JPH02104630U - - Google Patents

Info

Publication number
JPH02104630U
JPH02104630U JP15341388U JP15341388U JPH02104630U JP H02104630 U JPH02104630 U JP H02104630U JP 15341388 U JP15341388 U JP 15341388U JP 15341388 U JP15341388 U JP 15341388U JP H02104630 U JPH02104630 U JP H02104630U
Authority
JP
Japan
Prior art keywords
fixing plate
support rod
sensor part
portions
reinforcing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15341388U
Other languages
English (en)
Other versions
JPH0627953Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988153413U priority Critical patent/JPH0627953Y2/ja
Publication of JPH02104630U publication Critical patent/JPH02104630U/ja
Application granted granted Critical
Publication of JPH0627953Y2 publication Critical patent/JPH0627953Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)

Description

【図面の簡単な説明】
第１図は本考案一実施例斜面図、第２図は同上
一部拡大分解斜面図、第３図は同上他実施例斜面
である。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) 支持杆、固定板、補強部、センサー部を夫
    々高純度石英硝子等の耐熱、耐薬品性材にて個別
    に形成し、支持杆は両端に挿通部を形成し、固定
    板に設けた挿通孔に挿通させると共に、固定板の
    挿通孔外側に設けた透孔にセンサー部の螺子等の
    係合部を挿通させナツト等の係止部にて固定させ
    る一方、センサー部に適宜数の補強部を挿通させ
    且つ該補強部に支持杆を係止させたことを特徴と
    するＩＣ用ボート。 (2) 支持杆の適宜数の挿通部に螺子等の係合部
    を設け、固定板外側からナツト等の係止部により
    締着したことを特徴とする実用新案登録請求の範
    囲(1)のＩＣ用ボート。
JP1988153413U 1988-11-25 1988-11-25 Ｉｃ用ボート Expired - Fee Related JPH0627953Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988153413U JPH0627953Y2 (ja) 1988-11-25 1988-11-25 Ｉｃ用ボート

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988153413U JPH0627953Y2 (ja) 1988-11-25 1988-11-25 Ｉｃ用ボート

Publications (2)

Publication Number Publication Date
JPH02104630U true JPH02104630U (ja) 1990-08-20
JPH0627953Y2 JPH0627953Y2 (ja) 1994-07-27

Family

ID=31429231

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988153413U Expired - Fee Related JPH0627953Y2 (ja) 1988-11-25 1988-11-25 Ｉｃ用ボート

Country Status (1)

Country Link
JP (1) JPH0627953Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021157722A1 (ja) * 2020-02-07 2021-08-12 京セラ株式会社 ウェハーボート

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53148283A (en) * 1977-05-30 1978-12-23 Toshiba Ceramics Co Silicon wafer jig
JPS5920629U (ja) * 1982-07-30 1984-02-08 株式会社テクニスコ 拡散治具
JPS5923731U (ja) * 1982-08-05 1984-02-14 株式会社テクニスコ 拡散治具
JPS5940443U (ja) * 1982-09-08 1984-03-15 三井造船株式会社 赤道リング建造用吊足場
JPS614227A (ja) * 1984-06-18 1986-01-10 Sharp Corp ウエハ−ボ−ト位置検出方式
JPS6142833U (ja) * 1984-08-21 1986-03-19 株式会社東芝 半導体製造装置用ウエハ保持具
JPS63228636A (ja) * 1987-03-18 1988-09-22 Toshiba Corp ウエハ移載装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53148283A (en) * 1977-05-30 1978-12-23 Toshiba Ceramics Co Silicon wafer jig
JPS5920629U (ja) * 1982-07-30 1984-02-08 株式会社テクニスコ 拡散治具
JPS5923731U (ja) * 1982-08-05 1984-02-14 株式会社テクニスコ 拡散治具
JPS5940443U (ja) * 1982-09-08 1984-03-15 三井造船株式会社 赤道リング建造用吊足場
JPS614227A (ja) * 1984-06-18 1986-01-10 Sharp Corp ウエハ−ボ−ト位置検出方式
JPS6142833U (ja) * 1984-08-21 1986-03-19 株式会社東芝 半導体製造装置用ウエハ保持具
JPS63228636A (ja) * 1987-03-18 1988-09-22 Toshiba Corp ウエハ移載装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021157722A1 (ja) * 2020-02-07 2021-08-12 京セラ株式会社 ウェハーボート
JPWO2021157722A1 (ja) * 2020-02-07 2021-08-12

Also Published As

Publication number Publication date
JPH0627953Y2 (ja) 1994-07-27

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees