JPH0281407U - - Google Patents

Info

Publication number
JPH0281407U
JPH0281407U JP16102988U JP16102988U JPH0281407U JP H0281407 U JPH0281407 U JP H0281407U JP 16102988 U JP16102988 U JP 16102988U JP 16102988 U JP16102988 U JP 16102988U JP H0281407 U JPH0281407 U JP H0281407U
Authority
JP
Japan
Prior art keywords
sided
mirror
angled
shaped surface
mirrors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16102988U
Other languages
English (en)
Other versions
JPH067290Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988161029U priority Critical patent/JPH067290Y2/ja
Publication of JPH0281407U publication Critical patent/JPH0281407U/ja
Application granted granted Critical
Publication of JPH067290Y2 publication Critical patent/JPH067290Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Description

【図面の簡単な説明】
第１図、第２図は本考案に係るレーザ干渉計用
反射鏡の斜視図、第３図、第４図は本考案に係る
レーザ干渉計用反射鏡に関する説明図、第５図は
従来のレーザ干渉計用反射鏡の斜視図、第６図、
第７図は従来のレーザ干渉計用反射鏡に関する説
明図である。 ２０……誤差低減領域、２２，２４……基準点
、２５……レーザ干渉計用反射鏡、２６，３５，
３７……Ｌ字面鏡、２８，３６，３８……両面鏡
、３０，３２……直角３面鏡、３３……レーザ干
渉計用反射鏡、３４……座標測定可能範囲。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) Ｌ字面に形成された鏡にＬ字面と直交する
    両面鏡を立設して２連の直角３面鏡に形成したこ
    とを特徴とするレーザ干渉計用反射鏡。 (2) Ｌ字面に形成された鏡にＬ字面と直交する
    両面鏡を立設して２連の直角３面鏡を形成し、こ
    の２連の直角３面鏡を一対として４個の集合直角
    ３面鏡を形成したことを特徴とするレーザ干渉計
    用反射鏡。
JP1988161029U 1988-12-12 1988-12-12 レーザ干渉計用反射鏡 Expired - Lifetime JPH067290Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988161029U JPH067290Y2 (ja) 1988-12-12 1988-12-12 レーザ干渉計用反射鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988161029U JPH067290Y2 (ja) 1988-12-12 1988-12-12 レーザ干渉計用反射鏡

Publications (2)

Publication Number Publication Date
JPH0281407U true JPH0281407U (ja) 1990-06-22
JPH067290Y2 JPH067290Y2 (ja) 1994-02-23

Family

ID=31443617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988161029U Expired - Lifetime JPH067290Y2 (ja) 1988-12-12 1988-12-12 レーザ干渉計用反射鏡

Country Status (1)

Country Link
JP (1) JPH067290Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009041921A (ja) * 2007-08-06 2009-02-26 Mitsutoyo Corp 微細形状測定装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5411888U (ja) * 1977-06-27 1979-01-25
JPS63241306A (ja) * 1986-11-05 1988-10-06 Fuji Electric Co Ltd 干渉計

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5411888U (ja) * 1977-06-27 1979-01-25
JPS63241306A (ja) * 1986-11-05 1988-10-06 Fuji Electric Co Ltd 干渉計

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009041921A (ja) * 2007-08-06 2009-02-26 Mitsutoyo Corp 微細形状測定装置

Also Published As

Publication number Publication date
JPH067290Y2 (ja) 1994-02-23

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term