JPH0282042U - - Google Patents

Info

Publication number
JPH0282042U
JPH0282042U JP16285888U JP16285888U JPH0282042U JP H0282042 U JPH0282042 U JP H0282042U JP 16285888 U JP16285888 U JP 16285888U JP 16285888 U JP16285888 U JP 16285888U JP H0282042 U JPH0282042 U JP H0282042U
Authority
JP
Japan
Prior art keywords
photomask
container
vent hole
storage container
case body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16285888U
Other languages
Japanese (ja)
Other versions
JP2517936Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988162858U priority Critical patent/JP2517936Y2/en
Publication of JPH0282042U publication Critical patent/JPH0282042U/ja
Application granted granted Critical
Publication of JP2517936Y2 publication Critical patent/JP2517936Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図および第２図は本考案のフオトマスク又
はフオトマスク用基板の収納容器の１実施例であ
る平置用１枚入り容器の例を示し、第１図は平面
図、第２図は第１図の−線に沿う断面図、第
３図は従来のフオトマスク収納容器の断面図、第
４図は従来のフオトマスク用吸湿体の斜視図であ
る。 ３１……フオトマスク又はフオトマスク用基板
の収納容器、３２……蓋体、３３……ケース本体
、３５……フオトマスク又はフオトマスク用基板
、３６……通気孔、３７……マイクロポーラスな
フイルム、３９……箱体、４０……乾燥材。 1 and 2 show an example of a single-sheet container for horizontal placement, which is an embodiment of the storage container for photomasks or photomask substrates of the present invention. FIG. 1 is a plan view, and FIG. 3 is a sectional view of a conventional photomask storage container, and FIG. 4 is a perspective view of a conventional moisture absorbent for a photomask. 31... Storage container for photomask or photomask substrate, 32... Lid, 33... Case body, 35... Photomask or photomask substrate, 36... Ventilation hole, 37... Microporous film, 39... Box body, 40...Dried material.

Claims (1)

【実用新案登録請求の範囲】 (1) ケース本体と蓋体からなり、これらケース
本体と蓋体の間にフオトマスク又はフオトマスク
用基板が収納される容器において、ケース本体ま
たは蓋体の一部に形成される通気孔と、該通気孔
に設けられるマイクロポーラスなフイルムと、前
記通気孔を覆うように取付けられる乾燥材入りの
箱体または袋体とを有することを特徴とするフオ
トマスク又はフオトマスク用基板の収納容器。 (2) 前記マイクロポーラスなフイルムがポリプ
ロピレンシートであることを特徴とする請求項１
記載のフオトマスク又はフオトマスク用基板の収
納容器。 (3) 前記容器が平置用１枚入り容器または縦置
多数枚入り容器であることを特徴とする請求項１
記載または請求項２に記載のフオトマスク又はフ
オトマスク用基板の収納容器。[Scope of Claim for Utility Model Registration] (1) In a container consisting of a case body and a lid body, in which a photomask or a photomask substrate is stored between the case body and the lid body, a container formed on a part of the case body or lid body. A photomask or a substrate for a photomask, comprising a vent hole, a microporous film provided in the vent hole, and a box or bag containing desiccant material attached to cover the vent hole. storage container. (2) Claim 1, wherein the microporous film is a polypropylene sheet.
A storage container for the photomask or photomask substrate described above. (3) Claim 1, characterized in that the container is a single-piece container for horizontal placement or a multi-piece container for vertical placement.
A storage container for a photomask or a photomask substrate according to claim 2.
JP1988162858U 1988-12-15 1988-12-15 Storage container for photomask or photomask substrate Expired - Lifetime JP2517936Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988162858U JP2517936Y2 (en) 1988-12-15 1988-12-15 Storage container for photomask or photomask substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988162858U JP2517936Y2 (en) 1988-12-15 1988-12-15 Storage container for photomask or photomask substrate

Publications (2)

Publication Number Publication Date
JPH0282042U true JPH0282042U (en) 1990-06-25
JP2517936Y2 JP2517936Y2 (en) 1996-11-20

Family

ID=31447069

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988162858U Expired - Lifetime JP2517936Y2 (en) 1988-12-15 1988-12-15 Storage container for photomask or photomask substrate

Country Status (1)

Country Link
JP (1) JP2517936Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007091296A (en) * 2005-09-29 2007-04-12 Hoya Corp Mask blank storage container, mask blank storage method and mask blank storage body

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6290381U (en) * 1985-11-26 1987-06-09
JPS6334273U (en) * 1986-04-07 1988-03-05

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6290381U (en) * 1985-11-26 1987-06-09
JPS6334273U (en) * 1986-04-07 1988-03-05

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007091296A (en) * 2005-09-29 2007-04-12 Hoya Corp Mask blank storage container, mask blank storage method and mask blank storage body

Also Published As

Publication number Publication date
JP2517936Y2 (en) 1996-11-20

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