JPH026759A - Testing device for logic integrated circuit - Google Patents

Abstract

PURPOSE:To use a test program in common irrespective of the number of sets of built-in measuring parts by outputting a designating signal for designating selectively that which has been connected to a connecting relay which has been set to ON in plural measuring parts, to the measuring part from a designating part. CONSTITUTION:A control part 11 stores a test program in which a DC characteristic measuring condition to a logic integrated circuit to be measured (DUT) has been described, and at the time of measuring a characteristic, a number of a tester terminal to which the DUT whose characteristic is to be measured has been connected is set to a relay control part 12, based on this test program, and also, a measuring condition of the characteristic measurement is set to measuring parts 13, 14, respectively. A designating part 15 outputs a designating signal for designating selectively that which has been connected to a connecting relay which has been set to ON in the measuring parts 13, 14, to the measuring parts 13, 14, based on a relay control signal from the relay control part 12. Subsequently, as for the measuring parts 13, 14, when an input request signal for inputting a measured value to the test program is inputted from the control part 11, only the measuring part which has been designated by the designating signal outputs a signal related to the measured value to the control part 11.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a testing device for logic integrated circuits, and in particular, a function for measuring direct current characteristics such as voltage applied current measurement, current applied voltage measurement, and voltage measurement. The present invention relates to a logic integrated circuit testing device having a plurality of built-in DC measuring units.

[Prior Art] A logic integrated circuit testing device (hereinafter referred to as a test device) uses voltage to measure direct current (DC) characteristics such as leakage current to each terminal of a logic integrated circuit under test (hereinafter referred to as a DUT). It has a built-in direct current measurement section (hereinafter referred to as DC measurement section) that has functions for performing measurements related to DC characteristics such as applied current measurement, current applied voltage measurement, and voltage measurement.

FIG. 3 is a block diagram showing a direct current measurement circuit (hereinafter referred to as DC measurement circuit) of a conventional test device of this type. The control unit 21 stores a test program that describes the measurement conditions for measuring the DC characteristics of the DUT, and decodes this test program when measuring the DC characteristics. Terminal numbers are set, and the first and second DC measuring sections 23.2
4. Set the measurement conditions for DC characteristic measurement. Tester terminal 0
1,02,03. ... are connected to terminals (not shown) of the DUT to be measured for DC characteristics, respectively, and these tester terminals 0. ．． 02, 03... and either the first DC measurement section 23 or the second DC measurement section 24, a plurality of DC connection relays (hereinafter referred to as DC connection relays) Rρ1. Rρ2. Rρ3. ...is provided.

The relay control unit 22 controls the DC connection relay RβIRJ72. corresponding to the tester terminal set by the control unit 21. R3
．． ... is selected to turn on this DC connection relay when measuring DC characteristics, and turn it off after completing the DC characteristics measurement.

Further, the first and second DC measurement sections 23 and 24 each have measurement functions of voltage applied current measurement, current applied voltage measurement, and voltage measurement, and the DUT measurement functions set by the control section 21
The measurement function is selected according to the conditions for measuring the DC characteristics of
A predetermined DC characteristic is measured on a terminal (not shown) of the DUT via a C-connection relay and a tester terminal. here,
The first DC measuring section 23 is connected to an odd numbered tester terminal O1゜0.
3, o5. These tester terminals 0. ．． 03,05. ... connected to odd-numbered DC connection relays Rρ1. Rρ3゜R(5,...
connected only to On the other hand, the second DC measuring section 24 uses even numbered tester terminals 0204.06. These tester terminals 02, 04,
06. Even-numbered DC connection relays R, l connected to...
,,Rη4Rρ6.・Connected only to

The plurality of DC connection relays R, R, , Rρ2Rρ3 described above
．． Rff14,... DCC connection relay group part 1
Consists of 6. Also, multiple tester terminals OL.

02.03,04. ... constitutes the tester terminal section 17.

Next, the operation of the DC measurement circuit of the conventional test apparatus configured as described above will be explained. Predetermined D for DUT
When performing C characteristic measurement, the control unit 21 decodes the stored test program and selects the tester terminals 0□, 02, 03 . . . to which the terminals of the DUT whose DC characteristics are to be measured are connected.・・・
・Set the number in the relay control unit 22. The control unit 21 also controls the DC characteristic measurement conditions, that is, the selection of the measurement function of voltage applied current measurement, current applied voltage measurement, or voltage measurement, the voltage value or current value applied to the DUT, and the measured current value or A voltage value determination limit is set in the first DC measurement section 23 and the second DC measurement section 24.

