an optical harmonic generator or the like used for wavelength conversion of laser light.
[発明の背景]
非線形光学効果が1961年に発見されて以来、非線形
光学効果を有する材料及び非線形光学効果を利用したデ
バイスに関する研究が進められてきた。従来、非線形光
学効果を有する材料としては、LiNbO5やKDP
(KH2PO4)などの無機系材料が知られていた。[Background of the Invention] Since the discovery of nonlinear optical effects in 1961, research has been conducted on materials having nonlinear optical effects and devices that utilize nonlinear optical effects. Conventionally, materials with nonlinear optical effects include LiNbO5 and KDP.
Inorganic materials such as (KH2PO4) were known.
しかしながら近年これらの無機系材料に較べ、非線形光
学定数が大幅に上回る有機系材料が注目されはじめた。However, in recent years, organic materials, which have significantly higher nonlinear optical constants than these inorganic materials, have begun to attract attention.
この様な物質には、例えばMNA(2−メチル−4−ニ
トロアニリン)、mNA(メタニトロアニリン)、RO
M(3−メチル−4−ニトロピリジン−1−オキサイド
)などがある。Such substances include, for example, MNA (2-methyl-4-nitroaniline), mNA (metanitroaniline), RO
M (3-methyl-4-nitropyridine-1-oxide) and the like.
これら有機非線形光学材料を用いたデバイスとして、ガ
ラス製の基板の上に非線形光学材料の単結晶薄膜を形成
したものが知られている。As devices using these organic nonlinear optical materials, devices in which a single crystal thin film of a nonlinear optical material is formed on a glass substrate are known.
しかしながら、上記のデバイスはその製造において、有
機非線形光学材料の融点以上に温度を土げなけれならず
、そのため基板の熱膨Il!係数と有機非線形光学材料
の熱膨脹係数の違いによると思われる原因で単結晶が良
好にできなかったり、また、最悪の場合は単結晶が基板
から剥がれてしまうことがあった。さらに、本発明者ら
が試みたところ、単結晶の剥がれ、亀裂等は、単結晶性
に優れた有機非線形光学材料において顕著に生じた。However, in manufacturing the above device, the temperature must be raised above the melting point of the organic nonlinear optical material, so that the thermal expansion of the substrate Il! Due to the difference between the coefficient and the coefficient of thermal expansion of the organic nonlinear optical material, a single crystal could not be formed properly, and in the worst case, the single crystal could peel off from the substrate. Furthermore, when the present inventors attempted to solve the problem, single crystal peeling, cracking, etc. occurred significantly in organic nonlinear optical materials with excellent single crystallinity.
また、長時間高温にさらされるため、結晶に、基板であ
るガラスから不純物が拡散し、変換効率が低下するのが
認められた。In addition, due to the long-term exposure to high temperatures, impurities from the glass substrate were diffused into the crystal, resulting in a decrease in conversion efficiency.
エポキシ樹脂の毛細管を用いた第2次高調波発生素子は
知られている。(J、Opt、Soc、An+、 B
Vol、4.No、6 (June 1987) p
998〜1012)本発明者らは、該第2次高調波発
生素子について調べたところ、該素子おいては不純物の
拡散による欠陥の発生は防止することはできたが、依然
として単結晶の剥がれ、亀裂等の欠陥は生じ、変換効率
のよい第2次高調波発生素子を得ることは困難であった
。A second harmonic generation element using an epoxy resin capillary tube is known. (J, Opt, Soc, An+, B
Vol.4. No. 6 (June 1987) p.
998-1012) The present inventors investigated the second harmonic generation element and found that although the generation of defects due to impurity diffusion could be prevented in the element, peeling of the single crystal, Defects such as cracks occur, making it difficult to obtain a second harmonic generating element with good conversion efficiency.
また、従来公知の、基板の上あるいは基板に設けた講の
中に有機非線形光学材料を形成した第2次高調波発生素
子において、該基板として、エポキシ樹脂を用いてみた
が上記欠陥は解消されなかった。Furthermore, in a conventionally known second harmonic generation element in which an organic nonlinear optical material is formed on a substrate or in a hole provided on the substrate, an epoxy resin was used as the substrate, but the above-mentioned defects were not solved. There wasn't.
