JPH0280210U - - Google Patents

Info

Publication number
JPH0280210U
JPH0280210U JP15987688U JP15987688U JPH0280210U JP H0280210 U JPH0280210 U JP H0280210U JP 15987688 U JP15987688 U JP 15987688U JP 15987688 U JP15987688 U JP 15987688U JP H0280210 U JPH0280210 U JP H0280210U
Authority
JP
Japan
Prior art keywords
thermal expansion
high thermal
head
threaded part
bolt made
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15987688U
Other languages
English (en)
Other versions
JPH0417862Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15987688U priority Critical patent/JPH0417862Y2/ja
Publication of JPH0280210U publication Critical patent/JPH0280210U/ja
Application granted granted Critical
Publication of JPH0417862Y2 publication Critical patent/JPH0417862Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Connection Of Plates (AREA)

Description

【図面の簡単な説明】
第１図Ａは本考案にの一実施例に係る高熱膨張
材製ボルトの側面図、同図Ｂは同図ＡのＸ―Ｘ線
に沿う断面図、第２図は同ボルトのネジ部の常温
時、加熱時の状態の説明図、第３図は同ボルトを
真空チヤンバに組込んだ状態の説明図である。 １……高熱膨張材製ボルト、２……頭部、３…
…ネジ部、３ａ……すり割り、４……真空チヤン
バ。

Claims (1)

    【実用新案登録請求の範囲】
  1. プラズマエツチング装置のエツチング室内部で
    使用される高熱膨張材製ボルトにおいて、頭部と
    、これと一体化しているネジ部とからなり、この
    ネジ部にすり割りを設けたことを特徴とする高熱
    膨張材製ボルト。
JP15987688U 1988-12-08 1988-12-08 Expired JPH0417862Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15987688U JPH0417862Y2 (ja) 1988-12-08 1988-12-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15987688U JPH0417862Y2 (ja) 1988-12-08 1988-12-08

Publications (2)

Publication Number Publication Date
JPH0280210U true JPH0280210U (ja) 1990-06-20
JPH0417862Y2 JPH0417862Y2 (ja) 1992-04-21

Family

ID=31441462

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15987688U Expired JPH0417862Y2 (ja) 1988-12-08 1988-12-08

Country Status (1)

Country Link
JP (1) JPH0417862Y2 (ja)

Also Published As

Publication number Publication date
JPH0417862Y2 (ja) 1992-04-21

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