JPH0272909U

JPH0272909U -

Info

Publication number: JPH0272909U
Application number: JP15221388U
Authority: JP
Priority date: 1988-11-22
Filing date: 1988-11-22
Publication date: 1990-06-04
Also published as: JPH0449534Y2

Description

[Brief explanation of drawings]

第１図乃至第４図は本考案の第１実施例を示す
ものであつて、第１図は角度センサの要部拡大断
面図、第２図は角度センサの断面図、第３図は角
度センサの制御系を示すブロツク構成図、第４図
は内球の振動数を求めるための模式図、第５図乃
至第７図は本考案の第２実施例を示すものであつ
て、第５図は動きセンサを模式的に示す平面図、
第６図ａは内球がＸ―Ｘ軸方向に振動する場合の
Ｘ―Ｘ上の受光素子による測定波形を示すグラフ
、第６図ｂは内球がＸ―Ｘ軸方向に振動する場合
のＹ―Ｙ上の受光素子による測定波形を示すグラ
フ、第７図は制御系のブロツク構成図、第８図ａ
は第３実施例の縦断面図、第８図ｂ及びｃはそれ
ぞれ第８図ａのＥ―Ｅ線及びＦ―Ｆ線に沿う断面
図、第９図はａ〜ｃは内球の位置の測定原理を示
す模式図、第１０図ａ及びｂは内球がＸ―Ｘ軸方
向のみに動く場合を示す模式図、第１１図ａ及び
ｂは内球がＺ―Ｚ軸方向のみに動く場合を示す模
式図、第１２図ａ及びｂは内球がＹ―Ｙ軸方向の
みに動く場合を示す模式図、第１３図は好ましい
外球殻と内球の径の比を求めるための模式図であ
る。１４は外球殻、１５は凹部、１６は内球、１７
，１８は発光ダイオード（発光素子）、２０はホ
トトランジスタ（受光素子）、２６は測定対象物
、２７は発光素子、２８，３０は受光素子である
。 1 to 4 show a first embodiment of the present invention, in which FIG. 1 is an enlarged sectional view of the main part of the angle sensor, FIG. 2 is a sectional view of the angle sensor, and FIG. 3 is an angle sensor. FIG. 4 is a block diagram showing the control system of the sensor; FIG. 4 is a schematic diagram for determining the frequency of the inner sphere; FIGS. 5 to 7 show the second embodiment of the present invention; The figure is a plan view schematically showing a motion sensor.
Figure 6a is a graph showing the waveform measured by the light receiving element on X-X when the inner sphere vibrates in the X-X axis direction, and Figure 6b is a graph showing the waveform measured by the light receiving element on X-X when the inner sphere vibrates in the X-X axis direction. A graph showing the waveform measured by the light receiving element on YY, Figure 7 is a block diagram of the control system, Figure 8a
8 is a longitudinal sectional view of the third embodiment, FIGS. 8b and 8c are sectional views taken along lines EE and FF in FIG. 8a, respectively, and in FIG. Schematic diagram showing the measurement principle. Figure 10 a and b are schematic diagrams showing the case where the inner sphere moves only in the X-X axis direction. Figure 11 a and b are the schematic diagrams showing the case where the inner sphere moves only in the Z-Z axis direction. Fig. 12 a and b are schematic diagrams showing the case where the inner sphere moves only in the Y-Y axis direction, Fig. 13 is a schematic diagram for determining the preferred ratio of the diameters of the outer spherical shell and the inner sphere. It is. 14 is an outer spherical shell, 15 is a concave portion, 16 is an inner spherical shell, 17
, 18 is a light emitting diode (light emitting element), 20 is a phototransistor (light receiving element), 26 is an object to be measured, 27 is a light emitting element, and 28 and 30 are light receiving elements.

Claims

[Claims for Utility Model Registration] An outer spherical shell that is supported in a predetermined posture relative to an object to be measured and that is provided with a spherical recess inside, and an inner shell that is movably disposed within the recess of the outer spherical shell. and a sphere, and optically detects a change in the inclination angle of the outer spherical shell or a movement of the inner sphere within the recessed portion due to movement of the outer spherical shell to determine the inclination angle or movement of the object to be measured. In the angle or motion detection sensor, the outer spherical shell is provided with one or more light emitting elements that irradiate light to the inner sphere and one or more light receiving elements that receive reflected light from the inner sphere, and three or more in total. Also, an angle or motion detection sensor characterized in that the ratio of the inner diameter of the recess in the outer spherical shell to the outer diameter of the inner sphere is set in the vicinity of 3:2.