JPH0278947U - - Google Patents

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Publication number
JPH0278947U
JPH0278947U JP15872288U JP15872288U JPH0278947U JP H0278947 U JPH0278947 U JP H0278947U JP 15872288 U JP15872288 U JP 15872288U JP 15872288 U JP15872288 U JP 15872288U JP H0278947 U JPH0278947 U JP H0278947U
Authority
JP
Japan
Prior art keywords
copy
chamber
substrate
back side
mask substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15872288U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15872288U priority Critical patent/JPH0278947U/ja
Publication of JPH0278947U publication Critical patent/JPH0278947U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】
第１図は本考案の一実施例を示す概略断面図、
第２図は従来例を示す真空密着型露光装置の構造
図、第３図は３チヤンバ方式の従来例を示す真空
密着型露光装置の構造図である。 １１…チヤンバ、１３…マスク基板、１５…チ
ヤンバ、１７…コピー基板、１９…チヤンバ、２
２…コピー基板押え部材。

Claims (1)

    【実用新案登録請求の範囲】
  1. 重ね合わせられるコピー基板とマスク基板とに
    対し、マスク基板裏面用のチヤンバとコピー基板
    裏面用のチヤンバとマスク基板・コピー基板間用
    のチヤンバとの３つのチヤンバを用いた真空密着
    型露光装置において、前記コピー基板の真空チヤ
    ツキング時にこのコピー基板を平坦状又はマスク
    基板側に凸状とさせる高さに形成したコピー基板
    押え部材を前記コピー基板裏面用のチヤンバ内中
    央部に設けたことを特徴とする真空密着型露光装
    置。
JP15872288U 1988-12-06 1988-12-06 Pending JPH0278947U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15872288U JPH0278947U (ja) 1988-12-06 1988-12-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15872288U JPH0278947U (ja) 1988-12-06 1988-12-06

Publications (1)

Publication Number Publication Date
JPH0278947U true JPH0278947U (ja) 1990-06-18

Family

ID=31439304

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15872288U Pending JPH0278947U (ja) 1988-12-06 1988-12-06

Country Status (1)

Country Link
JP (1) JPH0278947U (ja)

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