JPH0277672U - - Google Patents

Info

Publication number
JPH0277672U
JPH0277672U JP15612088U JP15612088U JPH0277672U JP H0277672 U JPH0277672 U JP H0277672U JP 15612088 U JP15612088 U JP 15612088U JP 15612088 U JP15612088 U JP 15612088U JP H0277672 U JPH0277672 U JP H0277672U
Authority
JP
Japan
Prior art keywords
probe card
opening
trimming device
probe
slide mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15612088U
Other languages
Japanese (ja)
Other versions
JPH0611465Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988156120U priority Critical patent/JPH0611465Y2/en
Publication of JPH0277672U publication Critical patent/JPH0277672U/ja
Application granted granted Critical
Publication of JPH0611465Y2 publication Critical patent/JPH0611465Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Semiconductor Integrated Circuits (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は、本考案の第一の実施例を示す斜視図
、第２図は、同実施例の一部分解斜視図、第３図
は、本考案の第二の実施例を示す斜視図、第４図
は、プローブカードの搭載マウントの一例を示す
平面図である。 １……プローブカードの板状体、２……プロー
ブカードの開口部、３……プローブピン、５……
プローブカードの搭載マウント、１０……プロー
ブカード。 FIG. 1 is a perspective view showing a first embodiment of the present invention, FIG. 2 is a partially exploded perspective view of the same embodiment, and FIG. 3 is a perspective view showing a second embodiment of the present invention. FIG. 4 is a plan view showing an example of a probe card mounting mount. DESCRIPTION OF SYMBOLS 1... Plate-shaped body of a probe card, 2... Opening of a probe card, 3... Probe pin, 5...
Probe card mounting mount, 10... Probe card.

Claims (1)

【実用新案登録請求の範囲】 (1) 中央にレーザ通過用の開口部が設けられた
板状体の上記開口部の周囲から開口部の中に向け
て弾性を有するプローブピンが突設されたプロー
ブカードを、トリミング装置に取り付ける装置に
おいて、プローブカードが、トリミング装置に対
してプローブカードの厚み方向にスライド自在な
スライド機構を介してトリミング装置に取り付け
られ、上記スライド機構にプローブカードを微調
整可能にスライドさせる調整機構が設けられたこ
とを特徴とするプローブカード取付装置。 (2) 中央にレーザ通過用の開口部が設けられた
板状体の上記開口部の周囲から開口部の中に向け
て弾性を有するプローブピンが突設されたプロー
ブカードを、トリミング装置に取り付ける装置に
おいて、プローブカードが、トリミング装置に対
してプローブカードの厚み方向にスライド自在な
スライド機構を介してトリミング装置に取り付け
られ、上記スライド機構にプローブカードを微調
整可能にスライドさせる調整機構と、上記トリミ
ング装置に対するプローブカードの変位量を表示
する手段とが設けられたことを特徴とするプロー
ブカード取付装置。[Scope of Claim for Utility Model Registration] (1) A plate-shaped body with an opening for laser passage in the center, and an elastic probe pin protruding from around the opening into the opening. In a device for attaching a probe card to a trimming device, the probe card is attached to the trimming device via a slide mechanism that can freely slide in the thickness direction of the probe card with respect to the trimming device, and the probe card can be finely adjusted by the slide mechanism. A probe card mounting device characterized by being provided with an adjustment mechanism for sliding the probe card. (2) Attach a probe card to the trimming device, which has elastic probe pins protruding from around the opening into the opening of a plate-shaped body with an opening for laser passage in the center. In the apparatus, the probe card is attached to the trimming device via a slide mechanism that can freely slide in the thickness direction of the probe card with respect to the trimming device, and an adjustment mechanism that slides the probe card on the slide mechanism for fine adjustment; 1. A probe card mounting device comprising means for displaying the amount of displacement of the probe card with respect to a trimming device.
JP1988156120U 1988-11-30 1988-11-30 Probe card mounting device Expired - Lifetime JPH0611465Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988156120U JPH0611465Y2 (en) 1988-11-30 1988-11-30 Probe card mounting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988156120U JPH0611465Y2 (en) 1988-11-30 1988-11-30 Probe card mounting device

Publications (2)

Publication Number Publication Date
JPH0277672U true JPH0277672U (en) 1990-06-14
JPH0611465Y2 JPH0611465Y2 (en) 1994-03-23

Family

ID=31434366

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988156120U Expired - Lifetime JPH0611465Y2 (en) 1988-11-30 1988-11-30 Probe card mounting device

Country Status (1)

Country Link
JP (1) JPH0611465Y2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6364036U (en) * 1986-10-14 1988-04-27

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6364036U (en) * 1986-10-14 1988-04-27

Also Published As

Publication number Publication date
JPH0611465Y2 (en) 1994-03-23

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