そこで、本発明者らが検討したところ、光学的非線形性
を有する物質と接する部材としである特定の弾性率(剛
性率)を有する高分子化合物を用いることによって上記
単結晶の剥がれ、亀裂等の欠点がなくなり、変換効率の
よい第2次高調波発生素子が得られることを見出だした
。Therefore, the present inventors investigated and found that by using a polymer compound with a specific elastic modulus (rigidity) as a member in contact with a substance having optical nonlinearity, peeling, cracking, etc. of the single crystal can be prevented. It has been found that a second harmonic generation element with good conversion efficiency can be obtained without any drawbacks.
[発明の目的]
したがって、本発明の目的は、基板からの不純物拡散に
よって有機非線形光学材料に生ずる欠陥、基板と有機非
線形光学材料の熱膨脹係数の違いによって生ずるひずみ
、亀裂、剥がれ等の欠陥に対処し、作製が容易で、且つ
、変換効率が高い波長変換素子を提供することにある。[Object of the Invention] Therefore, the object of the present invention is to deal with defects such as defects that occur in organic nonlinear optical materials due to impurity diffusion from the substrate, and defects such as distortion, cracks, and peeling that occur due to the difference in coefficient of thermal expansion between the substrate and the organic nonlinear optical material. Another object of the present invention is to provide a wavelength conversion element that is easy to manufacture and has high conversion efficiency.
[発明の構成]
上記目的は、光学的非線形性を有する物質と、基本波の
導波モードと第2次高調波の導波モードまたは放射モー
ドとが位相整合するよう調整された部材とから形成され
てなる波長変換素子において、前記物質が有機物質であ
り、前記部材が前記物質と接しており、かつ、弾性率(
剛性率)が0.3 xlQ’ kr/−〜4.Ox10
’ kg/cdの高分子化合物であることを特徴とする
波長変換素子によって達成された。[Structure of the Invention] The above object is to form a material made of a material having optical nonlinearity and a member adjusted so that the waveguide mode of the fundamental wave and the waveguide mode or radiation mode of the second harmonic are phase matched. In the wavelength conversion element, the substance is an organic substance, the member is in contact with the substance, and the elastic modulus (
rigidity) is 0.3 xlQ'kr/-~4. Ox10
This was achieved using a wavelength conversion element characterized by being a polymer compound with a high molecular weight of 1 kg/cd.
次に本発明の詳細な説明する。Next, the present invention will be explained in detail.
光学的非線形性を有する物質については、例えば「有機
非線形光学材料」 (シー・エム・シー社1985年刊
) 、 rNonlinear 0ptical P
ropertiesof Organic Mo1ec
ules and CrystalJVol、1 。Regarding substances with optical nonlinearity, for example, "Organic Nonlinear Optical Materials" (published by CMC Co., Ltd. in 1985), rNonlinear 0ptical P
properties of Organic Mo1ec
ules and CrystalJVol, 1.
2 (Acadenic Presslnc 、 1
987) 、日本化学会54年〜56年の年会予稿集等
に記載されている。2 (Acadenic Presslnc, 1
987), and is described in the annual meeting proceedings of the Chemical Society of Japan from 1954 to 1956.
本発明に好ましく用いられる光学的非線形性を有する物
質として、例えばニトロアニリン誘導体に代表される電
子吸引性基及び電子供与性基で置換されたベンゼン、ナ
フタレン等の芳香環、ピリジン、ピリミジン等の複素環
、スチルベン、ピリジン−N−オキサイド及び尿素を挙
げることができる。Examples of substances having optical nonlinearity that are preferably used in the present invention include aromatic rings such as benzene and naphthalene substituted with electron-withdrawing groups and electron-donating groups represented by nitroaniline derivatives, and heterogeneous rings such as pyridine and pyrimidine. Mention may be made of ring, stilbene, pyridine-N-oxide and urea.
以下に本発明で用いられる光学的非線形性を有する有機
物質の好ましい例を示す。Preferred examples of organic substances having optical nonlinearity used in the present invention are shown below.
以
下
余
白
上記において、単結晶性および非線形光学効果を考える
とNα10〜16の化合物が好ましく、さらに好ましい
ものは、Nα10.11.12.16の化合物である。Margins Below In the above, compounds with Nα of 10 to 16 are preferred, and compounds with Nα of 10.11.12.16 are more preferred in consideration of single crystallinity and nonlinear optical effects.
本発明の高分子化合物としては、弾性率(剛性率)が0
.3 X 10’ kg/−〜4.0 x 10’ k
+r/ Cl11 (測定法 ASTM : D747
)の範囲のものであれば種々の高分子化合物を用いる
ことができるが、特に、弾性率(w1性率) カ0.3
X 10’ kg/cJ〜1.4x10’kr/−の
範囲のものが良い。The polymer compound of the present invention has an elastic modulus (rigidity modulus) of 0.
.. 3 x 10' kg/-~4.0 x 10' k
+r/Cl11 (Measurement method ASTM: D747
) Various polymer compounds can be used as long as they have a modulus of elasticity (w1 modulus) of 0.3.
X 10' kg/cJ to 1.4 x 10' kr/- is preferable.
また、該高分子材料は、その熱膨張係数が1.0X10
−’〜30x10−’/”C(ASTM: D696に
て測定)のものが好ましい、さらに、熱膨張係数は使用
する有機非線形光学材料になるべく近いものくその差が
0.4 xlO−’/”Cまでのもの)が好ましい。Further, the polymer material has a coefficient of thermal expansion of 1.0×10
-'~30x10-'/"C (measured by ASTM: D696) is preferable. Furthermore, the thermal expansion coefficient should be as close as possible to the organic nonlinear optical material used, with a difference of 0.4 xlO-'/" C) are preferred.
次に、本発明で用いられる好ましい高分子化合物の弾性
率(剛性率)、耐熱性、屈折率、熱膨張係数を示す。Next, the elastic modulus (rigidity modulus), heat resistance, refractive index, and thermal expansion coefficient of the preferable polymer compound used in the present invention will be shown.
高密度ポリエチレン 120〜135
アクリロニトリル−
スチレン共重合物
87〜90
ポリスルホン
ポリカーボネイト
ポリ塩化ビニリデン
71〜93
ポリスチレン
塩化ビニル
ポリプロピレン
70〜100
50〜70
99〜110
熱膨張係数の試験法
1.54
0.4〜1.1
2.8〜3.5
1.63
2.4〜2.7
1.59
2.0〜2.4
1.60〜1.63 0.3〜0.6
1.59〜1.60 2.8〜4.2
1.52〜1.55 2.5〜4.2
1.48〜1.50 0.9〜1.4
ASTM D 696
1.0〜1.1
6〜8
4.9〜5.6
6〜8
5〜18.5
[実施例]
以下、本発明を、実施例によりさらに具体的に説明する
が、本発明はこれら実施例に限定されない
実施例1
第1図は、本発明の実施例の非線形2次高調波発生素子
を示す図である。High density polyethylene 120-135 Acrylonitrile-styrene copolymer 87-90 Polysulfone polycarbonate Polyvinylidene chloride 71-93 Polystyrene Vinyl chloride polypropylene 70-100 50-70 99-110 Test method for coefficient of thermal expansion 1.54 0.4-1 .1 2.8~3.5 1.63 2.4~2.7 1.59 2.0~2.4 1.60~1.63 0.3~0.6 1.59~1.60 2.8-4.2 1.52-1.55 2.5-4.2 1.48-1.50 0.9-1.4 ASTM D 696 1.0-1.1 6-8 4. 9-5.6 6-8 5-18.5 [Example] Hereinafter, the present invention will be explained in more detail with reference to Examples, but the present invention is not limited to these Examples.Example 1 FIG. FIG. 2 is a diagram showing a nonlinear second harmonic generation element according to an embodiment of the present invention.
第1図において、1はポリプロピレン(弾性率(剛性率
) 1.2 x 10’ kr/ d )基板を、2は
非線形光学材料、バニリンの単結晶薄膜を示す。In FIG. 1, 1 is a polypropylene (modulus of elasticity (rigidity) 1.2 x 10' kr/d) substrate, and 2 is a nonlinear optical material, a single crystal thin film of vanillin.
