JPH0274362U - - Google Patents
Info
- Publication number
- JPH0274362U JPH0274362U JP1988151237U JP15123788U JPH0274362U JP H0274362 U JPH0274362 U JP H0274362U JP 1988151237 U JP1988151237 U JP 1988151237U JP 15123788 U JP15123788 U JP 15123788U JP H0274362 U JPH0274362 U JP H0274362U
- Authority
- JP
- Japan
- Prior art keywords
- tray
- pair
- support parts
- light receiving
- cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988151237U JPH0274362U (it) | 1988-11-22 | 1988-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988151237U JPH0274362U (it) | 1988-11-22 | 1988-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0274362U true JPH0274362U (it) | 1990-06-06 |
Family
ID=31425101
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988151237U Pending JPH0274362U (it) | 1988-11-22 | 1988-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0274362U (it) |
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1988
- 1988-11-22 JP JP1988151237U patent/JPH0274362U/ja active Pending