JPH0275723U - - Google Patents
Info
- Publication number
- JPH0275723U JPH0275723U JP1988154553U JP15455388U JPH0275723U JP H0275723 U JPH0275723 U JP H0275723U JP 1988154553 U JP1988154553 U JP 1988154553U JP 15455388 U JP15455388 U JP 15455388U JP H0275723 U JPH0275723 U JP H0275723U
- Authority
- JP
- Japan
- Prior art keywords
- reduced pressure
- vapor phase
- phase growth
- growth apparatus
- pressure vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988154553U JPH0275723U (lt) | 1988-11-28 | 1988-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988154553U JPH0275723U (lt) | 1988-11-28 | 1988-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0275723U true JPH0275723U (lt) | 1990-06-11 |
Family
ID=31431386
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988154553U Pending JPH0275723U (lt) | 1988-11-28 | 1988-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0275723U (lt) |
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1988
- 1988-11-28 JP JP1988154553U patent/JPH0275723U/ja active Pending