JPH0282205A - Method for manufacturing optical waveguide body - Google Patents
Method for manufacturing optical waveguide bodyInfo
- Publication number
- JPH0282205A JPH0282205A JP23457288A JP23457288A JPH0282205A JP H0282205 A JPH0282205 A JP H0282205A JP 23457288 A JP23457288 A JP 23457288A JP 23457288 A JP23457288 A JP 23457288A JP H0282205 A JPH0282205 A JP H0282205A
- Authority
- JP
- Japan
- Prior art keywords
- optical waveguide
- substrate
- mold
- optical
- waveguide body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims description 62
- 238000004519 manufacturing process Methods 0.000 title claims description 21
- 238000000034 method Methods 0.000 title claims description 12
- 239000000758 substrate Substances 0.000 claims description 31
- 238000001746 injection moulding Methods 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 12
- 239000011347 resin Substances 0.000 claims description 10
- 229920005989 resin Polymers 0.000 claims description 10
- 238000000465 moulding Methods 0.000 claims description 4
- 239000011241 protective layer Substances 0.000 claims description 4
- 239000013307 optical fiber Substances 0.000 description 6
- 239000013308 plastic optical fiber Substances 0.000 description 4
- 239000010408 film Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- IIXADVXWTNTNQF-UHFFFAOYSA-N 2-methylprop-2-enoic acid;prop-1-enylbenzene Chemical compound CC(=C)C(O)=O.CC=CC1=CC=CC=C1 IIXADVXWTNTNQF-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 229920001893 acrylonitrile styrene Polymers 0.000 description 1
- 150000004770 chalcogenides Chemical class 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- SCUZVMOVTVSBLE-UHFFFAOYSA-N prop-2-enenitrile;styrene Chemical compound C=CC#N.C=CC1=CC=CC=C1 SCUZVMOVTVSBLE-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Optical Integrated Circuits (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、チャネル形の先導波路が基板に一体的に設け
られている光導波路体の製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of manufacturing an optical waveguide body in which a channel-shaped leading waveguide is integrally provided on a substrate.
本発明は、上記の様な光導波路体の製造方法において、
形成すべき光導波路のパターンの溝を有する基板を射出
成形で形成し、この溝へ樹脂を充填して光導波路を形成
することによって、品質が高く、取扱いも容易で、厚膜
光導波路を有する先導波路体をも効率的に製造すること
ができる様にしたものである。The present invention provides a method for manufacturing an optical waveguide body as described above.
By injection molding a substrate having grooves in the pattern of the optical waveguide to be formed, and filling the grooves with resin to form the optical waveguide, a high-quality, easy-to-handle, thick-film optical waveguide can be formed. This makes it possible to efficiently manufacture the leading waveguide body.
光導波路体は、光フアイバ同士の間や光ファイバと受発
光素子との間等に挿入されて導波光の分岐や合流等を行
う光カプラ等として用いられている。An optical waveguide body is inserted between optical fibers or between an optical fiber and a light receiving/emitting element, and is used as an optical coupler or the like to branch or merge guided light.
一方、光ファイバを材料面から分類すると、ガラス系光
ファイバとプラスチック系光ファイバとに大別される。On the other hand, when optical fibers are classified from the viewpoint of materials, they are broadly divided into glass optical fibers and plastic optical fibers.
プラスチック系光ファイバは、ガラス系光ファイバに比
べて、口径を大きく （例えば１００μｍ〜１０００μ
ｍ程度）して開口数を大きくできるという利点を有して
いる。Plastic optical fibers have a larger diameter than glass optical fibers (for example, 100 μm to 1000 μm).
It has the advantage that the numerical aperture can be increased by increasing the numerical aperture (approximately 100 m).
従って、プラスチック系光ファイバを用いてその利点を
生かすためには、光導波路体も大口径の光導波路を有し
ている必要がある。Therefore, in order to take advantage of the advantages of plastic optical fibers, the optical waveguide body must also have a large-diameter optical waveguide.
このため、高分子材料、ガラス、カルコゲナイド、Ｌｉ
Ｎｂ０．、ＺｎＯ等を用い、基板に対するスピンコーテ
ィング、熱蒸着、スパフタリング、ＣＶＤ、重合、熱拡
散、イオン交換、イオン注入等を行って、所望パターン
の薄膜先導波路を形成した従来公知の光導波路体は、プ
ラスチック光ファイバに利用することができない。For this reason, polymer materials, glass, chalcogenide, Li
Nb0. , ZnO, etc., and perform spin coating, thermal evaporation, sputtering, CVD, polymerization, thermal diffusion, ion exchange, ion implantation, etc. on a substrate to form a thin film guiding waveguide with a desired pattern. cannot be used for plastic optical fibers.
