JPH0274080A - LED chip and its manufacturing method - Google Patents

LED chip and its manufacturing method

Info

Publication number
JPH0274080A
JPH0274080A JP63226207A JP22620788A JPH0274080A JP H0274080 A JPH0274080 A JP H0274080A JP 63226207 A JP63226207 A JP 63226207A JP 22620788 A JP22620788 A JP 22620788A JP H0274080 A JPH0274080 A JP H0274080A
Authority
JP
Japan
Prior art keywords
pitch
image
led chip
light emitting
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63226207A
Other languages
Japanese (ja)
Inventor
Tomonobu Nishio
朋宣 西尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Holdings Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Priority to JP63226207A priority Critical patent/JPH0274080A/en
Publication of JPH0274080A publication Critical patent/JPH0274080A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/81—Bodies
    • H10H20/819—Bodies characterised by their shape, e.g. curved or truncated substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
    • H10H29/10—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00
    • H10H29/14—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00 comprising multiple light-emitting semiconductor components

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  • Led Device Packages (AREA)
  • Led Devices (AREA)

Abstract

PURPOSE:To enable the formation of an image which is high in quality and free from a periodic fluctuation in density in an auxiliary scanning direction when the image is recorded by a method wherein two or more P-N junction planes are provided being separated and independent from each other, and each P-N junction has two regions, one is continuous and the other is divided into parts which are separate and independent from each other. CONSTITUTION:A cut groove 75 is provided to a central part of an N region of an LED chip 74, whereby the N region is divided completely into two. That is, a junction plane of a P region with an N region is formed into two parts which are independent from each other, and the LED chip 74 is a single chip provided with two light emitting sections 74A and 74B independent from each other. The pitch between the light emitting sections 74A and 74B is formed equal to an auxiliary scanning pitch. By this setup, a mounting position (pitch between color light emitting sections) is made to improve in accuracy without degrading cost and productivity and the light emitting sections can be accurately mounted at a specified pitch (equal to auxiliary scanning pitch) between them, and a high quality image free from a periodic fluctuation in density in an auxiliary scanning direction can be formed when the image is recorded.

Description

【発明の詳細な説明】 [産業上の利用分野コ 本発明は、画像情報に基づいて光を走査し記録材料へ画
像を記録する画像記録装置等に用いられるLEDチップ
およびその製作方法に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an LED chip used in an image recording device or the like that scans light based on image information and records an image on a recording material, and a method for manufacturing the same.

[従来の技#] 記録材料を記録ドラムの外周へ巻付け、画像情報に基づ
いて光源を作動させると共に記録ドラムを回転させて主
走査および副走査を行ない、これによって記録材料に画
像を記録する画像記録装置がある。
[Conventional Technique #] A recording material is wound around the outer circumference of a recording drum, a light source is activated based on image information, and the recording drum is rotated to perform main scanning and sub-scanning, thereby recording an image on the recording material. There is an image recording device.

この種の画像記録装置には光源として、LED等の発光
素子がステム上に配置された所謂露光ヘッドが用いられ
てたり、この露光ヘッド内の発光素子によって発せられ
た光をレンズによって集光して記録材料へ照射している
。
This type of image recording device uses a so-called exposure head in which a light emitting element such as an LED is arranged on a stem as a light source, and the light emitted by the light emitting element in this exposure head is focused by a lens. irradiates the recording material.

ところで、例えばカラー画像を得るためには3色(例え
ばY、MSCの三原色)の異なる光源が必要であるが、
この三色に対応したLEDを共に単一のステム上で主走
査方向に配列した露光ヘッドがある。
By the way, in order to obtain a color image, for example, light sources of three different colors (for example, the three primary colors of Y and MSC) are required.
There is an exposure head in which LEDs corresponding to these three colors are arranged on a single stem in the main scanning direction.

この露光ヘッドでは、各LEDは主走査方向に所定の間
隔でステム上に配列されており、さらに、各LEDの前
方には単一の集光レンズが配置されている。各LEDか
ら発光された光は、集光レンズによってそれぞれ集光さ
れて記録材料上に照射されるようになっている。このた
め、Y、M、Cの三色の光源がそれぞれ独立して構成さ
れる露光ヘッドに比べて、部品点数が少なくコンパクト
な形状となっている。
In this exposure head, each LED is arranged on a stem at predetermined intervals in the main scanning direction, and furthermore, a single condenser lens is arranged in front of each LED. The light emitted from each LED is condensed by a condenser lens and irradiated onto the recording material. Therefore, compared to an exposure head in which three color light sources of Y, M, and C are configured independently, the number of parts is reduced and the shape is compact.

さらに、この露光ヘッドには、三色に対応したLEDを
副走査方向に複数列に配置したものがある。この種の露
光ヘッドでは、−度の主走査によって複数列の画素を同
時に露光できることになり、LEDを一列にのみ配置し
た露光ヘッドに比べて、画像記録に要する時間を大幅に
短縮することができる等の利点がある。
Furthermore, some exposure heads have LEDs corresponding to three colors arranged in multiple rows in the sub-scanning direction. With this type of exposure head, multiple rows of pixels can be exposed simultaneously by -degree main scanning, and the time required to record an image can be significantly reduced compared to an exposure head with LEDs arranged in only one row. There are advantages such as

[発明が解決しようとする課題] ところで、このような三色に対応したLEDを副走査方
向に複数列に配置した露光ヘッドでは、各LEDの取付
は位置く同一色のLED間のピッチと副走査ピッチ)あ
るいはその発光量、発光ビーム径等が均一でかつ正確で
なければ、副走査方向に周期的濃度変動(所謂むら)が
発生し画像の品質が低下する。
[Problems to be Solved by the Invention] By the way, in an exposure head in which LEDs corresponding to three colors are arranged in multiple rows in the sub-scanning direction, the mounting of each LED is determined by the position and the pitch between LEDs of the same color and the sub-scanning direction. If the scanning pitch), the amount of light emitted, the diameter of the emitted beam, etc. are not uniform and accurate, periodic density fluctuations (so-called unevenness) will occur in the sub-scanning direction and the quality of the image will deteriorate.