第2図は、上記本発明の非線形2次高調波発生素子を製
造方法を説明するための図である。FIG. 2 is a diagram for explaining a method of manufacturing the nonlinear second-order harmonic generating element of the present invention.
第2図において、3はポリプロピレン基板、4はポリエ
チレンよりなる補助基板を表わす。In FIG. 2, 3 represents a polypropylene substrate, and 4 represents an auxiliary substrate made of polyethylene.
該ポリプロピレン基板3とポリエチレンよりなる補助基
板4との間には、ポリカーボネートフィルムよりなるス
ペーサー(厚さ3μm)5.5′によって3μmの間隙
が形成される。A gap of 3 .mu.m is formed between the polypropylene substrate 3 and the auxiliary substrate 4 made of polyethylene by a spacer (3 .mu.m thick) 5.5' made of a polycarbonate film.
該間隙にバニリンを毛細管法(電子通信学会論文誌’8
8/10 vat、 J69−CNo、10 p12
8fl+−1290参照)によりバニリンを充填した後
、該バニリン薄膜を単結晶薄膜とするために、縦型帯域
溶融法を応用し、温度分布を持った炉の内部を1111
1/時の速度で降下させ、再結晶させた。なお、炉内温
度は81℃であった。Add vanillin to the gap using the capillary method (Transactions of the Institute of Electronics and Communication Engineers '8)
8/10 VAT, J69-CNo, 10 p12
After filling the vanillin with 8fl+-1290), in order to make the vanillin thin film into a single crystal thin film, a vertical zone melting method was applied, and the inside of the furnace with temperature distribution was heated to 1111.
The mixture was lowered at a rate of 1/hour to allow recrystallization. Note that the temperature inside the furnace was 81°C.
この様にして単結晶化を行った後、補助基板4を分離し
、非線形2次高調波発生素子を作製した。After performing single crystallization in this manner, the auxiliary substrate 4 was separated, and a nonlinear second harmonic generation element was produced.
本実施例によれば、亀裂、剥れ等による欠陥は生ぜず、
さらに、単結晶性もガラス基板に比べ良好であった。ま
た、ひずみ、基板からの不純物の混入もなく、変換効率
が高くなった。According to this example, defects such as cracks and peeling do not occur;
Furthermore, the single crystallinity was also better than that of a glass substrate. Furthermore, there was no distortion or contamination of impurities from the substrate, and the conversion efficiency was high.
実施例2
第3図は、本発明の他の実施例の非線形2次高調波発生
素子を示す図である。Embodiment 2 FIG. 3 is a diagram showing a nonlinear second harmonic generation element according to another embodiment of the present invention.
第3図において、6はメタクリル酸メチル樹脂(PMM
A)C弾性率(wi性率) 3.2 x10’ kir
/−〕基板を、7はバラーブロモエトキシm:トロベン
ゼン(非線形光学材料)の単結晶薄膜を示す。In Figure 3, 6 is methyl methacrylate resin (PMM
A) C elastic modulus (wi elasticity modulus) 3.2 x10' kir
/-] substrate, and 7 indicates a single crystal thin film of var-bromoethoxy m:trobenzene (nonlinear optical material).
上記素子は、基板6にグイシングツ−装置により、深さ
3μm、幅100μmの溝8を形成し、該溝8にバラー
ブロモエトキシm:トロベンゼンの粉末を充填する0次
いで、パラーブロモエトキシm:トロベンゼンの融点で
ある66°Cまで加熱し、溝8内に結晶を形成する。該
結晶に、実施例1のごとく縦型帯域溶融法を応用し、該
結晶を単結晶薄膜7とした。ただし、この時、炉内の温
度を66℃とし、降下速度を0.5開/hとした。The above element is manufactured by forming a groove 8 having a depth of 3 μm and a width of 100 μm on a substrate 6 using a Guissing tool, and filling the groove 8 with powder of para-bromoethoxy m:trobenzene. It is heated to 66° C., which is the melting point of benzene, and crystals are formed in the grooves 8. The vertical zone melting method as in Example 1 was applied to the crystal to form a single crystal thin film 7. However, at this time, the temperature inside the furnace was 66° C., and the descent rate was 0.5 openings/h.
本実施例のものは、実施例1と同様の効果を奏するばか
りでなく、作製が容易となり、且つ、側面にも基板が存
在しているので非線形光学材料の保護性も増す。This example not only has the same effects as Example 1, but is also easier to manufacture, and since the substrate is also present on the side, the protection of the nonlinear optical material is increased.
実施例3
第4図は、本発明のまた他の実施例の非線形2次高調波
発生素子を示す図である。Embodiment 3 FIG. 4 is a diagram showing a nonlinear second harmonic generation element according to another embodiment of the present invention.
第4図において、9は高密度ポリエチレン〔弾性率(M
性率) 0.7 x10’ bread) ノ中空7y
イバー状の部材を、10は非線形光学材料、パラ−ヒド
ロキシ−安息香酸メチルのファイバー状単結晶を示す。In Figure 4, 9 is high-density polyethylene [elastic modulus (M
Bread) 0.7 x10' bread) Hollow 7y
10 represents a fiber-like single crystal of methyl para-hydroxybenzoate, which is a nonlinear optical material.
第5図は、上記本発明の非線形2次高調波発生素子の製
造装置の説明図である。FIG. 5 is an explanatory diagram of the manufacturing apparatus for the nonlinear second-order harmonic generating element of the present invention.
第5図において、11は、非線形光学材料を溶融するた
めの溶融炉であり、その底部には、中空の砂嘴状の流出
路12が設けられ、また、非線形光学材料、パラ−ヒド
ロキシ−安息香酸メチルを溶融するためのヒーター13
が設けられている。In FIG. 5, reference numeral 11 denotes a melting furnace for melting the nonlinear optical material, and a hollow spit-like outlet 12 is provided at the bottom of the furnace. Heater 13 for melting methyl
is provided.
−m的に流出路12の出口14の内径は5μm〜50μ
mが良い。- The inner diameter of the outlet 14 of the outflow path 12 is 5 μm to 50 μm.
m is good.
15は、基本波の導波モードと第2次高調波の導波モー
ドまたは放射モードとが位相整合するように調整された
部材の材料、高密度ポリエチレンを溶融するための溶融
炉であり、その下部は、先細りとなっており該部材の流
出路16となっている。また、溶融炉15の下部の周囲
にはヒーター17が設けられている。−数的に流出路1
6の出口18の内径は1關〜IQamが良い。15 is a melting furnace for melting high-density polyethylene, which is the material of the member adjusted so that the waveguide mode of the fundamental wave and the waveguide mode or radiation mode of the second harmonic are phase-matched; The lower part is tapered and serves as an outflow passage 16 for the member. Further, a heater 17 is provided around the lower part of the melting furnace 15. - Outflow channel 1 numerically
The inner diameter of the outlet 18 of No. 6 is preferably 1° to IQam.
流出路16の下には温度勾配がつけられたヒーター19
が設けられている。A heater 19 with a temperature gradient is provided below the outlet passage 16.
is provided.
20は形成された非線形2次高調波発生素子を示す。20 indicates the formed nonlinear second harmonic generating element.
上記製造装置で非線形2次高調波発生素子を製造する場
合、非線形光学材料と基本波の導波モードと第2次高調
波の導波モードまたは放射モードとが位相整合するよう
に調整された部材の材料の融点がほぼ同じであることが
必要である。When manufacturing a nonlinear second-order harmonic generation element using the above-mentioned manufacturing apparatus, a member is adjusted so that the nonlinear optical material, the waveguide mode of the fundamental wave, and the waveguide mode or radiation mode of the second-order harmonic are phase-matched. It is necessary that the melting points of the materials be approximately the same.
非線形光学材料のバラ−ヒドロキシ−安息香酸メチルを
溶融炉11に、また、基本波の導波モードと第2次高調
波の導波モードまたは放射モードとが位相整合するよう
に調整された部材の材料のポリエチレンを溶融炉15に
入れ、それぞれを131℃〜140℃のヒーター13.
17で加熱し、溶融する。A nonlinear optical material, methyl rose-hydroxy-benzoate, is placed in the melting furnace 11, and a member is adjusted so that the waveguide mode of the fundamental wave and the waveguide mode or radiation mode of the second harmonic wave are phase-matched. The polyethylene material is put into a melting furnace 15, and each is heated to a temperature of 131°C to 140°C by a heater 13.
17 to melt.
溶融炉11及び溶融炉15を加圧すると、中空部にバラ
−ヒドロキシ−安息香酸メチルが詰まったファイバー状
のポリエチレンが流出路15の出口18から得られる。When the melting furnace 11 and the melting furnace 15 are pressurized, fibrous polyethylene whose hollow part is filled with methyl vara-hydroxy-benzoate is obtained from the outlet 18 of the outlet 15.
これを温度勾配を持ったヒーター1つによって徐々に温
度を下げ、パラ−ヒドロキシ安息香酸メチルを単結晶化
することにより、本発明の非線形2次高調波発生素子2
0が得られる。By gradually lowering the temperature using one heater with a temperature gradient and single-crystallizing methyl para-hydroxybenzoate, the nonlinear second harmonic generating element 2 of the present invention is produced.
0 is obtained.
本実施例のものは、実施例1と同様の効果を奏するばか
りでなく、作製が容易となる。The device of this example not only has the same effects as Example 1, but also is easy to manufacture.
なお、上記実施例では非線形光学材料を単結晶とする場
合について述べたが、非線形光学材料をを配向させても
良い。In addition, although the case where the nonlinear optical material was made into a single crystal was described in the said Example, the nonlinear optical material may be oriented.
し発明の効果]
以上述べてきたように、本発明によれば亀裂、剥れ等が
なく、単結晶性が著しく向上し、ひずみ、基板からの不
純物の混入がなく、変換効率が高い非線形2次高調波発
生素子の形成が可能になった。[Effects of the Invention] As described above, according to the present invention, there is no cracking, peeling, etc., the single crystallinity is significantly improved, there is no strain, there is no contamination of impurities from the substrate, and there is a high conversion efficiency. It has become possible to form a harmonic generation element.
第1図は、本発明波長変換素子の一実施例を示す斜視図
、第2図は、第1図の波長変換素子の製造方法を説明す
るための図、第3図は、本発明波長変換素子の他の実施
例を示す斜視図、第4図は、本発明波長変換素子のまた
他の実施例を示す斜視し
図、第5図は、第4図の波長変換素子の製造する装置の
説明図である。
第1図
第3図
第4図FIG. 1 is a perspective view showing an embodiment of the wavelength conversion element of the present invention, FIG. 2 is a diagram for explaining a method of manufacturing the wavelength conversion element of FIG. 1, and FIG. 3 is a perspective view showing an embodiment of the wavelength conversion element of the present invention. FIG. 4 is a perspective view showing another embodiment of the wavelength conversion element of the present invention, and FIG. 5 is a perspective view of an apparatus for manufacturing the wavelength conversion element of FIG. 4. It is an explanatory diagram. Figure 1 Figure 3 Figure 4
Claims (1)
第2次高調波の導波モードまたは放射モードとが位相整
合するよう調整された部材とから形成されてなる波長変
換素子において、前記物質が有機物質であり、前記部材
が前記物質と接しており、かつ、弾性率(剛性率)が0
.3×10^4kg/cm^2〜4.0×10^4kg
/cm^2の高分子化合物であることを特徴とする波長
変換素子。In the wavelength conversion element formed of a material having optical nonlinearity and a member adjusted so that the waveguide mode of the fundamental wave and the waveguide mode or radiation mode of the second harmonic are phase matched, The substance is an organic substance, the member is in contact with the substance, and the modulus of elasticity (modulus of rigidity) is 0.
.. 3 x 10^4 kg/cm^2 ~ 4.0 x 10^4 kg
A wavelength conversion element characterized in that it is a polymer compound with a wavelength of /cm^2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63218747A JPH0266527A (en) | 1988-09-01 | 1988-09-01 | Wavelength conversion element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63218747A JPH0266527A (en) | 1988-09-01 | 1988-09-01 | Wavelength conversion element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0266527A true JPH0266527A (en) | 1990-03-06 |
Family
ID=16724786
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63218747A Pending JPH0266527A (en) | 1988-09-01 | 1988-09-01 | Wavelength conversion element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0266527A (en) |
-
1988
- 1988-09-01 JP JP63218747A patent/JPH0266527A/en active Pending
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