JPH0275620U - - Google Patents

Info

Publication number
JPH0275620U
JPH0275620U JP15542288U JP15542288U JPH0275620U JP H0275620 U JPH0275620 U JP H0275620U JP 15542288 U JP15542288 U JP 15542288U JP 15542288 U JP15542288 U JP 15542288U JP H0275620 U JPH0275620 U JP H0275620U
Authority
JP
Japan
Prior art keywords
coil pattern
reflecting mirror
movable part
spring
spring part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15542288U
Other languages
English (en)
Other versions
JPH0532825Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15542288U priority Critical patent/JPH0532825Y2/ja
Publication of JPH0275620U publication Critical patent/JPH0275620U/ja
Application granted granted Critical
Publication of JPH0532825Y2 publication Critical patent/JPH0532825Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Mechanical Optical Scanning Systems (AREA)

Description

【図面の簡単な説明】
第１図は本考案に係わる光偏向素子の一実施例
を示す構成図、第２図は第１図のばね部３０の拡
大断面構成図、第３図は固定位置と共振周波数に
ついて説明するための図、第４図は共振周波数の
調整方法を説明するための図、第５図は従来例を
示す構成斜視図である。 １……フルーム、２……可動部、３……ばね部
、４……反射鏡、５……コイルパターン、１１…
…基部、３０…ばね部、３１……巾広部、３２…
…巾細部。

Claims (1)

    【実用新案登録請求の範囲】
  1. 絶縁基板にコイルパターン及び反射鏡を形成し
    てなる可動部をばね部を介して片持ち梁として支
    持し、このコイルパターンに流す電流によつて前
    記可動部に形成した反射鏡を変位させるようにし
    た光偏向素子において、前記ばね部を巾広部と巾
    細部よりなる段付き構造としたことを特徴とする
    光偏向素子。
JP15542288U 1988-11-29 1988-11-29 Expired - Lifetime JPH0532825Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15542288U JPH0532825Y2 (ja) 1988-11-29 1988-11-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15542288U JPH0532825Y2 (ja) 1988-11-29 1988-11-29

Publications (2)

Publication Number Publication Date
JPH0275620U true JPH0275620U (ja) 1990-06-11
JPH0532825Y2 JPH0532825Y2 (ja) 1993-08-23

Family

ID=31433040

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15542288U Expired - Lifetime JPH0532825Y2 (ja) 1988-11-29 1988-11-29

Country Status (1)

Country Link
JP (1) JPH0532825Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011013401A (ja) * 2009-07-01 2011-01-20 National Institute Of Advanced Industrial Science & Technology 光ビーム走査装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011013401A (ja) * 2009-07-01 2011-01-20 National Institute Of Advanced Industrial Science & Technology 光ビーム走査装置

Also Published As

Publication number Publication date
JPH0532825Y2 (ja) 1993-08-23

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