特に、各LEDの取付は位置(同一色のLED間のピッ
チ)が副走査ピンチに対してズしている場合にはその影
響が大きく、副走査方向の周期的濃度変動(むら)が顕
著に表われて画像の品質が著しく低下する。
In particular, if the mounting position of each LED (pitch between LEDs of the same color) is shifted from the sub-scanning pinch, this will have a large effect, and periodic density fluctuations (unevenness) in the sub-scanning direction will be noticeable. The quality of the image deteriorates significantly.

この場合、各LEDの取付は位置精度を向上させて所定
のピッチ(副走査ピッチと同一ピッチ)に正確に取付け
るのは容易でなく、またコスト高であった。
In this case, it is not easy to improve the positional accuracy and accurately mount each LED at a predetermined pitch (the same pitch as the sub-scanning pitch), and the cost is high.

本発明は上記事実を考慮し、コストや生産性を悪化させ
ることなく、取付は位置(同一色の発光部間のピッチ)
精度を向上させて所定のピッチ(副走査ピッチと同一ピ
ッチ)に正確に取付けることができ、これによって、記
録材料へ画像の記録を行なった場合に副走査方向に周期
的濃度変動(むら)の無い高品質な画像を形成すること
ができるLEDチップおよびその製作方法を得ることが
目的である。
The present invention takes the above facts into consideration, and allows installation to be done at the correct position (pitch between light-emitting parts of the same color) without deteriorating cost or productivity.
It can be mounted accurately at a predetermined pitch (the same pitch as the sub-scanning pitch) with improved accuracy, and this prevents periodic density fluctuations (unevenness) in the sub-scanning direction when recording images on recording materials. The purpose is to obtain an LED chip that can form a high-quality image, and a method for manufacturing the same.

[課題を解決するための手段] 本発明に係るLEDチップは、一体的に形成されたP領
域およびN領域のうち、いずれか一方の領域が連続し、
他方の領域が互いに離間し独立する複数に分離され、互
いに離間し独立した複数のPN接合面を備えている。
[Means for Solving the Problems] In the LED chip according to the present invention, one of the integrally formed P region and N region is continuous,
The other region is separated into a plurality of independent and spaced apart regions, and includes a plurality of independent PN junction surfaces that are spaced apart from each other.

また、本発明に係るLEDチップの製作方法は、LED
ウェハを切断し複数のチップに分割して製作するLED
チップの製作方法であって、前記複数のチップに分割す
る際に、単一のチップのP領域およびN領域のうちいず
れか一方の領域を完全に切削してこの領域を互いに離間
し独立した複数に分離し、単一のチップ内に互いに離間
し独立した複数のPN接合面を形成させることを特徴と
している。
Further, the method for manufacturing an LED chip according to the present invention
LEDs are manufactured by cutting a wafer and dividing it into multiple chips.
A method for manufacturing a chip, wherein when dividing the chip into the plurality of chips, either one of the P region and the N region of a single chip is completely cut away, and these regions are separated from each other to form a plurality of independent chips. It is characterized by forming a plurality of independent PN junction surfaces spaced apart from each other within a single chip.

[作用コ 本発明のLEDチップでは、P領域とN領域との接合面
が互いに独立して複数形成されるため、このLEDチッ
プは単一のチップに独立した複数の空乏領域(発光部)
を備えたものとなる。
[Function] In the LED chip of the present invention, since a plurality of junction surfaces between the P region and the N region are formed independently of each other, this LED chip has a plurality of independent depletion regions (light emitting parts) in a single chip.
It will be equipped with the following.

この場合、複数の空乏領域(発光部)間のピッチ(換言
すれば、接合面間のピッチ)は、LEDチップの製作時
点において所定のピッチ(副走査ピッチと同一ピッチ)
に正確に形成することができ、精度も向上する。
In this case, the pitch between the plurality of depletion regions (light emitting parts) (in other words, the pitch between the bonding surfaces) is a predetermined pitch (the same pitch as the sub-scanning pitch) at the time of manufacturing the LED chip.
It can be formed accurately and accuracy is also improved.

このLEDチップを用いて記録材料に画像の記録を行な
う場合には、複数の発光部が副走査方向に沿うように配
置し、この複数の発光部からの光を主走査および副走査
することにより記録材料に画像の記録が行なわれる。
When recording an image on a recording material using this LED chip, a plurality of light-emitting parts are arranged along the sub-scanning direction, and light from the plurality of light-emitting parts is used in main scanning and sub-scanning. An image is recorded on the recording material.

この場合、従来では、複数の独立した光源をそれぞれ独
自に取付けていたため、所定のピッチ(副走査ピッチと
同一ピッチ)に正確に取付けるのが容易でなく、またこ
のためコスト高であったが、本発明に係るLEDチップ
では、複数の独立した発光部はLEDチップの製作時点
において所定のピッチ(副走査ピッチと同一ピッチ)に
正確に形成できるため、LEDチップを副走査方向に沿
うように配置する際に複数の発光部間のピッチがズレる
ことは無く、取付は時点においても発光部間の所定のピ
ッチをそのまま維持することができる(換言すれば、取
付は精度を向上させることができる)。
In this case, in the past, multiple independent light sources were each mounted independently, which made it difficult to accurately mount them at a predetermined pitch (the same pitch as the sub-scanning pitch), and this led to high costs. In the LED chip according to the present invention, since the plurality of independent light emitting parts can be formed accurately at a predetermined pitch (the same pitch as the sub-scanning pitch) at the time of manufacturing the LED chip, the LED chips can be arranged along the sub-scanning direction. The pitch between the plurality of light emitting parts does not shift when the light emitting parts are installed, and the predetermined pitch between the light emitting parts can be maintained as is even at the time of installation (in other words, the accuracy of the installation can be improved). .

したがって、このLEDチップを用いて記録材料に画像
の記録を行なった場合には、副走査方向に周期的に濃度
変動(むら)が生じることが無く、このため、記録され
た画像は高品質となる。
Therefore, when an image is recorded on a recording material using this LED chip, there will be no periodic density fluctuations (unevenness) in the sub-scanning direction, and therefore the recorded image will be of high quality. Become.

一方、本発明のLEDチップの製作方法では、LEDチ
ップはLEDウェハを切断し複数のチップに分割して製
作される。
On the other hand, in the method for manufacturing an LED chip of the present invention, the LED chip is manufactured by cutting an LED wafer and dividing it into a plurality of chips.

この複数のチップに分割する際に、分割される単一のチ
ップのP領域およびN@域のうちいずれか一方の領域が
完全に切削されてこの領域が互いに離間し独立した複数
に分離される。このため、単一のチップ内に、互いに離
間し独立した複数のPN接合面が一体的に形成されるこ
とになり、完成したLEDチップは単一のチップに複数
の空乏領域(発光部)を備えたものとなる。
When dividing into a plurality of chips, one of the P region and N@ region of the single chip to be divided is completely cut away, and these regions are separated from each other and separated into a plurality of independent chips. . Therefore, a plurality of separate and independent PN junction surfaces are integrally formed in a single chip, and the completed LED chip has multiple depletion regions (light emitting parts) in a single chip. Be prepared.

この場合、複数の空乏領域(発光部)間のピッチ(換言
すれば、接合面間のピッチ)は、LEDチップの製作時
点において所定のピッチ(副走査ピッチと同一ピッチ)
に正確に形成することができ、精度も向上する。また、
複数の発光部間のピッチが、複数個製作された異なるL
EDチップにおいて同一となり、製品の均一化も図れる
。さらに、LEDウェハを切断し複数のチップに分割し
て製作するという製作工程(グイシング工程)を変更す
ることもないため、コストや生産性が悪化することも無
い。
In this case, the pitch between the plurality of depletion regions (light emitting parts) (in other words, the pitch between the bonding surfaces) is a predetermined pitch (the same pitch as the sub-scanning pitch) at the time of manufacturing the LED chip.
It can be formed accurately and accuracy is also improved. Also,
L with different pitches between multiple light emitting parts
The ED chips are the same, and products can be made uniform. Furthermore, there is no need to change the manufacturing process (guishing process) in which the LED wafer is cut and divided into a plurality of chips, so there is no deterioration in cost or productivity.

製作されたLEDチップを用いて記録材料に画像の記録
を行なう場合には、このLEDチップの複数の発光部が
副走査方向に沿うように配置し、複数の発光部からの光
を主走査および副走査することにより記録材料に画像の
記録が行なわれる。
When recording an image on a recording material using the manufactured LED chip, the plurality of light emitting parts of this LED chip are arranged along the sub-scanning direction, and the light from the plurality of light emitting parts is directed in the main scanning and An image is recorded on the recording material by sub-scanning.

この場合、従来では、複数の独立した光源をそれぞれ独
自に取付けていたため、所定のピッチ(副走査ピッチと
同一ピッチ)に正確に取付けるのが容易でなく、またこ
のためコスト高であったが、本発明に係る製作方法によ
り製作されたLEDチップでは、複数の独立した発光部
はLEDチップの製作時点において所定のピッチ(副走
査ピッチと同一ピッチ)に正確に形成されるため、LE
Dチップを取付ける際に複数の発光部間のピッチが副走
査ピッチに対してズレることは無く、取付は時点におい
ても発光部間の所定のピッチをそのまま維持することが
できる(換言すれば、取付は精度を向上させることがで
きる)。
In this case, in the past, multiple independent light sources were each mounted independently, which made it difficult to accurately mount them at a predetermined pitch (the same pitch as the sub-scanning pitch), and this led to high costs. In the LED chip manufactured by the manufacturing method according to the present invention, the plurality of independent light emitting parts are formed accurately at a predetermined pitch (the same pitch as the sub-scanning pitch) at the time of manufacturing the LED chip.
When installing the D-chip, the pitch between the plurality of light emitting parts will not deviate from the sub-scanning pitch, and the predetermined pitch between the light emitting parts can be maintained as is even at the time of installation (in other words, the pitch between the light emitting parts can be maintained as it is at the time of installation) can improve accuracy).

したがって、このLEDチップを用いて記録材料に画像
の記録を行なった場合には、副走査方向に周期的に濃度
変動(むら)が生じることが無く、このため、記録され
た画像は高品質となる。
Therefore, when an image is recorded on a recording material using this LED chip, there will be no periodic density fluctuations (unevenness) in the sub-scanning direction, and therefore the recorded image will be of high quality. Become.

[実施例コ 以下に本発明の詳細な説明する。[Example code] The present invention will be explained in detail below.

第4図には本発明の実施例に係るLEDチップが適用さ
れた画像記録装置10が示されている。
FIG. 4 shows an image recording device 10 to which an LED chip according to an embodiment of the present invention is applied.

