JPH0274513A - Method for removing silicon carbide in molten silicon - Google Patents

Method for removing silicon carbide in molten silicon

Info

Publication number
JPH0274513A
JPH0274513A JP22480088A JP22480088A JPH0274513A JP H0274513 A JPH0274513 A JP H0274513A JP 22480088 A JP22480088 A JP 22480088A JP 22480088 A JP22480088 A JP 22480088A JP H0274513 A JPH0274513 A JP H0274513A
Authority
JP
Japan
Prior art keywords
silicon
filter
molten
silicon carbide
sic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22480088A
Other languages
Japanese (ja)
Other versions
JPH0476331B2 (en
Inventor
Takashi Suhara
須原 俊
Kenkichi Yushimo
湯下 憲吉
Yasuhiko Sakaguchi
泰彦 阪口
Makoto Fukai
深井 真
Matao Araya
荒谷 復夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Original Assignee
Kawasaki Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Steel Corp filed Critical Kawasaki Steel Corp
Priority to JP22480088A priority Critical patent/JPH0274513A/en
Publication of JPH0274513A publication Critical patent/JPH0274513A/en
Publication of JPH0476331B2 publication Critical patent/JPH0476331B2/ja
Granted legal-status Critical Current

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Abstract

PURPOSE:To produce high-purity silicon in a short time at a low cost by reducing silica with carbon, passing the resultant molten silicon through a filter having a specific passage diameter and capturing SiC with a cake layer of SiC formed on the filter. CONSTITUTION:Silica is reduced with carbon to provide molten silica 4, which is then injected into a treating vessel 5 having a filter 7, consisting of one or two or more of quartz, graphite, SiC and Si3N4. The passage diameter thereof is 10mum-20mm. A layer of a SiC cake 6 is formed on the filter 7 by passing the molten silica 4 therethrough and the resultant SiC is captured by the cake layer, separated and removed from the molten silica. The SiC can be removed in a short period of about 1/500 of that in a conventional method according to the above-mentioned method. Thereby, high-purity silicon used for solar cells, etc., can be produced at a low cost.

Description

【発明の詳細な説明】 (産業上の利用分野) この発明は、太陽電池などに用いられるけい素を、高純
度シリカを高純度炭素によって還元して製造する際に、
溶融けい素中に混在する炭化けい素を迅速に除去するこ
とのできる溶融けい素中の炭化けい素の除去方法に関す
るものである。
[Detailed Description of the Invention] (Industrial Application Field) The present invention provides a method for manufacturing silicon used in solar cells by reducing high-purity silica with high-purity carbon.
The present invention relates to a method for removing silicon carbide from molten silicon, which can quickly remove silicon carbide mixed in molten silicon.

近年、太陽電池用のけい素を安価に製造する方法として
、例えば特開昭61−117110号公報に開示されて
いるように高純度シリカを高純度炭素によって還元する
方法が開発されている。
In recent years, as a method for manufacturing silicon for solar cells at low cost, a method has been developed in which high-purity silica is reduced with high-purity carbon, as disclosed in, for example, Japanese Patent Application Laid-open No. 117110/1983.

このような炭素を還元剤として用いるけい素の製造方法
では、得られたけい素中に必然的に炭素成分が混在して
しまう。例えば上掲特開昭61−117110号公報の
還元炉で製造されたけい素中には、1000〜5000
 wt ppmの炭素成分が含まれている。
In such a silicon manufacturing method using carbon as a reducing agent, a carbon component is inevitably mixed in the obtained silicon. For example, silicon produced in the reduction furnace of JP-A No. 61-117110 mentioned above contains 1000 to 5000
Contains wt ppm carbon content.

このため得られたけい素を精製してけい素中の炭素成分
を除く必要がある。
For this reason, it is necessary to refine the obtained silicon to remove carbon components from the silicon.

この炭素成分のうち、溶存炭素−C−に関しては、溶融
けい素に減圧処理又は酸素供給を行って、C+0→CO
↑の反応を促進させ、COガスとして除去する方法が有
効である。しかし炭素と化合し析出している炭素成分:
炭化けい素(SiC)に関しては、減圧処理及び酸素供
給を行ってもそれほど効果はない。
Among these carbon components, dissolved carbon -C- is treated by reducing pressure or supplying oxygen to the molten silicon to reduce C+0→CO.
An effective method is to accelerate the reaction described above and remove it as CO gas. However, carbon components that combine with carbon and precipitate:
Regarding silicon carbide (SiC), even if reduced pressure treatment and oxygen supply are performed, there is no significant effect.

この減圧処理、酸素供給の処理温度1500〜1600
°Cでは、はとんどの炭素成分は、炭化けい素として出
現しているので、前処理で溶融けい素中の炭化けい素を
除去する必要がある。
This depressurization treatment and oxygen supply treatment temperature range from 1500 to 1600.
At °C, most of the carbon components appear as silicon carbide, so it is necessary to remove silicon carbide from the molten silicon in a pretreatment.

(従来の技術) 溶融けい素からSiO□及びSiCのような固体反応生
成物を分離するために、特開昭60−239317号公
報では、溶融けい素を加熱されたSiC/Si複合材料
からなる層を通じて濾過し、高純度の黒鉛型中に受け、
方向性凝固を行う方法が提案されている。
(Prior Art) In order to separate solid reaction products such as SiO Filtered through a layer and received into a high purity graphite mold,
A method of performing directional solidification has been proposed.

(発明が解決しようとする課題) 上述した特開昭60−239317号公報に開示の方法
ではフィルタ内に、けい素の流路径が3〜10μm以下
の層があり、従ってけい素の通過速度を著しく低下させ
、処理時間がかかるために高コストの処理方法となって
しまう問題があった。
(Problems to be Solved by the Invention) In the method disclosed in the above-mentioned Japanese Patent Application Laid-open No. 60-239317, there is a layer in the filter with a silicon flow path diameter of 3 to 10 μm or less, and therefore the passage speed of silicon is reduced. There has been a problem that the processing method is expensive because it significantly reduces the processing time and takes processing time.

この発明は、このような問題を有利に解決するもので、
溶融けい素中の炭化けい素を効率良く除去し、短時間に
多量のけい素を処理することのできる溶融けい素中の炭
化けい素の除去方法を提案することを目的とする。
This invention advantageously solves these problems,
The purpose of the present invention is to propose a method for removing silicon carbide from molten silicon that can efficiently remove silicon carbide from molten silicon and process a large amount of silicon in a short time.

(課題を解決するための手段) 特開昭60−239317号公報では、効果的な濾過を
行うためには、流路径が3μm以下であることが必要と
されているが、発明者らが詳細に実験を行ってみたとこ
ろ、溶融けい素中の炭化けい素の除去にあたっては、濾
過処理の初期にフィルタ上にけい素と炭化けい素との混
合層(ケーク層)が形成され、それ以後に処理される溶
融けい素中の炭化けい素は、その層上又は層内に捕捉さ
れることがら流路径が10μm以上のフィルタを用いて
炭化けい素の除去を効果的に行い得ることが判明した。
(Means for Solving the Problems) According to Japanese Patent Application Laid-Open No. 60-239317, in order to perform effective filtration, the flow path diameter must be 3 μm or less, but the inventors have We conducted an experiment and found that when removing silicon carbide from molten silicon, a mixed layer (cake layer) of silicon and silicon carbide is formed on the filter at the beginning of the filtration process, and then a cake layer is formed on the filter. It has been found that silicon carbide in the molten silicon to be treated is trapped on or within the layer, so silicon carbide can be effectively removed using a filter with a flow path diameter of 10 μm or more. .

また、一般の表面濾過とは違って残渣層による目詰まり
も起こらず、ごのため熔融けい素の処理量により処理速
度の変化は、はとんどないことも併せて判明した。
It has also been found that, unlike general surface filtration, clogging due to a residual layer does not occur, and the processing speed hardly changes depending on the amount of molten silicon processed.

この発明は、上記の知見に立脚するものである。This invention is based on the above knowledge.

すなわちこの発明は、シリカを炭素で還元して得られた
溶融けい素中の炭化けい素の除去にあたり、流路径が1
0um〜20mmのフィルタに溶融けい素を通過させて
フィルタ上に炭化けい素のケーク層を形成させる段階を
経て、このケーク層にて炭化けい素を捕捉し、溶融けい
素から炭化けい素を分離することを特徴とする溶融けい
素中の炭化けい素の除去方法である。
In other words, this invention is capable of removing silicon carbide from molten silicon obtained by reducing silica with carbon.
After passing the molten silicon through a filter of 0 um to 20 mm to form a cake layer of silicon carbide on the filter, silicon carbide is captured in this cake layer and silicon carbide is separated from the molten silicon. This is a method for removing silicon carbide from molten silicon.

ここにフィルタの材質としては、石英、黒鉛、炭化けい
素及び窒化けい素のうち1種又は2種以上が有利に適合
する。
As the material for the filter, one or more of quartz, graphite, silicon carbide, and silicon nitride are advantageously suitable.

(作 用) 第1図に濾過処理を中断し、ケークを凝固させて上面か
ら見た場合のケークの固体状態を示す。
(Function) Figure 1 shows the solid state of the cake when the filtration process is interrupted and the cake is coagulated and viewed from above.

1は隙間、2はけい素、3は堆積しつつある炭化けい素
である。同図のようなケークが、溶融シリカの濾過の際
にフィルタ上に形成されることから、流路径が10μm
以上のフィルタを使用して処理することにより、処理速
度が大きい濾過を実現できるのである。
1 is a gap, 2 is silicon, and 3 is silicon carbide that is being deposited. Since a cake like the one shown in the figure is formed on the filter during filtration of fused silica, the flow path diameter is 10 μm.
By processing using the above filter, filtration with high processing speed can be realized.

第2図に、この発明の方法に有利な濾過装置を示す。FIG. 2 shows a filtration device advantageous for the method of the invention.

フィルタ7は、石英粒、炭化けい素粉、炭化けい素ペレ
ットなどの充填層、また石英、黒鉛などの目皿などが適
合する。さらに第3図に示すように、処理容器5の底壁
に孔を設けることによってもフィルタフの代わりに使用
できる。
As the filter 7, a packed layer of quartz grains, silicon carbide powder, silicon carbide pellets, etc., a perforated plate of quartz, graphite, etc. are suitable. Furthermore, as shown in FIG. 3, holes can be provided in the bottom wall of the processing container 5 to be used instead of the filter.

フィルタフの素材としては、けい素を汚染しない物質(
C,O,Si、Nを主成分とする物質)で、かつ141
0°C以上の処理温度で変形、劣化しない物質であれば
使用可能である。このことは、処理容器5の素材に関し
ても同じことが言える。
The filter material is made of substances that do not contaminate silicon (
a substance whose main components are C, O, Si, and N), and 141
Any material that does not deform or deteriorate at a processing temperature of 0° C. or higher can be used. The same can be said of the material of the processing container 5.

フィルタ7の処理容器5の流路径は、ケーク層がフィル
タ上に形成される程度に小さい必要がある。処理するけ
い素の炭素濃度、除去すべき炭化けい素の粒径、流路の
数などによって変化するが、流路径を20 mm以下と
するほうがケークは形成されやすい。また溶融けい素の
通過を容易にするためには、流路径を10μm以上とす
ることが望ましい。従ってこの発明では、流路径を10
μm〜20 mmの範囲とする。なお、石英粒等の充填
層で流路径を10μmにするためには、これらの粒子径
を50μm程度とすることが望ましい。
The flow path diameter of the processing container 5 of the filter 7 needs to be small enough to form a cake layer on the filter. Although it varies depending on the carbon concentration of the silicon to be treated, the particle size of the silicon carbide to be removed, the number of channels, etc., cake is more likely to be formed when the channel diameter is 20 mm or less. Further, in order to facilitate the passage of molten silicon, it is desirable that the diameter of the channel be 10 μm or more. Therefore, in this invention, the flow path diameter is set to 10
The range is from μm to 20 mm. Note that in order to make the flow path diameter 10 μm with a packed bed of quartz grains or the like, it is desirable that the particle size of these particles is about 50 μm.

第4図に、フィルタ厚さと濾過後の炭素濃度との関係を
示す。同図から明らかなように、フィルタを厚くしても
濾過効率はそれほど変化しないのでフィルタ厚さは10
0 mm以下にして処理速度を上げることが有利であり
、フィルタの種類にもよるが、40 mm程度あれば十
分で、小径のフィルタの場合は5〜10 mmのフィル
タ厚でもよい。
FIG. 4 shows the relationship between filter thickness and carbon concentration after filtration. As is clear from the figure, the filtration efficiency does not change much even if the filter is thickened, so the filter thickness is 10
It is advantageous to increase the processing speed by reducing the thickness to 0 mm or less; depending on the type of filter, a thickness of about 40 mm is sufficient, and for small diameter filters a filter thickness of 5 to 10 mm may be sufficient.

フィルタをそなえた処理容器に溶融けい素を注入して濾
過する際に、溶融けい素を1410〜1550°Cの温
度範囲に保持することが望ましい。保持温度が1410
°Cに満たないと溶融けい素が凝固しフィルタを通過し
なくなり、一方1550°C以上では不純物中の炭素が
溶融けい素中に溶解して純度を低下させるからである。
When molten silicon is poured into a processing container equipped with a filter and filtered, it is desirable to maintain the molten silicon within a temperature range of 1410 to 1550°C. Holding temperature is 1410
This is because if the temperature is lower than 1550°C, the molten silicon will solidify and will not pass through the filter, whereas if it is higher than 1550°C, carbon in the impurities will dissolve in the molten silicon, reducing its purity.

(実施例) 第2図及び第3図に示すような、種々の流路径のフィル
タを有する濾過装置内に、炭素濃度500wt ppm
の溶融けい素を注入し、処理容器5中の溶融けい素の温
度を1450°Cに保持しつつ濾過操業を行った。
(Example) A carbon concentration of 500 wt ppm was installed in a filtration device having filters with various flow path diameters as shown in FIGS. 2 and 3.
of molten silicon was injected, and the filtration operation was performed while maintaining the temperature of the molten silicon in the processing container 5 at 1450°C.

表1に、各流路径を持つフィルタ及び容器で処理した際
の1時間での処理量及び処理後の炭素濃度を示す。
Table 1 shows the amount of treatment in one hour and the carbon concentration after treatment when treated with filters and containers having various flow path diameters.

また、第5図に流路径10mmの孔を持つ処理容器(実
施例2)と流路径3μmのフィルタ(比較例1)を用い
た場合の処理量の経時変化を示す。
Further, FIG. 5 shows the change over time in the throughput when using a processing container with holes with a flow path diameter of 10 mm (Example 2) and a filter with a flow path diameter of 3 μm (Comparative Example 1).

表1及び第5図から、この発明に従う実施例1〜6は、
十分な処理量が得られ、比較例1の約11500という
短時間で炭化けいを除去できることがわかる。また、処
理後に炭素濃度は比較例1よりやや高めとなって後工程
での脱炭に時間がかかるとしても全工程での時間は短縮
される。
From Table 1 and FIG. 5, Examples 1 to 6 according to the present invention are as follows:
It can be seen that a sufficient treatment amount can be obtained and silicon carbide can be removed in a short time of about 11,500 in Comparative Example 1. Further, even though the carbon concentration after treatment is slightly higher than that of Comparative Example 1 and decarburization in the subsequent process takes time, the time required for the entire process is shortened.

(発明の効果) この発明によれば、溶融けい素中の炭化けい素を、従来
のほぼ11500の短時間で除去することができ、低コ
ストで太陽電池等に用いられる高純度けい素を製造する
ことができる。
(Effects of the Invention) According to the present invention, silicon carbide in molten silicon can be removed in a short time of about 11,500 ml compared to conventional methods, and high purity silicon used in solar cells etc. can be produced at low cost. can do.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、ケークの拡大(2,5倍)顕微鏡写真スケッ
チ図、 第2図は、この発明に従う濾過装置の断面図、第3図は
、この発明に従う処理容器の断面図、第4図は、フィル
タ厚さと濾過後の炭素濃度との関係を示すグラフ、 第5図は、流路径による処理速度の違いを示すグラフで
ある。 l・・・隙間       2・・・けい素3・・・炭
化けい素    4・・・けい素融液5・・・容器  
     6・・・ケーク7・・・フィルタ     
8・・・加熱コイル特 許 出 願 人 川 崎 製 鉄 株 式 %式%) ヌ1王V時1阿 (minン
Fig. 1 is an enlarged (2.5x) microscopic sketch of a cake; Fig. 2 is a cross-sectional view of a filtration device according to the present invention; Fig. 3 is a cross-sectional view of a processing container according to the present invention; Fig. 4; FIG. 5 is a graph showing the relationship between filter thickness and carbon concentration after filtration, and FIG. 5 is a graph showing the difference in processing speed depending on the flow path diameter. l...Gap 2...Silicon 3...Silicon carbide 4...Silicon melt 5...Container
6...Cake 7...Filter
8...Heating coil patent applicant Kawasaki Steel Co., Ltd.

Claims (1)

【特許請求の範囲】 1、シリカを炭素で還元して得られた溶融けい素中の炭
化けい素の除去にあたり、 流路径が10μm〜20mmのフィルタに溶融けい素を
通過させてフィルタ上に炭化けい素のケーク層を形成さ
せる段階を経て、 このケーク層にて炭化けい素を捕捉し、溶融けい素から
炭化けい素を分離する ことを特徴とする溶融けい素中の炭化けい素の除去方法
。 2、フィルタが、石英、黒鉛、炭化けい素及び窒化けい
素のうちの1種又は2種以上である請求項1記載の溶融
けい素中の炭化けい素の除去方法。
[Claims] 1. In removing silicon carbide from molten silicon obtained by reducing silica with carbon, the molten silicon is passed through a filter with a channel diameter of 10 μm to 20 mm and carbonized onto the filter. A method for removing silicon carbide from molten silicon, which comprises the steps of forming a silicon cake layer, capturing silicon carbide in this cake layer, and separating the silicon carbide from the molten silicon. . 2. The method for removing silicon carbide from molten silicon according to claim 1, wherein the filter is one or more of quartz, graphite, silicon carbide, and silicon nitride.
JP22480088A 1988-09-09 1988-09-09 Method for removing silicon carbide in molten silicon Granted JPH0274513A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22480088A JPH0274513A (en) 1988-09-09 1988-09-09 Method for removing silicon carbide in molten silicon

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22480088A JPH0274513A (en) 1988-09-09 1988-09-09 Method for removing silicon carbide in molten silicon

Publications (2)

Publication Number Publication Date
JPH0274513A true JPH0274513A (en) 1990-03-14
JPH0476331B2 JPH0476331B2 (en) 1992-12-03

Family

ID=16819401

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22480088A Granted JPH0274513A (en) 1988-09-09 1988-09-09 Method for removing silicon carbide in molten silicon

Country Status (1)

Country Link
JP (1) JPH0274513A (en)

Also Published As

Publication number Publication date
JPH0476331B2 (en) 1992-12-03

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