JPH0281335U - - Google Patents
Info
- Publication number
- JPH0281335U JPH0281335U JP16151188U JP16151188U JPH0281335U JP H0281335 U JPH0281335 U JP H0281335U JP 16151188 U JP16151188 U JP 16151188U JP 16151188 U JP16151188 U JP 16151188U JP H0281335 U JPH0281335 U JP H0281335U
- Authority
- JP
- Japan
- Prior art keywords
- room
- clean
- blown
- opening
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002265 prevention Effects 0.000 claims description 2
- 238000005192 partition Methods 0.000 claims 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 1
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Description
図は本考案に係るクリーンルームの汚染防止構
造の実施例を示す断面図である。
１０……クリーンルーム、１２……壁板、１４
Ａ……塩酸除去フイルタ、１４Ｂ……アンモニア
除去フイルタ、１４Ｃ……硫酸除去フイルタ、１
６……天井室、１７……送気口、１８……ＨＥＰ
Ａフイルタ、２０……ルーム、２２……グレーチ
ング、２４……基礎床、２８……床下チヤンバ、
３０……吸気口、３２……吸気ダクト、３４……
空気調和機、３６……外気導入ダクト、３８……
送風機、４０……送風ダクト。
The figure is a sectional view showing an embodiment of the clean room pollution prevention structure according to the present invention. 10...Clean room, 12...Wall board, 14
A... Hydrochloric acid removal filter, 14B... Ammonia removal filter, 14C... Sulfuric acid removal filter, 1
6...Ceiling room, 17...Air vent, 18...HEP
A filter, 20...Room, 22...Grating, 24...Foundation floor, 28...Underfloor chamber,
30...Intake port, 32...Intake duct, 34...
Air conditioner, 36... Outside air introduction duct, 38...
Blower, 40...Blower duct.
Claims (1)
清浄エアをルーム内に吹き出すと共に、床下チヤ
ンバにルーム内のエアを吹い込んで排気するクリ
ーンルームに於いて、 隣接配置されたルームを仕切る壁板に開孔部を
設け、前記開孔部に化学フイルタを取付けたこと
を特徴とするクリーンルームの汚染防止構造。[Scope of claim for utility model registration] A room located adjacent to a clean room in which clean air is blown into the room through a high-performance filter installed on the ceiling, and air from the room is blown into an underfloor chamber for exhaust. A pollution prevention structure for a clean room, characterized in that an opening is provided in a wall plate that partitions the room, and a chemical filter is attached to the opening.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16151188U JPH0438184Y2 (en) | 1988-12-13 | 1988-12-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16151188U JPH0438184Y2 (en) | 1988-12-13 | 1988-12-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0281335U true JPH0281335U (en) | 1990-06-22 |
| JPH0438184Y2 JPH0438184Y2 (en) | 1992-09-08 |
Family
ID=31444511
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16151188U Expired JPH0438184Y2 (en) | 1988-12-13 | 1988-12-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0438184Y2 (en) |
-
1988
- 1988-12-13 JP JP16151188U patent/JPH0438184Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0438184Y2 (en) | 1992-09-08 |