JPH0266925A - Etching method for electrode foil of aluminum electrolytic capacitor - Google Patents
Etching method for electrode foil of aluminum electrolytic capacitorInfo
- Publication number
- JPH0266925A JPH0266925A JP63219011A JP21901188A JPH0266925A JP H0266925 A JPH0266925 A JP H0266925A JP 63219011 A JP63219011 A JP 63219011A JP 21901188 A JP21901188 A JP 21901188A JP H0266925 A JPH0266925 A JP H0266925A
- Authority
- JP
- Japan
- Prior art keywords
- etching
- acid
- foil
- current
- electrode foil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明はアルミニウム電解コンデンサ用電極箔のエツチ
ング方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a method of etching electrode foil for aluminum electrolytic capacitors.
従来の技術
いわゆるアルミニウム電解コンデンサはアルミニウム電
極箔と絶縁紙とを巻回し駆動用電解液を含浸して構成さ
れているが、アルミニウム電極箔には単位面積当りの静
電容量を増すために、その表面をエツチングして凹凸を
形成し表面積を拡大したものが使用されている。Conventional technology A so-called aluminum electrolytic capacitor is constructed by winding aluminum electrode foil and insulating paper and impregnating it with a driving electrolyte. The surface is etched to form irregularities to increase the surface area.
つまシ、近年IC、LSI等の発達により電解コンデン
サにおいても更に小形化・薄型化が要求されており、こ
のためには使用される電極箔の単位面積当りの静電容量
を増加することが必要なのである。In recent years, with the development of ICs, LSIs, etc., electrolytic capacitors are required to be smaller and thinner, and for this purpose, it is necessary to increase the capacitance per unit area of the electrode foil used. That's why.
従来よりアルミニウム電解コンデンサ用電極箔のエツチ
ング方法としては強度の強い点を生かした交流電流によ
るものかあシ、種々の添加剤又は波形に関する特許も出
願されている(例えば特開昭58−22390号)。Conventionally, the etching method for electrode foil for aluminum electrolytic capacitors has been to use alternating current to take advantage of its strong strength, and patents have also been filed for various additives or waveforms (for example, JP-A No. 58-22390). ).
発明が解決しようとする課題
しかしながら単純な従来の波形(正弦波など)と従来の
添加剤では、波面倍率(=エツチング後の電極箔の単位
面積当りの静電容量/エツチング前の単位面積当りの静
電容量)が不十分であるという欠点があった。Problems to be Solved by the Invention However, with a simple conventional waveform (such as a sine wave) and conventional additives, the wavefront multiplier (=capacitance per unit area of electrode foil after etching/capacitance per unit area before etching) The drawback was that the capacitance was insufficient.
本発明は高い波面倍率を有するアルミニウム電極箔を得
ることを可能にするものである。The present invention makes it possible to obtain an aluminum electrode foil having a high wavefront magnification.
課題を解決するだめの手段
このような従来の問題点を解決するために本発明は、塩
化アルミニウムを含む濃度3〜25係の塩酸溶液中で、
液温10〜了Q℃でアルミニウム箔の表面を又流電流を
用いてエツチングする際に、添加剤として硝酸、硫酸、
リン酸、シュウ酸のうちいずれか1種類以上の酸化性の
酸又はイオンを含みかつ交流電流の各サイクルの極大電
流値までの立上り時間がe5ms以内の正負対称波形で
エツチングするものである。Means for Solving the Problems In order to solve these conventional problems, the present invention provides a solution of hydrochloric acid containing aluminum chloride at a concentration of 3 to 25.
When etching the surface of an aluminum foil using a current at a solution temperature of 10 to 100°C, nitric acid, sulfuric acid,
It contains one or more oxidizing acids or ions among phosphoric acid and oxalic acid, and etches with a positive and negative symmetrical waveform in which the rise time to the maximum current value of each cycle of alternating current is within e5ms.
また、添加剤の濃度としては、0.01〜10%とする
ものである。Further, the concentration of the additive is 0.01 to 10%.
