JPH0270431U - - Google Patents

Info

Publication number
JPH0270431U
JPH0270431U JP15060388U JP15060388U JPH0270431U JP H0270431 U JPH0270431 U JP H0270431U JP 15060388 U JP15060388 U JP 15060388U JP 15060388 U JP15060388 U JP 15060388U JP H0270431 U JPH0270431 U JP H0270431U
Authority
JP
Japan
Prior art keywords
target
magnet
rotatably installed
sputtering device
target stand
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15060388U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15060388U priority Critical patent/JPH0270431U/ja
Publication of JPH0270431U publication Critical patent/JPH0270431U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は、本考案の一実施例を示す平面図、第
２図は、その縦断面図、第３図は、従来のものを
示す平面図、第４図は、その縦断面図、第５図は
、その電気系統図である。 尚、図中１はターゲツト、２はバツキングプレ
ート、３はマグネツト、４はアースシールド、４
ａは開口部、５は絶縁プレート、６はターゲツト
台、７，８は回転駆動軸、９はスパツタ電源であ
る。 Fig. 1 is a plan view showing an embodiment of the present invention, Fig. 2 is a longitudinal sectional view thereof, Fig. 3 is a plan view showing a conventional one, and Fig. 4 is a longitudinal sectional view thereof. Figure 5 is its electrical system diagram. In the figure, 1 is the target, 2 is the backing plate, 3 is the magnet, 4 is the earth shield, 4
a is an opening, 5 is an insulating plate, 6 is a target stand, 7 and 8 are rotary drive shafts, and 9 is a sputter power source.

Claims (1)

【実用新案登録請求の範囲】 １つのターゲツト台上に複数個のターゲツトを
同心円上に中心を位置させて配設し、同ターゲツ
ト台の上方に前記ターゲツトと対向する１つの開
口部を有するアースシールドを回転可能に設置す
るとともに、 前記ターゲツト台内に前記ターゲツトと対向す
る１つのマグネツトを回転可能に設置し、同マグ
ネツトと前記アースシールドとを同調回転できる
ようにしたことを特徴とするスパツタリング装置
。[Claims for Utility Model Registration] A ground shield in which a plurality of targets are disposed on one target stand with their centers located on concentric circles, and has one opening above the target stand facing the target. A sputtering device characterized in that: a sputtering device is rotatably installed, and a magnet facing the target is rotatably installed in the target stand, so that the magnet and the earth shield can be rotated in synchronization.
JP15060388U 1988-11-18 1988-11-18 Pending JPH0270431U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15060388U JPH0270431U (en) 1988-11-18 1988-11-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15060388U JPH0270431U (en) 1988-11-18 1988-11-18

Publications (1)

Publication Number Publication Date
JPH0270431U true JPH0270431U (en) 1990-05-29

Family

ID=31423897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15060388U Pending JPH0270431U (en) 1988-11-18 1988-11-18

Country Status (1)

Country Link
JP (1) JPH0270431U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010090033A (en) * 2001-08-14 2001-10-18 손종역 Multi-target holder operating by one shaft control for Laser Deposition.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010090033A (en) * 2001-08-14 2001-10-18 손종역 Multi-target holder operating by one shaft control for Laser Deposition.

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