In order to select the tester terminal set by the control unit 21, the relay control unit 22 outputs a relay control signal to selectively turn on the DC connection relay connected to this tester terminal. The voltages or currents set in the first DC measurement section 23 and the second DC measurement section 24 are applied to the DC connection relays R, &, R, R2, Rρ3, .・
・One of the corresponding tester terminals ○, 02, 03 via the specified DC connection relay that is turned on.
゜... and is further applied to the DUT terminal.

With the measurement system maintained in this way, the specified D
Predetermined DC characteristics are measured for the UT terminal.

In this conventional DC measurement circuit, as described above, the first D
The C measurement unit 23 connects odd-numbered DC connection relays Rρ1. Rρ3
．． Rρ5. Rρ7. ... to the odd numbered tester terminals 01. Og, 05, Q7, .
Even numbered tester terminals 0204.06,08 through...
．． ...is only connected to. Therefore, for example, when performing DC characteristic measurements on DUT terminals connected to tester terminals 01 and 02, respectively, the control section 21 controls the relay control section 22 to control the tester terminals 01 and 02. and 02 are set, the DC connection relays Rρ1 and Rρ2 are turned on by the relay control signal from the relay control unit 22, and the first DC measurement unit 23 and the second DC measurement unit 24 are connected to the tester terminal 0, respectively.
Connected to 1 and 02.

By performing such control, the D of the two terminals of the DUT
It becomes possible to perform C characteristic measurements in parallel. In this case, since the first and second DC measuring sections 2324 are functioning simultaneously, one DC measuring section
2DUT in virtually the same time as performing a C-characteristic measurement.
It is possible to measure the DC characteristics of the terminal. Therefore, the time required to measure the DC characteristics is approximately half that of the case where there is only one DC measuring section.

In recent years, as the degree of integration of logic integrated circuits has increased, the number of terminals on a DUT has tended to increase, and as a result, the time required to measure DC characteristics has been increasing. In order to shorten the measurement time for measuring DC characteristics for DUTs whose number of terminals tends to increase in this way, it is necessary to increase the number of built-in DC measurement sections and make them function in parallel, as described above. is valid.

Therefore, in practice, there is a tendency to increase the number of DC measurement units from two to eight or more.

[Problems to be Solved by the Invention] However, the DC measuring circuit of the conventional logic integrated circuit testing device described above has the following problems.

In other words, in a conventional DC measurement circuit that includes multiple built-in DC measurement units, DC characteristics are measured for each terminal of the DUT.
In order to import the measured values obtained at that time into the test program, the test program selects the appropriate DC measurement unit from among the multiple DC measurement units based on the arrangement number of the tester terminal used to measure the DC characteristics. There is also the complication of having to do so.

Moreover, if we take the DC measuring circuit shown in FIG. 3 that incorporates the two first and second DC measuring sections 23 and 24 as an example, these two DC measuring sections 2324 can be connected individually or in parallel. In order to function properly and measure the DC characteristics of the DUT, D
There is a problem in that it is necessary to prepare test programs individually to correspond to the number of built-in DC measuring units according to the functions of the UT.

The present invention has been made in view of such problems, and
It is an object of the present invention to provide a logic integrated circuit testing device in which a test program can be commonly used regardless of the number of built-in DC measurement sections even if the number of built-in DC measurement sections increases.

[Means for Solving the Problems] A logic integrated circuit testing device according to the present invention includes a plurality of DC measurement units that measure DC characteristics, and a plurality of tester terminals to which terminals of a logic integrated circuit under test are connected. , a plurality of connection relays respectively connected between the tester terminal and any of the DC measurement sections, a relay control section that outputs a relay control signal for controlling on/off of the connection relays, and a A test program that describes measurement conditions regarding DC characteristics for each terminal of a logic integrated circuit is stored, and when measuring DC characteristics, the test program is deciphered and the tester terminal corresponding to the logic integrated circuit to be measured whose DC characteristics are to be measured is In the logic integrated circuit testing apparatus, the logic integrated circuit testing apparatus includes a control unit that sets a DC measurement condition to a relay control unit and sets a DC measurement condition to the DC measurement unit, wherein one of the plurality of DC measurement units is turned on based on the relay control signal. a designation unit that outputs a designation signal for selectively designating a connected relay to the DC measurement unit; When a capture request signal is input, a signal related to a measured value is output to the control section if specified by the designation signal.