作用
上記のように、酸化性の酸を含みかつ交流電流の各サイ
クルの極大電流値までの立上り時間が5!IIS以内の
波形でエツチングする作用は以下のようである。Effect As mentioned above, it contains an oxidizing acid and the rise time to the maximum current value of each cycle of alternating current is 5! The effect of etching with a waveform within IIS is as follows.
一般的に塩酸中での交流電流によるエツチングでは、ア
ノード(正)サイクルでのビット発生とカンード(負)
サイクルでの化学溶解・皮膜形成を交互にくり返しなが
ら進行していく。そこで酸化性の酸を添加することによ
りカソード時に均一で強固な皮膜を形成して化学溶解を
抑制しかつアノード時のエツチング電流を51115以
下で急激に立上げることにより強固な皮膜の欠陥部から
均一にエッチビットを発生させるものである。このよう
にして従来より約20%高い波面倍率を持ったアルミニ
ウム箔を得ることができる。In general, when etching with alternating current in hydrochloric acid, bit generation occurs during the anode (positive) cycle and cand (negative) cycle occurs.
The process progresses through alternating cycles of chemical dissolution and film formation. Therefore, by adding an oxidizing acid, a uniform and strong film is formed at the cathode to suppress chemical dissolution, and by rapidly increasing the etching current at 51115 or less at the anode, the etching is uniformly removed from the defective parts of the strong film. This causes etch bits to occur. In this way, an aluminum foil having a wavefront magnification approximately 20% higher than the conventional one can be obtained.
実施例
第1図は本発明による電流波形の例であり、tは立上り
時間を示す。Embodiment FIG. 1 shows an example of a current waveform according to the present invention, and t indicates the rise time.
第2図は塩酸溶液中で下記条件でエツチングした後、ア
ジピン酸アンモニウム溶液で70vで化成した静電容量
である。FIG. 2 shows the capacitance obtained by etching in a hydrochloric acid solution under the following conditions and then anodizing with an ammonium adipate solution at 70V.
CXッfン’fH) 5%HCl+2%人7!ce
s〔添加剤〕 1%HNO。CXffn'fH) 5% HCl + 2% people 7! ce
s [Additive] 1% HNO.
〔アルミニウム箔34N、90μ重い軟質材〔エツチン
グ温度〕 40°C
〔エツチング時間〕5m工n
〔周波数) 20 Hz
[立上り時間] 1.3,5,7.10m5第2
図に示されるように立上り時間を早くする程静電容量は
高い傾向を示し、5 ms以下で従来レベルより高くな
り、I ms以下では約20チ以上の波面倍率のアッ
プが認められた0又、この効果は添加剤との交互作用も
大きく、硝酸、硫酸。[Aluminum foil 34N, 90μ heavy soft material [Etching temperature] 40°C [Etching time] 5 m process n [Frequency] 20 Hz [Rise time] 1.3, 5, 7.10 m5 2nd
As shown in the figure, the capacitance tends to increase as the rise time becomes faster; it becomes higher than the conventional level at 5 ms or less, and an increase in wavefront magnification of about 20 inches or more at I ms or less. , this effect also has a large interaction with additives, such as nitric acid and sulfuric acid.
リン酸、シュウ酸のいずれか一種類以上を含むことが不
可欠である。It is essential to contain at least one of phosphoric acid and oxalic acid.
発明の効果
以上述べたように本発明のエツチング方法によれば、従
来に比べ20チ以上拡面倍率の高いアルミ電解コンデン
サ用電極箔を製造することができ、製品の小形化及びコ
ストダウンに大きな効果がある。Effects of the Invention As described above, according to the etching method of the present invention, it is possible to manufacture electrode foil for aluminum electrolytic capacitors with a higher surface area magnification of 20 inches or more compared to the conventional method, which has a significant effect on product miniaturization and cost reduction. effective.
第1図は本発明のエツチング方法によるエツチング波形
を示す波形図、第2図は本発明の詳細な説明するだめの
立上り時間と静電容量との関係を示す特性図である。FIG. 1 is a waveform diagram showing the etching waveform according to the etching method of the present invention, and FIG. 2 is a characteristic diagram showing the relationship between the rise time and the capacitance, which does not explain the present invention in detail.