画像記録装置10は機台12へ収容されるマガジン14
ヘロール状の画像形成用シートとされる熱現像感光材料
16が収容されている。この熱現像感光材料16はその
外周から引き出されカッタ18で所定長さに切断された
後に回転ドラム20の外周へ矢印六方向へと巻付けられ
るようになっている。
The image recording device 10 has a magazine 14 housed in the machine base 12.
A heat-developable photosensitive material 16, which is a ferro-shaped image forming sheet, is accommodated. The heat-developable photosensitive material 16 is pulled out from its outer periphery, cut into a predetermined length by a cutter 18, and then wound around the outer periphery of a rotating drum 20 in the six directions of arrows.

回転ドラム20の外周には、これに対応して露光ヘッド
22が回転ドラム20の軸線方向(第2図および第4図
紙面垂直方向:第3図矢印C方向)へ移動可能に配置さ
れている。
Correspondingly, an exposure head 22 is arranged on the outer periphery of the rotating drum 20 so as to be movable in the axial direction of the rotating drum 20 (in the direction perpendicular to the plane of the paper in FIGS. 2 and 4: in the direction of arrow C in FIG. 3). .

露光ヘッド22は、回転ドラム20に巻き付けられた熱
現像感光材料16へ、回転ドラム20の矢印A方向への
高速回転によってライン状に露光(以後主走査という)
しながら、回転ドラム20の軸線方向への移動を繰り返
して(以後副走査という)画像を露光するようになって
いる。
The exposure head 22 exposes the photothermographic material 16 wound around the rotary drum 20 in a line shape (hereinafter referred to as main scanning) by rotating the rotary drum 20 at high speed in the direction of arrow A.
At the same time, the rotating drum 20 is repeatedly moved in the axial direction (hereinafter referred to as sub-scanning) to expose an image.

露光後の熱現像感光材料16は回転ドラム20の逆転(
矢印B方向)により、スクレーバ24で回転ドラム20
から剥離され、水塗布部26で画像形成用溶媒と、して
の水が付与された後に、内部が加熱部とされる熱現像転
写部28へと送られるようになっている。
After exposure, the photothermographic material 16 is transferred by rotating the rotating drum 20 in reverse (
In the direction of arrow B), the rotating drum 20 is removed by the scraper 24.
After being peeled off from the film and being coated with an image-forming solvent and water in a water application section 26, it is sent to a thermal development transfer section 28 whose interior is a heating section.

熱現像転写部28は、加熱ドラム34と無端圧着ベルト
36とによって構成されている。加熱ドラム34内には
ハロゲンランプ38が配置されており、これによって加
熱ドラム34の外周面は約90℃に加熱されている。
The thermal development transfer section 28 is composed of a heating drum 34 and an endless pressure belt 36. A halogen lamp 38 is disposed inside the heating drum 34, and the outer peripheral surface of the heating drum 34 is heated to about 90°C.

熱現像転写部28へ送られた熱現像感光材料16は、加
熱ドラム34と無端圧着ベルト36との間で加熱ドラム
34のほぼ2/3周に渡って挟持搬送されて熱現像され
るようになっている。
The heat-developable photosensitive material 16 sent to the heat-developable transfer section 28 is conveyed while being held between the heating drum 34 and the endless pressure belt 36 over approximately 2/3 of the circumference of the heating drum 34, so that it is thermally developed. It has become.

一方、熱現像転写部28の下方に配置されたトレイ30
内には、所定長さに切り揃えられた複数枚の受像材料3
2が収容されており、さらに側部に配置された供給ロー
ラ44によって順次−枚づつ取出され熱現像感光材料1
6と重ね合わせた状懐で熱現像転写部28へと送られる
ようになっている。
On the other hand, a tray 30 disposed below the thermal development transfer section 28
Inside are a plurality of image receiving materials 3 cut to a predetermined length.
The heat-developable photosensitive material 1 is stored therein, and is taken out one by one by a supply roller 44 disposed on the side.
6 and is sent to the thermal development transfer section 28 in a superimposed state.

熱現像転写部28の側方には剥離爪48が配置されてお
り、熱現像転写部28から送り出される熱現像感光材料
16と受像材料32を加熱ドラム34の外周から剥離す
るようになっている。
A peeling claw 48 is disposed on the side of the heat development transfer section 28 and is designed to peel off the heat development photosensitive material 16 and the image receiving material 32 sent out from the heat development transfer section 28 from the outer periphery of the heating drum 34. .

剥離爪48の下方には、分離部50が配置されており、
受像材料32を熱現像感光材料16から分離し屈曲して
搬送するようになっている。
A separation part 50 is arranged below the separation claw 48,
The image receiving material 32 is separated from the photothermographic material 16, bent and conveyed.

分離された熱現像感光材料16は廃棄感光材料収容箱5
9へ送り出されるようになっており、方、受像材料32
はヒータ54で乾燥された後に機台12の頂部に形成さ
れる取出トレイ56上へ送り出されるようになっている
。
The separated photothermographic material 16 is stored in a waste photosensitive material storage box 5.
9, the image-receiving material 32
After being dried by a heater 54, it is delivered onto a take-out tray 56 formed at the top of the machine base 12.

第2図および第3図に示す如く、露光ヘッド22はその
本体とされる円筒状の鏡筒60を備えており、この鏡筒
60の一端部には集光レンズ61が配設されている。一
方鏡筒60の他端部にはステム62が取付けられている
。
As shown in FIGS. 2 and 3, the exposure head 22 includes a cylindrical lens barrel 60 serving as its main body, and a condenser lens 61 is disposed at one end of the lens barrel 60. . On the other hand, a stem 62 is attached to the other end of the lens barrel 60.

ステム62の内周面には反射防止処理が施されており、
さらに端部には絶縁性の基板64が固着されている。
The inner peripheral surface of the stem 62 is anti-reflection treated.
Further, an insulating substrate 64 is fixed to the end portion.

基板64の内側面(鏡筒60側の面)には、導電性の基
台66.68が固着されており、さらに各基台66.6
8には基板64を貫通して外部に露出する電極を兼ねた
放熱ベース70.72が接続されている。
Conductive bases 66.68 are fixed to the inner surface (surface on the lens barrel 60 side) of the substrate 64, and each base 66.6
8 is connected to heat dissipation bases 70 and 72 which penetrate the substrate 64 and serve as electrodes exposed to the outside.

一方の基台66には、NP接合からなるLEDチップ7
4およびLEDチップ76が所定の間隔で取付けられて
いる。また、他方の基台68にはPN接合からなるLE
Dチップ78が取付けられている。
On one base 66 is an LED chip 7 made of NP junction.
4 and LED chips 76 are attached at predetermined intervals. Further, the other base 68 has an LE made of a PN junction.
A D chip 78 is attached.

各LEDチップは、LEDウェハをダイヤモンドブレー
ド等によって切断し複数のチップに分割して製作されて
いる。
Each LED chip is manufactured by cutting an LED wafer with a diamond blade or the like and dividing it into a plurality of chips.

この場合、複数のチップに分割する際(グイシング工程
)に、分割される単一のチップのP領域およびN領域の
うちいずれか一方の領域が完全に切削されてこの領域が
互いに離間し独立した複数に分離される。このため、単
一のチップ内に、互いに離間し独立した複数のPN接合
面が一体的に形成されることになり、完成したLEDチ
ップは単一のチップに複数の空乏領域を備えたものとな
っている。
In this case, when dividing into multiple chips (guising process), either one of the P region and N region of the single chip to be divided is completely cut away, and these regions are separated from each other and become independent. Separated into multiple parts. Therefore, a plurality of separate and independent PN junction surfaces are integrally formed within a single chip, and the completed LED chip is a single chip with multiple depletion regions. It has become.

例えば、第1図に示す如く、LEDチップ74にはN領
域の中央部に切削溝75が形成され、これによってN領
域が完全に二分されている。すなわち、P領域とN領域
との接合面が互いに独立して二つ形成され(換言すれば
、互いに独立する二つの空乏領域S(発光面)が形成さ
れ)、このため、このLEDチップ74は単一のチップ
に互いに独立する二つの発光部74A、74Bを備えた
ものとなっている。
For example, as shown in FIG. 1, a cutting groove 75 is formed in the center of the N region of the LED chip 74, thereby completely dividing the N region into two. That is, two junction surfaces between the P region and the N region are formed independently from each other (in other words, two mutually independent depletion regions S (light emitting surfaces) are formed), and therefore, this LED chip 74 A single chip is provided with two mutually independent light emitting sections 74A and 74B.

この二つの発光部74A、74B間のピッチは副走査ピ
ッチと同一に形成されている。
The pitch between these two light emitting parts 74A and 74B is formed to be the same as the sub-scanning pitch.

なお本実施例においては、各LEDチップの幅寸法(発
光部の一辺の寸法)は300μ、切削溝の幅寸法は60
μ程度に形成されており、したがって、二つの発光部間
のピッチは360μとなっている。
In this example, the width of each LED chip (the dimension of one side of the light emitting part) is 300μ, and the width of the cutting groove is 60μ.
The pitch between the two light emitting parts is therefore 360μ.

各LEDチップは、それぞれの発光部が副走査方向に沿
うように各基台に取付けられている。
Each LED chip is attached to each base so that each light emitting part is along the sub-scanning direction.

各LEDチップ近傍の基板64にはそれぞれ電極80が
取付けられており、各LEDチップはワイヤ82によっ
てボンディングされている。また、各電極には基板64
を貫通するワイヤ84が接続されており、これによって
各LEDチップへ電圧印加が行なわれるようになってい
る。
Electrodes 80 are attached to the substrate 64 near each LED chip, and each LED chip is bonded with a wire 82. In addition, each electrode has a substrate 64.
A wire 84 passing through is connected, thereby applying a voltage to each LED chip.

ここで、各LEDチップはそれぞれ異なる波長の光を射
出するようになっている。すなわち、LEDチップ74
 (発光部74A、74B>は熱現像感光材料16にシ
アン(C)の色素を発色させる赤外光を射出し、LED
チップ76 (発光部76A、76B)は熱現像感光材
料16にマゼンタ(M)の色素を発色させる赤色光を射
出し、さらに、LEDチップ78 (発光部78A、7
8B)は熱現像感光材料16にイエロー(Y)の色素を
発色させる黄色光を射出するようになっている。
Here, each LED chip emits light of a different wavelength. That is, the LED chip 74
(The light emitting sections 74A, 74B> emit infrared light that develops cyan (C) dye into the photothermographic material 16, and the LED
The chip 76 (light-emitting sections 76A, 76B) emits red light that causes the photothermographic material 16 to develop a magenta (M) dye, and the LED chip 78 (light-emitting sections 78A, 7
8B) is designed to emit yellow light that causes the photothermographic material 16 to develop a yellow (Y) dye.

ここで、各LEDチップの発光部は、副走査方向に沿っ
て取付けられているため、すべてのLEDチップ(発光
部)を作動させることにより、同時に2ラインの主走査
露光ができるようになっている。
Here, since the light emitting part of each LED chip is attached along the sub-scanning direction, by activating all the LED chips (light emitting parts), it is possible to perform main scanning exposure of two lines at the same time. There is.

各LEDチップの直前には、遮光板86が配置されてい
る。遮光板86には反射防止処理が施されており、さら
に各LEDチップに対応する位置にはアパーチャ88A
、88B、90A、90B。
A light shielding plate 86 is placed immediately in front of each LED chip. The light shielding plate 86 is subjected to anti-reflection treatment, and furthermore, an aperture 88A is provided at a position corresponding to each LED chip.
, 88B, 90A, 90B.

92A、92Bが形成されている。これらのアパーチャ
88A、88B、90A、90B、92A、92Bは、
並設されたLEDチップ74Δ、74BSLEDチップ
76A、76BおよびLEDチップ78A、78Bのそ
れぞれに対応し、エツチング等の方法により所定間隔で
正確に形成されている。
92A and 92B are formed. These apertures 88A, 88B, 90A, 90B, 92A, 92B are
They correspond to the LED chips 74Δ, 74BS LED chips 76A, 76B and LED chips 78A, 78B arranged in parallel, and are accurately formed at predetermined intervals by a method such as etching.

このため、各LEDチップから前方へ発せれた光は、こ
のLEDチップに対応して配置されたアパーチャによっ
てその外径寸法が制限されてフレアが減少されて集光レ
ンズ61へ入射するようになっている。
Therefore, the outer diameter of the light emitted forward from each LED chip is limited by the aperture arranged corresponding to the LED chip, so that flare is reduced and the light enters the condenser lens 61. ing.

次に本実施例の作用を説明する。Next, the operation of this embodiment will be explained.

マガジン14から引き出された熱現像感光材料16がカ
ッタ18で切断された後に回転ドラム20の外周へ巻付
けられると、回転ドラム20が高速で回転(第2図およ
び第3図矢印C方向)すると共に露光ヘッド22が回転
ドラム20の軸線方向(第3図矢印C方向)へ移動して
(主走査および副走査が行なわれて)、画像が露光され
る。
When the photothermographic material 16 pulled out from the magazine 14 is cut by the cutter 18 and wound around the outer circumference of the rotating drum 20, the rotating drum 20 rotates at high speed (in the direction of arrow C in FIGS. 2 and 3). At the same time, the exposure head 22 moves in the axial direction of the rotary drum 20 (in the direction of arrow C in FIG. 3) (main scanning and sub-scanning are performed), and the image is exposed.

この場合露光ヘッド22では、各LEDチップがそれぞ
れ異なる波長の光を射出する。すなわち、LEDチップ
74 (発光部74A、74B)は熱現像感光材料16
にシアン(C)の色素を発色させる赤外光を射出し、L
EDチップ76(発光部76A、76B)は熱現像感光
材料16にマゼンタ(M)の色素を発色させる赤色光を
射出し、さらに、LEDチップ78 (発光部78A、
78B)は熱現像感光材料16にイエロー(Y)の色素
を発色させる黄色光を射出する。
In this case, in the exposure head 22, each LED chip emits light of a different wavelength. That is, the LED chip 74 (light-emitting portions 74A, 74B) is connected to the heat-developable photosensitive material 16.
Infrared light that develops cyan (C) pigment is emitted into the L
The ED chip 76 (light-emitting parts 76A, 76B) emits red light that develops magenta (M) dye on the photothermographic material 16, and furthermore, the LED chip 78 (light-emitting parts 78A,
78B) emits yellow light that causes the photothermographic material 16 to develop a yellow (Y) dye.

射出された光は、遮光板86に形成されたアパーチャ8
8A、88B、90A、90B、92A、92Bによっ
てその外径寸法が制限されてフレアが減少されて集光レ
ンズ61へ入射する。入射した光は、集光レンズ61に
よって集光されて熱現像感光材料16上に結像し、ドツ
トパターンの潜像として記録される。さらにこの三色の
露光は、画像情報に応じ回転ドラム200回転に同期し
て繰返えし行なわれ、これによって画像が記録される。
The emitted light passes through an aperture 8 formed in a light shielding plate 86.
8A, 88B, 90A, 90B, 92A, and 92B limit the outer diameter of the light, thereby reducing flare, and the light enters the condenser lens 61. The incident light is condensed by a condensing lens 61 and formed into an image on the photothermographic material 16, where it is recorded as a latent image of a dot pattern. Furthermore, this three-color exposure is repeated in synchronization with the rotation of the rotating drum 200 times according to the image information, thereby recording an image.

ここでこの画像の露光は、二つ形成され副走査方向に沿
って取付けれたLEDチップの発光部の全てを用いて、
2ラインの主走査露光が同時に行なわれるため、画像記
録に要する時間を大幅に短縮することができる。
Here, this image is exposed using all of the light emitting parts of two LED chips formed and attached along the sub-scanning direction.
Since two lines of main scanning exposure are performed simultaneously, the time required for image recording can be significantly shortened.

またこの場合、従来の露光ヘッドでは複数の独立した光
源(LEDチップ)をそれぞれ独自に取付けていたため
、各光源を所定のピッチ(副走査ピッチと同一ピッチ)
に正確に取付けるのが容易でなく、数百ミクロン程度の
取付は精度しか確保できなかった。またこのためコスト
高であった。
In addition, in this case, because the conventional exposure head had multiple independent light sources (LED chips) each mounted independently, each light source was arranged at a predetermined pitch (same pitch as the sub-scanning pitch).
It is not easy to accurately mount the device, and only a precision of a few hundred microns can be ensured. Moreover, this resulted in high costs.

これに対し露光ヘッド22では、例えば、単一のLED
チップ74の互いに独立して形成された二つの発光部7
4A、74Bは、このLEDチップ74の製作時点にお
いてダイヤモンドブレード等により切削されて形成され
、さらに、ダイヤモンドブレード等による切削および切
断は数十ミクロンの精度を確保できるため、この発光部
74A、74Bを所定のピッチ(副走査ピッチと同一ピ
ッチ)に正確にかつ高精度に形成することができる。
On the other hand, in the exposure head 22, for example, a single LED
Two light emitting parts 7 formed independently of each other on the chip 74
4A and 74B are formed by cutting with a diamond blade etc. at the time of manufacturing this LED chip 74, and furthermore, since cutting and cutting with a diamond blade etc. can ensure accuracy of several tens of microns, these light emitting parts 74A, 74B are They can be formed accurately and with high precision at a predetermined pitch (the same pitch as the sub-scanning pitch).

さらに、このLEDチップを各発光部が副走査方向に沿
うように基台上に取付けた場合であっても、二つの発光
部間のピッチがズレることは無く、取付は時点において
も発光部間の所定のピッチをそのまま維持することがで
き、従来に比べて大幅に取付は精度を向上させることが
できる。
Furthermore, even if this LED chip is mounted on a base so that each light emitting part is along the sub-scanning direction, the pitch between the two light emitting parts will not deviate, and even at the time of installation, the distance between the light emitting parts The predetermined pitch can be maintained as is, and the mounting accuracy can be greatly improved compared to the conventional method.

したがって、このLEDチップを用いて熱現像感光材料
16に画像の記録を行なった場合には、副走査方向に周
期的に濃度変動(むら)が生じることが無く、このため
、記録された画像は高品質となる。
Therefore, when an image is recorded on the photothermographic material 16 using this LED chip, there will be no periodic density fluctuations (unevenness) in the sub-scanning direction, and therefore the recorded image will be High quality.

また、各LEDチップは、二つの発光部間のピッチが、
複数個製作された異なるLEDチップにおいても同一と
なり、製品の均一化も図れる。さらに、LEDウェハを
切断し複数のチップに分割して製作するという製作工程
(グイシング工程)を変更することもないため、コスト
や生産性が悪化することも無い。
In addition, the pitch between the two light emitting parts of each LED chip is
Even if a plurality of different LED chips are manufactured, they will be the same, and products can be made uniform. Furthermore, there is no need to change the manufacturing process (guishing process) in which the LED wafer is cut and divided into a plurality of chips, so there is no deterioration in cost or productivity.

露光後の熱現像感光材料16はスクレーバ24で!ll
 、litされ、水塗布部26で水塗布されて熱現像転
写部28へと送られる。
After exposure, the heat-developable photosensitive material 16 is passed through the scraper 24! ll
, lit, coated with water in the water coating section 26, and sent to the thermal development transfer section 28.

一方トレイ30内の受像材料32は供給ローラ38によ
って順次−枚づつ取出され、感光材料16と密着された
状態で熱現像転写部28へと送られる。
On the other hand, the image receiving material 32 in the tray 30 is taken out one by one by the supply roller 38 and sent to the thermal development transfer section 28 while being in close contact with the photosensitive material 16.

熱現像転写部28へと送られ熱現像感光材料16と受像
材料32とは、密着された状態のままでハロゲンランプ
38によって約90℃に加熱された加熱ドラム34と無
端圧着ベルト36との間で加熱ドラム34のほぼ2/3
周に渡って挟持搬送されて熱現像されると共に画像が受
像材料32へ転写される。
The heat-developable photosensitive material 16 and the image-receiving material 32 sent to the heat-developable transfer unit 28 remain in close contact with each other between the heating drum 34 and the endless pressure belt 36, which are heated to about 90° C. by the halogen lamp 38. approximately 2/3 of heating drum 34
The image is transferred to the image-receiving material 32 while being pinched and conveyed around the circumference and thermally developed.

転写後は、剥離爪48によって熱現像感光材料16と受
像材料32が加熱ドラム34から剥離され、さららに分
!850によって互いに分離される。分離された熱現像
感光材料16は廃棄感光材料収容箱59へ送り出され、
受像材料32はヒータ54を経て取出トレイ56へと取
出される。
After the transfer, the heat-developable photosensitive material 16 and the image-receiving material 32 are peeled off from the heating drum 34 by the peeling claw 48 and further separated! 850. The separated heat-developable photosensitive material 16 is sent to a waste photosensitive material storage box 59,
The image receiving material 32 is taken out to a takeout tray 56 via a heater 54 .

なお本実施例においては、各LEDチップは互いに独立
する二つの発光R(PN接合面)が−軸的に形成される
構成としたが、これに限らず、三つ以上の独立する発光
部が一体的に形成される構成としてもよい。この場合で
あっても、各発光部間のピンチを高精度に形成すること
ができ、また、取付は時点でこのピッチがズレることも
無く、高画質の画像が得られる。
In the present embodiment, each LED chip has a configuration in which two mutually independent light emitting parts R (PN junction surface) are formed along the -axis, but the present invention is not limited to this. It may also be configured to be integrally formed. Even in this case, the pinch between the light emitting parts can be formed with high precision, and the pitch does not shift at the time of installation, and a high quality image can be obtained.

また本実施例においては、3色すべてのLEDチップを
、互いに独立する二つの発光部が一体的に形成される構
成としたが、これに限らず、いずれか−色あるいは二色
のLEDチップのみを、互いに独立する二つの発光部が
一体的に形成される構成としてもよい。
In addition, in this embodiment, the LED chips of all three colors are configured so that two mutually independent light emitting parts are integrally formed, but the present invention is not limited to this. The configuration may be such that two mutually independent light emitting parts are integrally formed.

さらに本実施例においては、3色の異なる光源(LED
チップ)によってカラー画像を得る画像記録装置10に
ついて説明したが、本発明はこれに限らず、単一の光源
によって単色の画像を得る画像記録装置であっても適用
することができる。
Furthermore, in this example, three different color light sources (LED
Although the image recording apparatus 10 that obtains a color image using a chip) has been described, the present invention is not limited thereto, and can be applied to an image recording apparatus that obtains a monochromatic image using a single light source.

[発明の効果] 以上説明した如く、本発明は以下の効果を有している。[Effect of the invention] As explained above, the present invention has the following effects.

請求項(1)記載のLEDチップでは、コストや生産性
を悪化させることなく、取付は位置(同一色の発光部間
のピッチ)精度を向上させて所定のピッチ(副走査ピッ
チと同一ピッチ〉に正確に取付けることができ、これに
よって、画像の記録を行なった場合には副走査方向に周
期的濃度変動(むら)の無い高品質な画像を形成するこ
とができる。
In the LED chip according to claim (1), the mounting can be performed at a predetermined pitch (the same pitch as the sub-scanning pitch) by improving the accuracy of the position (pitch between light-emitting parts of the same color) without deteriorating cost or productivity. As a result, when an image is recorded, a high-quality image without periodic density fluctuations (unevenness) in the sub-scanning direction can be formed.

また、請求項(2)記載のLEDチップの製作方法では
、単一のLLEDチップにふいて、複数の独立した発光
部を所定のピッチ(副走査ピッチと同一ピッチ)に正確
に形成することができ、取付は精度も向上する。また、
複数の発光部間のピッチが、複数製作された異なるLE
Dチップにおいて同一となり、製品の均一化も図れる。
Further, in the method for manufacturing an LED chip according to claim (2), it is possible to accurately form a plurality of independent light emitting parts at a predetermined pitch (the same pitch as the sub-scanning pitch) in a single LLED chip. This also improves installation accuracy. Also,
LEs with different pitches between multiple light emitting parts
Since the D chips are the same, uniformity of products can be achieved.

さらに、LEDウェハを切断し複数のチップに分割して
製作するという製作工程を変更することもないため、コ
ストや生産性が悪化することも無い。
Furthermore, there is no need to change the manufacturing process of cutting the LED wafer and dividing it into multiple chips, so there is no deterioration in cost or productivity.

また、この方法により製作されたLEDチンブを用いて
画像の記録を行なった場合には、副走査方向に周期的に
濃度変動(むら)の無い高品質な画像を形成することが
できる。
Further, when an image is recorded using an LED chimbu manufactured by this method, a high-quality image without periodic density fluctuations (unevenness) in the sub-scanning direction can be formed.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の実施例に係るLEDチップの斜視図、
第2図はLEDチップが用いられた露光ヘッドの概略断
面図、第3図はLEDチップの取付は状態を示す露光ヘ
ッドの概略斜視図、第4図は画像記録装置の概略構成図
である。 10・・・画像記録装置、 16・・・感光材料、 20・・・回転ドラム、 22・・・露光ヘッド、 74・・・LEDチップ、 ?4A、74B・・・発光部、 76・・・LEDチップ、 76A、76B・・・発光部、 78・・・LEDチップ、 78A、78B・・・発光部。 4A 74 : u:o奇lフ゛ 74A・74B二  宅り部
FIG. 1 is a perspective view of an LED chip according to an embodiment of the present invention;
FIG. 2 is a schematic sectional view of an exposure head using an LED chip, FIG. 3 is a schematic perspective view of the exposure head showing how the LED chip is mounted, and FIG. 4 is a schematic configuration diagram of an image recording apparatus. 10... Image recording device, 16... Photosensitive material, 20... Rotating drum, 22... Exposure head, 74... LED chip, ? 4A, 74B... Light emitting part, 76... LED chip, 76A, 76B... Light emitting part, 78... LED chip, 78A, 78B... Light emitting part. 4A 74: u:o odd l file 74A/74B2 house part

Claims (2)

【特許請求の範囲】[Claims] (1)一体的に形成されたP領域およびN領域のうち、
いずれか一方の領域が連続し、他方の領域が互いに離間
し独立する複数に分離され、互いに離間し独立した複数
のPN接合面を備えるLEDチップ。
(1) Of the integrally formed P region and N region,
An LED chip in which one of the regions is continuous, the other region is separated into a plurality of independent and spaced apart regions, and has a plurality of independent PN junction surfaces that are spaced apart from each other.
(2)LEDウェハを切断し複数のチップに分割して製
作するLEDチップの製作方法であって、前記複数のチ
ップに分割する際に、単一のチップのP領域およびN領
域のうちいずれか一方の領域を完全に切削してこの領域
を互いに離間し独立した複数に分離し、単一のチップ内
に互いに離間し独立した複数のPN接合面を形成させる
ことを特徴とするLEDチップの製作方法。
(2) A method for manufacturing an LED chip in which an LED wafer is cut and divided into a plurality of chips, and when dividing into the plurality of chips, either the P region or the N region of a single chip is selected. Fabrication of an LED chip characterized by completely cutting one region and separating this region into a plurality of separated and independent regions, thereby forming a plurality of separated and independent PN junction surfaces within a single chip. Method.
JP63226207A 1988-09-09 1988-09-09 LED chip and its manufacturing method Pending JPH0274080A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63226207A JPH0274080A (en) 1988-09-09 1988-09-09 LED chip and its manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63226207A JPH0274080A (en) 1988-09-09 1988-09-09 LED chip and its manufacturing method

Publications (1)

Publication Number Publication Date
JPH0274080A true JPH0274080A (en) 1990-03-14

Family

ID=16841574

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63226207A Pending JPH0274080A (en) 1988-09-09 1988-09-09 LED chip and its manufacturing method

Country Status (1)

Country Link
JP (1) JPH0274080A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007041276A (en) * 2005-08-03 2007-02-15 Fujifilm Corp Color filter, manufacturing method thereof, and liquid crystal display device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007041276A (en) * 2005-08-03 2007-02-15 Fujifilm Corp Color filter, manufacturing method thereof, and liquid crystal display device

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