JPH0281407U - - Google Patents

Info

Publication number
JPH0281407U
JPH0281407U JP16102988U JP16102988U JPH0281407U JP H0281407 U JPH0281407 U JP H0281407U JP 16102988 U JP16102988 U JP 16102988U JP 16102988 U JP16102988 U JP 16102988U JP H0281407 U JPH0281407 U JP H0281407U
Authority
JP
Japan
Prior art keywords
sided
mirror
angled
shaped surface
mirrors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16102988U
Other languages
Japanese (ja)
Other versions
JPH067290Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988161029U priority Critical patent/JPH067290Y2/en
Publication of JPH0281407U publication Critical patent/JPH0281407U/ja
Application granted granted Critical
Publication of JPH067290Y2 publication Critical patent/JPH067290Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図、第２図は本考案に係るレーザ干渉計用
反射鏡の斜視図、第３図、第４図は本考案に係る
レーザ干渉計用反射鏡に関する説明図、第５図は
従来のレーザ干渉計用反射鏡の斜視図、第６図、
第７図は従来のレーザ干渉計用反射鏡に関する説
明図である。 ２０……誤差低減領域、２２，２４……基準点
、２５……レーザ干渉計用反射鏡、２６，３５，
３７……Ｌ字面鏡、２８，３６，３８……両面鏡
、３０，３２……直角３面鏡、３３……レーザ干
渉計用反射鏡、３４……座標測定可能範囲。 1 and 2 are perspective views of a reflector for a laser interferometer according to the present invention, FIGS. 3 and 4 are explanatory diagrams of the reflector for a laser interferometer according to the present invention, and FIG. 5 is a conventional one. A perspective view of a reflector for a laser interferometer, Fig. 6,
FIG. 7 is an explanatory diagram of a conventional reflecting mirror for a laser interferometer. 20...Error reduction area, 22, 24...Reference point, 25...Reflector for laser interferometer, 26, 35,
37... L-shaped mirror, 28, 36, 38... Double-sided mirror, 30, 32... Right-angled three-sided mirror, 33... Reflector for laser interferometer, 34... Coordinate measurement possible range.

Claims (1)

【実用新案登録請求の範囲】 (1) Ｌ字面に形成された鏡にＬ字面と直交する
両面鏡を立設して２連の直角３面鏡に形成したこ
とを特徴とするレーザ干渉計用反射鏡。 (2) Ｌ字面に形成された鏡にＬ字面と直交する
両面鏡を立設して２連の直角３面鏡を形成し、こ
の２連の直角３面鏡を一対として４個の集合直角
３面鏡を形成したことを特徴とするレーザ干渉計
用反射鏡。[Claims for Utility Model Registration] (1) For a laser interferometer characterized in that a double-sided mirror perpendicular to the L-shaped surface is erected on a mirror formed in an L-shaped surface to form two right-angled three-sided mirrors. Reflector. (2) A double-sided mirror perpendicular to the L-shaped surface is erected on a mirror formed on the L-shaped surface to form two sets of right-angled three-sided mirrors, and these two sets of right-angled three-sided mirrors are used as a pair to form four collective right-angled mirrors. A reflecting mirror for a laser interferometer characterized by forming a three-sided mirror.
JP1988161029U 1988-12-12 1988-12-12 Reflector for laser interferometer Expired - Lifetime JPH067290Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988161029U JPH067290Y2 (en) 1988-12-12 1988-12-12 Reflector for laser interferometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988161029U JPH067290Y2 (en) 1988-12-12 1988-12-12 Reflector for laser interferometer

Publications (2)

Publication Number Publication Date
JPH0281407U true JPH0281407U (en) 1990-06-22
JPH067290Y2 JPH067290Y2 (en) 1994-02-23

Family

ID=31443617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988161029U Expired - Lifetime JPH067290Y2 (en) 1988-12-12 1988-12-12 Reflector for laser interferometer

Country Status (1)

Country Link
JP (1) JPH067290Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009041921A (en) * 2007-08-06 2009-02-26 Mitsutoyo Corp Fine shape measuring device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5411888U (en) * 1977-06-27 1979-01-25
JPS63241306A (en) * 1986-11-05 1988-10-06 Fuji Electric Co Ltd Interferometer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5411888U (en) * 1977-06-27 1979-01-25
JPS63241306A (en) * 1986-11-05 1988-10-06 Fuji Electric Co Ltd Interferometer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009041921A (en) * 2007-08-06 2009-02-26 Mitsutoyo Corp Fine shape measuring device

Also Published As

Publication number Publication date
JPH067290Y2 (en) 1994-02-23

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term