Claims (2)
液中で、液温10〜70℃で交流電流を用いてアルミニ
ウム箔の表面を電解エッチングする際に、添加剤として
硝酸,硫酸,リン酸,シュウ酸のうちいずれか1種類以
上の酸又はイオンを含みかつ交流電流の各サイクルの極
大電流値までの立上り時間が5ms以内の正電対称波形
でエッチングすることを特徴とするアルミニウム電解コ
ンデンサ用電極箔のエッチング方法。(1) When electrolytically etching the surface of aluminum foil using alternating current at a temperature of 10 to 70°C in a hydrochloric acid solution containing aluminum chloride with a concentration of 3 to 25%, nitric acid, sulfuric acid, and phosphoric acid are used as additives. , oxalic acid, or ions, and is etched with a positively symmetrical waveform in which the rise time to the maximum current value of each cycle of alternating current is within 5 ms. Etching method for electrode foil.
記載のアルミニウム電解コンデンサ用電極箔のエッチン
グ方法。(2) Claim 1, wherein the concentration of the additive is 0.01 to 10%.
The method of etching electrode foil for an aluminum electrolytic capacitor described above.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63219011A JP2847717B2 (en) | 1988-09-01 | 1988-09-01 | Method for etching electrode foil for aluminum electrolytic capacitor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63219011A JP2847717B2 (en) | 1988-09-01 | 1988-09-01 | Method for etching electrode foil for aluminum electrolytic capacitor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0266925A true JPH0266925A (en) | 1990-03-07 |
| JP2847717B2 JP2847717B2 (en) | 1999-01-20 |
Family
ID=16728861
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63219011A Expired - Fee Related JP2847717B2 (en) | 1988-09-01 | 1988-09-01 | Method for etching electrode foil for aluminum electrolytic capacitor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2847717B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0616054A3 (en) * | 1993-03-19 | 1994-11-23 | Matsushita Electric Industrial Co Ltd | Process for producing an electrode sheet for aluminum electrolytic capacitors. |
| US6620306B2 (en) | 2000-11-29 | 2003-09-16 | Matsushita Electric Industrial Co., Ltd. | Method of manufacturing electrode foil for aluminum electrolytic capacitor and AC power supply unit |
| CN114678221A (en) * | 2022-05-05 | 2022-06-28 | 肇庆绿宝石电子科技股份有限公司 | Formation aluminum foil treatment method capable of improving capacity of stacked capacitor, formation aluminum foil and stacked capacitor |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61158133A (en) * | 1984-12-28 | 1986-07-17 | 松下電器産業株式会社 | Etching of electrode foil for aluminum electrolytic capacitor |
| JPS62113416A (en) * | 1985-11-13 | 1987-05-25 | エルナ−株式会社 | Etching of aluminum foil for electrolytic capacitor |
-
1988
- 1988-09-01 JP JP63219011A patent/JP2847717B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61158133A (en) * | 1984-12-28 | 1986-07-17 | 松下電器産業株式会社 | Etching of electrode foil for aluminum electrolytic capacitor |
| JPS62113416A (en) * | 1985-11-13 | 1987-05-25 | エルナ−株式会社 | Etching of aluminum foil for electrolytic capacitor |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0616054A3 (en) * | 1993-03-19 | 1994-11-23 | Matsushita Electric Industrial Co Ltd | Process for producing an electrode sheet for aluminum electrolytic capacitors. |
| US5439565A (en) * | 1993-03-19 | 1995-08-08 | Matsushita Electric Industrial Co., Ltd. | Method of manufacturing electrode foil for aluminium electrolytic capacitors |
| US6620306B2 (en) | 2000-11-29 | 2003-09-16 | Matsushita Electric Industrial Co., Ltd. | Method of manufacturing electrode foil for aluminum electrolytic capacitor and AC power supply unit |
| CN114678221A (en) * | 2022-05-05 | 2022-06-28 | 肇庆绿宝石电子科技股份有限公司 | Formation aluminum foil treatment method capable of improving capacity of stacked capacitor, formation aluminum foil and stacked capacitor |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2847717B2 (en) | 1999-01-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |