JPH0268703A - Magnetic head using soft magnetic alloy film - Google Patents

Abstract

PURPOSE:To prevent the deterioration of the soft magnetic characteristics of a magnetic alloy in a heat treatment stage and to improve the saturation magnetic flux density thereof by allowing a 3rd additive metal M and carbon C to coexist therein so as to satisfy specific conditions. CONSTITUTION:The alloy film expressed by Cox(M1-yCy)zNw is used as the magnetic film of the magnetic head. In the formula, M is one or >=2 kinds of Nb, Ta, Mo, V, and W and coexists with C (carbon); N is a metal consisting of one or >=2 kinds of Zr, Hf, and Ti. The additive elements M and C are made to coexist and the ratios of the respective elements to be added are so determined as to satisfy the following conditions: 82<=X<=95, 0.2<=Y<=0.8, Z+Z+W=100 (in at.%, where Y is the compsn. ratio of M and C (carbon). The saturation magnetic flux density of the soft magnetic alloy film is increased in this way and the film is not crystallized even if the film is subjected to the heating stage. The deterioration of the magnetic characteristics thereof is thus prevented.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a magnetic head suitable for high-density magnetic recording, and in particular to a soft magnetic alloy film having high saturation magnetic flux density, low magnetostriction constant, and excellent heat resistance. This invention relates to a magnetic head using a magnetic head.

[Conventional technology]

In recent years, advances in the density and performance of magnetic recording have been remarkable.
In the field of R magnetic heads, high coercive force tapes have been used to improve recording density, and magnetic heads using high-performance magnetic materials with high saturation magnetic flux densities are needed to record and reproduce signals sufficiently. Demand is increasing. In addition, in thin film heads used for computer disks, etc.
As recording density increases, it is necessary to make magnetic poles thinner to improve resolution, and magnetic saturation easily occurs at thin magnetic pole tips. Therefore, thin films using high-performance magnetic films with high saturation magnetic flux density are required. A head is needed. Furthermore, even in single-pole heads for perpendicular magnetic recording, which have been actively researched in recent years, it is necessary to make the main pole extremely thin in order to improve recording density, so as mentioned above, magnetic saturation occurs at the pole tip. This is likely to occur, and to solve this problem, a single-pole head for perpendicular magnetic recording using a high-performance magnetic film with high saturation magnetic flux density is required. Furthermore, in magnetoresistive magnetic heads used in computer tape storage devices and the like, high-performance magnetic films are required as shielding thin films used in these.

Conventionally, the magnetic film for these magnetic heads has mainly been Ni
-Fe-based alloy films (permalloy films) have been used, but in recent years, amorphous alloy sputtered films have been developed as high-performance magnetic films with high saturation magnetic flux density. Among these, amorphous alloys whose vitrification element is mainly Zr have superior thermal stability and corrosion resistance compared to amorphous alloys whose vitrification elements are metalloid elements such as C, B, Si, and P. It has excellent properties as a magnetic film for magnetic heads. Zr
Specifically, the amorphous alloy is represented by the composition formula of MaTbZrc. Here M is C o with magnetic moment.

At least one of Fe, Ni, etc., and T is M and Z
It is a metal element other than r. Regarding such an amorphous element whose vitrification element is mainly Zr, Japanese Patent Application Laid-Open No. 55-1
It is described in the specification of No. 38049 and the specification of JP-A-56-84439. Among these Zr-based amorphous alloys, Co-Zr-based amorphous alloys in which M is Co are
It is an excellent magnetic material with a high saturation magnetic flux density. but,
Since the magnetostriction constant of this amorphous alloy exhibits a relatively large value of 2 to 4X10-6, the additive elements T include V, Nb, Ta, and Cr, which make a negative contribution to the magnetostriction constant of the amorphous alloy.

The magnetostriction constant has been adjusted to approximately zero by using elements such as Mo and W.

[Problem to be solved by the invention]

However, when such an amorphous alloy magnetic film is applied to a magnetic head, the following problems occur. That is,
Generally, in a magnetic head that uses a magnetic film as a magnetic path, a heating process is often included in the manufacturing process.
The temperature is at least 150°C and can reach around 500°C.

In general, CO-based metal-metal amorphous magnetic films are
The higher the composition, the higher the saturation magnetic flux density, but the lower the crystallization temperature and the lower the thermal stability. Conventionally, the saturation magnetic flux density required for a magnetic head was approximately IT or less, but as the coercive force of a magnetic recording medium increases, the saturation magnetic flux density of the pole magnetic film is required to be approximately IT or higher. However, in a Co-Zr metal-metal amorphous film, the saturation magnetic flux density is higher than IT, and the crystallization temperature is 600°C.
It has been difficult to produce a magnetic head with a pole magnetic film having a high saturation magnetic flux density in terms of thermal stability.

An object of the present invention is to solve such problems, and to provide a magnetic alloy that does not deteriorate the soft magnetic properties of the magnetic alloy used in the magnetic circuit during the heat treatment process during manufacturing of the magnetic head, has a high saturation magnetic flux density, and has excellent head properties. It's all about getting the head.

[Means to solve the problem]

In order to achieve the above object, the magnetic head of the present invention uses an alloy film represented by Cox (Mt-YCY) ZNW as a magnetic film. Here, M is Nb.

6 Additional elements M and C (carbon) which are one or more of Ta, Mo, V, and W and coexist with C (carbon), and N is a metal consisting of one or more of Zr, Hf, and Ti. It has been discovered that heat resistance is improved by the coexistence of The amount of each element added is as follows.

82≦X≦95゜ 0.2≦Y≦0.8゜ x+z+w=　1　o.

(The C11th position is at%, where Y is the composition ratio of M and C (carbon)) [Function] The present invention is characterized in that the third additive metal M and C (carbon) are made to coexist, The third additional metal M and C
It is thought that thermal stability is increased by combining the (carbon) elements to form a compound with a high melting point. The present invention is more effective when the saturation magnetic flux density is higher than IT, so
It is preferable that the Co composition, that is, be. Further, in order for C (carbon) to form a carbide with an additive element other than Co and to improve thermal stability, 0.2≦Y≦0.8 is required.

〔Example〕

Hereinafter, the present invention will be explained in detail with reference to Examples.

Example 1 Using a high-frequency two-pole sputtering device, (1) Co57-
xTaxZra, (2) Coez-xCxZrs,
(3) C0117-X(Tao, aCo, a)xZr
An amorphous alloy film having a thickness of 1.0 μm and having a composition a was produced. Film formation was performed in an Ar gas atmosphere. Note that the following results were similar even when the film was formed in a mixed gas atmosphere of Ar and N2 (nitrogen). In Figure 1 (1) Co97-
xTaxZra+(2) CaB6-xCxZrs,
(3) Co57-x(Tao, 5Co, 5)xZra
The relationship between the composition X of an amorphous film and the crystallization temperature Tx is shown.

The crystallization temperature of each alloy system becomes higher as X increases, that is, as the co composition decreases.

Among the three alloy systems mentioned above, Ca has the highest crystallization temperature.
B7-x(Tao,!ICo,l5)xZra,
It can be seen that the coexistence of Ta and C (carbon) in the CoZr-based alloy increases the crystallization temperature. FIG. 2 shows the relationship between the composition Y (composition ratio of Ta and C (carbon)) and crystallization temperature of the Coδ7(Tax-yCy) to Zr3 amorphous alloy. It can be seen that when the composition range of Y is 0.2≦Y≦0.8, the crystallization temperature is high, and when Y≦0.2+'/≧0.8, the crystallization temperature is suddenly low.

Table 1 Table 1 shows the crystallization temperature, saturation magnetic flux density, and coercive force of Coez(Mo, sCo, 5)eZrz. Here, M was Nb, Ta, Mo, V, and W. For comparison, M is Ag, Au, Cr, Pt, or Mn.

Also shown is one made of Ni. When M is Nb or Ta, the crystallization temperature is 500° C. or higher, and the saturation magnetic flux density at that time is 1.3T. M is Mo.

v, W, the saturation magnetic flux density is 1.3T, but the crystallization temperature is 450°C, which is lower than when M is Nb or Ta, but the crystallization temperature is lower than when C (carbon) is not included. was rising. However, M is A g rAu, Cr, Pt
, Mn, and Ni, the crystallization temperature is approximately 350C,
It was equivalent to or lower than the case where C (carbon) was not included. In FIG. 3, Coax(Mo, aCo,
a) It shows the relationship between the crystallization temperature of the sZr2 amorphous alloy film and the melting point of MC (carbide). It can be seen that the higher the melting point of carbide MC, the higher the crystallization temperature. Co9x (Mo, sCo, a) whose carbide MC has a melting point of 3000°C or higher
eZrz has a crystallization temperature of 500°C or higher.

Table 22 Table 3 shows Coez (MoesCo, 5)sHfz
.

Indicates the crystallization temperature, saturation magnetic flux density, and coercive force of the Go9x (Mo, l5Co, 5) eTiz amorphous alloy film, M is N
b.Ta.

Mo, V, and W. For comparison, M is A g
HA u HCr y P t 1 M n t N
It is also shown as i. When the additive elements other than CO, M, and C (carbon) are Hf and Ti, the same tendency as with Zr is shown. By the way, the carbides of Hf and Ti also have a melting point of 3.
Since the temperature exceeds 0oO°C or higher, it seems to show the same tendency as Zr. In addition, Co M Hf.

Even when C (carbon) was added to CoMTi, no increase in coercive force was observed.

Example 2 Coax (Tao, 5Co, Is) °aZrz and Coe
zTaI! A multilayer film of IZr+amorphous film was formed on 87059 glass. Note that the film formation was performed in an Ar gas atmosphere.

CoI]z(Tao, 3Co, 5)eZrz and Co5x
The thickness of each TaI5Zrs alloy film is 1100 nm. At this time, the coercive force is 0.10e, and the crystallization temperature is 6
At 00'C, Coez (Tao, aCo, a) BZrz
It was almost the same as in the case of a single layer film. Similar results were obtained when Nb was used instead of Ta as the additive element of the amorphous film. in this way.

Even when the magnetic film of the present invention is multilayered, it exhibits the same characteristics as a single layer film.

Example 3 A single magnetic pole head for perpendicular recording shown in FIG. 4 was prototyped using an amorphous alloy film having a composition of Coax (Tao, sCo, 5)eZrz. In Figure 4 (a), M n
- A substrate 22 made of Zn ferrite 20 and high melting point glass 21 is prepared, and as shown in FIG.
An amorphous alloy film 23 having a thickness of 0.2 μm and having a composition of Coez(Tao, aCo, a)eZrz on the surface of No. 2 was fabricated by high-frequency sputtering. moreover.

A PB-based glass film for adhesion was formed on this by sputtering, and in FIG. 4(C), a substrate 24 similar to that used in FIG.

The main magnetic pole block 25 was produced by heating for 15 minutes to melt and fix the PB glass. Furthermore, in FIG. 4(d), M n -Z n ferrite 26 and high melting point glass 2
An auxiliary core block 28 consisting of 7 is prepared, a PB-based glass film for adhesion similar to that described above is formed on the bonding surface 29, the bond is bonded via the main pole block 25, and the core block 28 is heated at 400° C. for 15 minutes.
The PB glass was melted and fixed by heating for a minute to produce a bonded block 27. Next, the single-pole type magnetic head 31 for perpendicular magnetic recording shown in FIG. 4(e) was obtained by cutting along the chain double-dashed line in FIG. 4(d). Furthermore, a magnetic head similar to that shown in FIG. 4(e) was fabricated using a Co9zTaaZrs amorphous alloy film having a saturation magnetic flux density approximately the same as that in this experiment, and recording was performed using a Go-Cr perpendicular medium.
The reproduction characteristics were measured.

As a result, a magnetic head using the amorphous alloy film doped with C (carbon) of the present invention as a main pole film obtained approximately 3.5 dB higher output than a magnetic head using a film not added with C (carbon). Ta. When the magnetic pole parts of both heads were observed using a micro X-ray diffractometer, only broad peaks indicating an amorphous state were observed in the C (carbon)-doped head, but in the C (carbon)-doped head, only broad peaks were observed. A peak indicating crystallization was observed in the head without.

Example 4 A magnetic head for a VTR shown in FIG. 5 was manufactured using an amorphous film having a composition of Co9z(Tao, sCo, 5)eZrz. In FIG. 5(a), a substrate 33 made of Mn-Zn ferrite having grooves 32 is prepared, and in FIG. An amorphous alloy film 34 having a thickness of approximately 10 μm was deposited by high frequency bipolar sputtering. In FIG. 5(c), the groove 3
Pb-based low melting point glass 35 was heated to 460°C to fill the area 2.
, filling by heating for 15 minutes, and then, as shown in FIG. 5(d), the substrate surface is ground and polished to form a gap forming surface 36, and a SiO2 film serving as a gap material is deposited on the head core semi-dead block 36 by sputtering method. Then, in FIG. 5(e), the head core half-closed block 37' having the line window 38 and the head core half-closed block 37 are joined via a gap material, and the low melting point PB is heated at 460'C for 15 minutes. Glass 35 is melted again.

After solidifying and producing the bonding block 39, the magnetic head 40 shown in FIG. 5(F) was produced by cutting along the two-dot chain line in FIG. 5(E). Furthermore, C used in this example
A magnetic head similar to that shown in FIG. 5(f) was fabricated using an amorphous alloy film having a composition of CoezTaIIZra having a saturation magnetic flux density approximately the same as that of oax(Tao, sCo, a)eZrz. The recording and reproducing characteristics of these magnetic heads were measured using a metal tape with a coercive force of 14,000e, and the results showed that the magnetic head using the amorphous alloy film to which C (carbon) of the present invention was added was compared to the one without the addition. do,
Approximately 2.5 dB at frequencies from 1 to 6 MHz
It showed high output. When the magnetic pole parts of both heads were observed using a micro X-ray diffractometer, only broad peaks indicating an amorphous state were observed in the C (carbon)-doped head, but in the C (carbon)-doped head, only broad peaks were observed. A peak indicating crystallization was observed in the head without.

As described above, by using an amorphous alloy film to which C (carbon) is added in this example, crystallization of the magnetic film does not occur during the heating process in the magnetic head manufacturing process, thereby preventing deterioration of magnetic properties. It has become clear that a magnetic head with excellent characteristics can be obtained.

The present invention is not limited to the magnetic head described in this embodiment, but is effective at least to a magnetic head manufactured through a heating process. For example, in thin film magnetic heads used in computer disk drives, etc., the sixth
As shown in cross section in the figure, the magnetic film 43 is sandwiched between a gap regulating material 45 such as a substrate 44.5ins made of ceramics or ANZ○3, and a polyimide film made of It is sandwiched between a filler 46 such as resin and a protective material 48 such as AΩ20B, and when the protective material is applied by sputtering etc., it is heated to 300°C or more. Since the magnetic film used in this invention is subjected to a heating process, by using the amorphous alloy added with C (carbon) of the present invention, a magnetic head with excellent characteristics can be obtained. The shield film in the magnetoresistive magnetic head is also similar to the thin film magnetic head described above, and in order to undergo a heating process, the shield film is made of an amorphous alloy added with C (carbon) of the present invention. As a result, a magnetoresistive magnetic head having excellent characteristics can be obtained.

〔Effect of the invention〕

As described above, the composition of the present invention is Cox (Mt-YCY)ZNW (where M is Nb, T
a.

One or more of Mo, V, and W; N is Zr;
The soft magnetic alloy film represented by one or more of Hf and Ti has excellent properties such as high saturation magnetic flux density and nearly zero magnetostriction constant, excellent thermal stability, and is suitable for use in the magnetic head manufacturing process. It is clear that even when subjected to a heating process, it does not crystallize and deterioration of magnetic properties is difficult to occur, so that excellent magnetic head properties can be obtained in a magnetic head using these materials.

[Brief explanation of the drawing]

Figure 1 shows (1) Co9fu-xTaxZr+s, (2)
Co57-xCxZr+y(3) Co57-x(T
ao, 15Co, 5) Composition X of xZrs amorphous film. A diagram showing the relationship with the crystallization temperature Tx, FIG. 2 shows Coa7
(Tax-yCy) toZrs A diagram showing the relationship between the composition Y and the crystallization temperature of the amorphous alloy, Figure 3 is Cox (Mz-
YCY) Crystallization temperature and carbide MC of ZNW amorphous alloy film
Figure 4 is an explanatory diagram showing the manufacturing process of a single magnetic pole head for perpendicular magnetic recording, Figure 5 is a diagram showing the manufacturing process of a magnetic head for VTR, and Figure 6 is a diagram showing the manufacturing process of a magnetic head for computer use. 1 is a diagram showing a cross section of a thin film magnetic head used in a disk device. 20, 26-Mn-Zn ferrite, 21.
27... High melting point glass, 22, 24, 33, 34...
・Substrate, 23. 34... Amorphous alloy film, 25... Main magnetic pole block, 28... Auxiliary core block, 29...
・Joint surface, 30.39...Joint block, 31...
Single-pole head for perpendicular magnetic recording, 32...groove, 35...
...Low melting point glass, 36...Gap composition surface, 37.
・・Head core half-break block, 38 ・Different line window, 40
...Magnetic head. 43... Lower magnetic layer, 45... Gap regulating material, 4
6 Fig. 1 Fig. 2 Fig. Thread and Remaining X Coarse 8゛ Y Fig.

Claims (1)

[Claims] 1. In a magnetic head in which at least part of the magnetic circuit or magnetic shield is made of a magnetic film, and at least part of the manufacturing process includes a heating step of 150° C. or higher, a soft magnetic alloy film having the following composition is used as the magnetic film. Features a magnetic head. Composition: COX (M_1_-_YC_Y)_ZN_W where M is one or more types of Nb, Ta, Mo, V, W, N is one or more types of Zr, Hf, Ti, 82≦X≦ 95, 0.2≦Y≦0.8, X+Z+W=100 (unit: at%, where Y is the composition ratio of M and C (carbon)) 2. In the magnetic head according to claim 1,
A magnetic head characterized in that a soft magnetic alloy film having the following composition is used as the magnetic film. Composition: CO_X(M_1_-_YC_Y)_ZN_W However, M is one or both of Nb and Ta, and N is Z
One or more of r, Hf, Ti, 82≦X≦95, 0.2≦Y≦0.8, X+Z+W=100 (unit: at%, where Y is M, C (carbon) composition ratio)