JPH0273731U - - Google Patents

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Publication number
JPH0273731U
JPH0273731U JP15341288U JP15341288U JPH0273731U JP H0273731 U JPH0273731 U JP H0273731U JP 15341288 U JP15341288 U JP 15341288U JP 15341288 U JP15341288 U JP 15341288U JP H0273731 U JPH0273731 U JP H0273731U
Authority
JP
Japan
Prior art keywords
insertion part
boat
fixing plate
support rod
resistant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15341288U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15341288U priority Critical patent/JPH0273731U/ja
Publication of JPH0273731U publication Critical patent/JPH0273731U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】
第１図は本考案一実施例斜面図、第２図は同上
一部拡大分解斜面図、第３図は同上他実施例斜面
図、第４図は同上一部拡大分解斜面図である。

Claims (1)

    【実用新案登録請求の範囲】
  1. 支持杆、固定板を夫々高純度石英硝子等の耐熱
    、耐薬品性材にて個別に形成し、支持杆はその両
    端に挿通部を形成し、該挿通部を夫々固定板に設
    けた挿通孔に挿通して支承させ、該挿通部に設け
    た螺子等を係合部をナツト等の係止部にて固定し
    たことを特徴とするＩＣ用ボート。
JP15341288U 1988-11-25 1988-11-25 Pending JPH0273731U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15341288U JPH0273731U (ja) 1988-11-25 1988-11-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15341288U JPH0273731U (ja) 1988-11-25 1988-11-25

Publications (1)

Publication Number Publication Date
JPH0273731U true JPH0273731U (ja) 1990-06-05

Family

ID=31429229

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15341288U Pending JPH0273731U (ja) 1988-11-25 1988-11-25

Country Status (1)

Country Link
JP (1) JPH0273731U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190052296A (ko) * 2017-11-08 2019-05-16 주식회사 월덱스 상압소결 실리콘 카바이드 웨이퍼 캐리어 및 결합구조와 그 결합방법

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53148283A (en) * 1977-05-30 1978-12-23 Toshiba Ceramics Co Silicon wafer jig
JPS5923731B2 (ja) * 1980-11-22 1984-06-04 日本スチレンペ−パ−株式会社 ポリプロピレン系樹脂予備発泡粒子

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53148283A (en) * 1977-05-30 1978-12-23 Toshiba Ceramics Co Silicon wafer jig
JPS5923731B2 (ja) * 1980-11-22 1984-06-04 日本スチレンペ−パ−株式会社 ポリプロピレン系樹脂予備発泡粒子

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190052296A (ko) * 2017-11-08 2019-05-16 주식회사 월덱스 상압소결 실리콘 카바이드 웨이퍼 캐리어 및 결합구조와 그 결합방법

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