JPH0279033U - - Google Patents

Info

Publication number
JPH0279033U
JPH0279033U JP15776288U JP15776288U JPH0279033U JP H0279033 U JPH0279033 U JP H0279033U JP 15776288 U JP15776288 U JP 15776288U JP 15776288 U JP15776288 U JP 15776288U JP H0279033 U JPH0279033 U JP H0279033U
Authority
JP
Japan
Prior art keywords
sample
damage
frequency
amount
difference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15776288U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15776288U priority Critical patent/JPH0279033U/ja
Publication of JPH0279033U publication Critical patent/JPH0279033U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例の概略図、第２図及
び第３図は一実施例で得られる夫々損傷量の積分
値及び損傷量のプロフアイルを示すグラフである
。第４図は本考案の一従来例の概略図であり第１
図に対応している。 なお図面に用いた符号において、１１……Ａｒ
＋レーザ、１３……音響光学変調器、１４……レ
ーザ光、１８……試料、２２……レーザ光、２７
……バイセルデイテクタ、３１……コンピユータ
、３２……連続変調モジユール、である。

Claims (1)

  1. 【実用新案登録請求の範囲】 所定周波数のエネルギを試料へ与えてこの試料
    中に熱波を発生させる熱波発生手段と、 前記熱波を発生させた部分に光を照射しその反
    射光を測定して前記試料の損傷量を検出する損傷
    量検出手段と、 前記周波数を変更する周波数変更手段と、 この周波数変更手段で変更した前記周波数に対
    応して前記損傷量検出手段で検出した前記損傷量
    同士の差分を求める差分手段とを夫々具備する試
    料の損傷量測定装置。
JP15776288U 1988-12-03 1988-12-03 Pending JPH0279033U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15776288U JPH0279033U (ja) 1988-12-03 1988-12-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15776288U JPH0279033U (ja) 1988-12-03 1988-12-03

Publications (1)

Publication Number Publication Date
JPH0279033U true JPH0279033U (ja) 1990-06-18

Family

ID=31437492

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15776288U Pending JPH0279033U (ja) 1988-12-03 1988-12-03

Country Status (1)

Country Link
JP (1) JPH0279033U (ja)

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