[Operation] In the present invention, when a logic integrated circuit to be measured whose DC characteristics are to be measured is set by the control unit, the relay control unit outputs a relay control signal to control the logic integrated circuit to be measured or the connected connection. Selectively turn on relays. Further, based on the relay control signal, the designation section outputs to each DC measurement section a designation signal that designates the DC measurement section corresponding to the connected relay turned on by the relay control signal among the plurality of DC measurement sections. Then, the DC measurement unit specified by the specified signal measures the DC characteristics of the terminal of the logic integrated circuit under test under the measurement conditions set by the control unit via the connection relay that is selectively turned on. Measure.

Therefore, when the control unit outputs an import request signal to the plurality of DC measurement units to import measured values into the test program, only the DC measurement units specified by the specified signal will receive the measured values. is output to the control section. As a result, the test program can be used in common regardless of the number of DC measurement sections built into the test device.

[Embodiment] Hereinafter, an embodiment in which the present invention is applied to a logic integrated circuit testing device equipped with a DC measurement circuit incorporating two DC measurement units will be specifically described with reference to the accompanying drawings.

FIG. 1 is a block diagram showing the DC measurement circuit of the device of this embodiment. Components that are the same as those in FIG. 3 are designated by the same reference numerals and their descriptions will be omitted.

The control unit 11 is a control circuit that stores a test program that describes the measurement conditions for measuring the DC characteristics of the DUT.
This is common to 3, 1.4. Then, this control section 11
When measuring DC characteristics, decode this test program, set the number of the test terminal (predetermined desk terminal) to which the logic integrated circuit under test whose DC characteristics are to be measured is connected to the relay control unit 12, and , first and second DC measuring section 1
In step 314, measurement conditions for DC characteristic measurement are set.

The control unit 11 also controls the first and second DC measurement units 1 in order to import measured values into the test program when measuring DC characteristics.
3. Output import request No. 18 on 1.4.

The relay control section 12 outputs a DCC connection relay group section 16 relay control signal to electrically connect a predetermined tester terminal set by the control section 11 and the DC measurement section 1.3.14. DC connection relay Rρ1 connected to a predetermined tester terminal.

Rf2. Rff13. ... is selectively turned on, and the relay control signal is output to the DC specifying section 15 via the control bus 18. The DC designation unit 15 inputs the relay control signal and outputs a designation signal designating the DC measurement unit 13.14 whose measured value is to be output to the control unit 11, that is, the DC measurement unit 13.14 corresponding to the predetermined tester terminal. 1
A designation signal designating 4 is output to the first and second DC measuring sections 13 and 14 via one data bus. This designated signal has data ``1'', ``O'''', and has the specified DC
Data '1'° is given to the measuring section, and data "O++" is given to the undesignated DC measuring section.

FIG. 2 is a block diagram specifically showing the configuration of the DC designation section 15 described above.

That is, the DC specifying section 15 is the first and second DC measuring section 1
The ROM 15a has two memory areas in one-to-one correspondence with 3.14. Also, this ROM1.
Each address of the two memory areas of 5a corresponds to a pair of tester terminals Ol, 02, 03, . . .

Then, each time the DC characteristics are measured, a relay control signal from the relay control section 12 or an R signal is sent via the control bus 18.
It is input to the address of OM15a.

Data pins 1 to 1 for each address are determined by the DC measurement unit 1314.
There is a one-to-one correspondence. Then, when the relay control signal is input, the data bits for each address include the DC connection relay Rρ1, which is turned on by the relay control signal. R
ρ2. 1" is written only in the data pin 1- corresponding to the DC measurement unit 13, 14 connected to . . . , and "0" is written in the other data bits. is output to one output bus for each D
Either data "1" or 0°' is input to the C measurement units 13 and 14.

Further, the first and second DC measurement sections 13 and 14 each have measurement functions of voltage applied current characteristics, current applied voltage characteristics, and voltage measurement, and the DOT set by the control section 11
The measurement function is selected according to the conditions of DC characteristic measurement. When connected to any of the tester terminal cores via the DCC connection relay section 16, the DC characteristics of the DUT terminal connected to this desk terminal are measured.

Furthermore, when the first and second DC measurement sections 13 and 14 receive the acquisition request signal output from the control section 11,
Only the DC measurement section to which the designated signal "1" is applied sends the measured value to the control section 1].

As shown in the figure, the first DC measurement unit 13 includes odd-numbered DC connection relays Rη, , R,
! 2. ．． Rρ5. . . , the odd-numbered tester terminals 0 . ．． 03,05
．． It is possible to connect only to...

Therefore, the first DC measuring section 13 uses the odd numbered tester terminals 0. ．． 03,05. ...is responsible for measuring the DC characteristics of the DC terminals connected to... On the other hand, the second DC measurement unit 14 detects even-numbered DC connection relays Rρ2. R4. R6. Even numbered tester terminals 0□, 04, 0 through...
6. ...and therefore the DUT terminals connected to these even-numbered tester terminals])
They are responsible for C characteristic measurements.

In the DC measurement circuit of the apparatus of this embodiment having the above-described configuration, an operation will be described in which a measurement value obtained during DC characteristic measurement for a predetermined DOT terminal is incorporated into the test program of the control unit 11.

First, a capture request signal for capturing measured values into the test program is sent from the control unit 11 to the first and second DC measurement units 1.
It will be output simultaneously on 3.14. Then, the first and second DC measurement units 13.14 check the designation signal given from the DC designation unit 15, respectively, and determine if the designation signal is “1”.
'', the measured value obtained by the DC characteristic measurement is sent to the control unit 11. On the other hand, if the designated signal or the DC
The measuring section does not perform the above-mentioned operation.

2, the first and second DC measurement parts 13°]4 are D
C designation section] data of the designated signal received from 5 ゛°1',
0'' is held, and in response to the capture request signal output from the control unit 11, the D
The measured value obtained by the C characteristic measurement is output to the control section 11. This makes it extremely easy to incorporate measured values into a test program.

Note that the odd numbered DC connection relays R℃,,R,&,.

...and an even numbered DC connection relay Rρ
2. Rρ4. ..., if any one of them is turned on at the same time, either DC measuring section 13 or 14 is specified,
Data "1" from the DC specifying section 15 is sent to the DC measuring section 13.
14 is given to both sides. As a result, the first and second DC measurement units 13.14 detect the respective corresponding predetermined DUTs.
The DC characteristics of the terminals can be measured in parallel.

[Effects of the Invention] As explained above, according to the present invention, one or more DC measurement units corresponding to the relay control signal output from the relay control unit are specified when measuring DC characteristics. Because it has a designated part, even if the number of DC measuring parts built into the test equipment increases, this test program can be used for multiple DC It can be used in common with the measuring section. Therefore, only one type of test program is required for each type of logic integrated circuit under test, which effectively avoids an increase in the number of steps required to revise the test program.Moreover, the test program execution time is reduced. It can be shortened. Furthermore, since it is possible to avoid an increase in the number of test programs, it is extremely beneficial to apply the present invention, especially in cases where production bases are dispersed in various locations.

[Brief explanation of the drawing]

FIG. 1 is a block diagram showing an embodiment in which the present invention is applied to a logic integrated circuit testing device having a DC measurement circuit incorporating two DC measurement units, and FIG. FIG. 3 is a block diagram showing the configuration of the designation section. FIG. 3 is a block diagram showing the configuration of the conventional device. : l-1, 2], , control section, 12, 22; relay control section, 13.23. 1st DC measuring section, 14, 24; 2nd
DC measuring section, 15; DC specifying section, 15a; ROM,
], 6; Part of DC connection relay, ]7; Tester terminal section, 18; Control bus, 19; Data bus

Claims (1)

[Claims] (1) A plurality of DC measurement units that measure DC characteristics, a plurality of tester terminals to which terminals of the logic integrated circuit under test are connected, and a connection between the tester terminals and any of the DC measurement units, respectively. A test program that describes the measurement conditions for the DC characteristics of each terminal of the logic integrated circuit under test, including a plurality of connected relays, a relay control unit that outputs relay control signals to turn on and off the connected relays, and A tester terminal corresponding to the logic integrated circuit to be measured whose DC characteristics are to be measured by storing the test program at the time of measuring the DC characteristics is set in the relay control unit, and DC measurement conditions are set in the DC measurement unit. A control unit for testing logic integrated circuits, comprising: a designation signal for selectively designating one of the plurality of DC measurement units connected to a connected relay that is turned on based on the relay control signal; The DC measurement unit includes a designation unit that outputs the output to the DC measurement unit, and when the DC measurement unit receives an import request signal from the control unit to import the measurement value into the test program, it performs the measurement when specified by the designation signal. A logic integrated circuit testing device, characterized in that a signal related to a value is output to the control section.