そこで本出願人は、射出成形装置の一方の型に透明基板
を収容し、型締めによってこの基板の表面と他方の型の
表面とで形成され所望の光導波路パターンを有するキャ
ビティ内へ基板よりも屈折率の高い透明樹脂を射出して
、厚膜光導波路を有する光導波路体を製造する方法を、
特願昭６２２２９６３８号として既に提案した。Therefore, the present applicant accommodates a transparent substrate in one mold of an injection molding apparatus, and by clamping the mold, the substrate is inserted into a cavity formed by the surface of this substrate and the surface of the other mold and having a desired optical waveguide pattern. A method for manufacturing an optical waveguide body having a thick film optical waveguide by injecting a transparent resin with a high refractive index,
It has already been proposed in Japanese Patent Application No. 62229638.
しかし上述の方法では、先導波路が基板上で盛り上がっ
ているりソジ光導波路が形成されてしまう。従って、光
導波路が破損し易く、この様な光導波路体は品質が高く
ない。また、ハウジングへの収納等の取扱いも容易でな
い。However, in the above method, the leading waveguide is raised on the substrate or a solid optical waveguide is formed. Therefore, the optical waveguide is easily damaged, and such an optical waveguide body is not of high quality. Moreover, handling such as storing it in a housing is not easy.
これらに対しては、光導波路体の表面が平坦になる様に
光導波路を保護層で覆えばよいが、それだけ製造工程が
増加して製造コストが高くなる。To solve these problems, the optical waveguide may be covered with a protective layer so that the surface of the optical waveguide body becomes flat, but this increases the number of manufacturing steps and increases the manufacturing cost.
本発明による光導波路体の製造方法は、形成すべき光導
波路１２のパターンの４３ａを有する基板３を透光性の
第１の樹脂の射出成形で形成する工程と、前記第１の樹
脂よりも屈折率の高い透光性の第２の樹脂１１を前記溝
３ａへ充填して前記光導波路１２を形成する工程とを夫
々具備している。The method for manufacturing an optical waveguide body according to the present invention includes a step of forming a substrate 3 having a pattern 43a of the optical waveguide 12 to be formed by injection molding of a transparent first resin; and a step of filling the groove 3a with a light-transmitting second resin 11 having a high refractive index to form the optical waveguide 12.
本発明による光導波路体の製造方法では、形成すべき光
導波路１２のパターンの溝３ａを有する基板３を射出成
形で形成し、この溝３ａへ樹脂１１を充填して先導波路
１２を形成しているので、先導波路１２のパターンの現
れている面が平坦な光導波路体を製造することができる
。In the method for manufacturing an optical waveguide body according to the present invention, a substrate 3 having a groove 3a having a pattern of an optical waveguide 12 to be formed is formed by injection molding, and the groove 3a is filled with resin 11 to form a leading waveguide 12. Therefore, it is possible to manufacture an optical waveguide body in which the surface on which the pattern of the guide waveguide 12 appears is flat.
以下、本発明の第１〜第３実施例を、第１図〜第３図を
参照しながら説明する。Hereinafter, first to third embodiments of the present invention will be described with reference to FIGS. 1 to 3.
第１図が、第１実施例を示している。この第１実施例で
は、第１Ａ図に示す様な射出成形用の一対の金型ｌ、２
をまず準備する。金型ｌには、形成すべき先導波路のパ
ターンに対応する凸部１ａが設けられており、金型２に
は、矩形の凹部２ａが設けられている。FIG. 1 shows a first embodiment. In this first embodiment, a pair of injection molds l and 2 as shown in FIG. 1A are used.
Prepare first. The mold 1 is provided with a convex portion 1a corresponding to the pattern of the leading waveguide to be formed, and the mold 2 is provided with a rectangular concave portion 2a.
この第１実施例で製造する光導波路体は２：１の光分岐
・合流用であり、従って、凸部１ａのパターンはＹ字型
である。The optical waveguide body manufactured in this first embodiment is for 2:1 optical branching and merging, and therefore the pattern of the convex portions 1a is Y-shaped.
この様な金型１．２を用いて射出成形を行い、金型１．
２を開いて成形品を取り出すと、第１Ｂ図に示す様に、
光導波路のパターンの溝３ａを有する基板３が得られる
。Injection molding is performed using such a mold 1.2.
When opening 2 and taking out the molded product, as shown in Figure 1B,
A substrate 3 having grooves 3a in an optical waveguide pattern is obtained.
次に、第１Ｃ図に示す様に、基板３の外周と同一形状の
四部を有する型４内へ基板３を挿入し、この基板３自体
を下型として、紫外線硬化型等の樹脂１１を溝３ａ内へ
注入して固化させる注型成形を行う。Next, as shown in FIG. 1C, the substrate 3 is inserted into a mold 4 having four parts having the same shape as the outer periphery of the substrate 3, and using the substrate 3 itself as a lower mold, a resin 11 such as an ultraviolet curing type is placed in a groove. Cast molding is performed by injecting into 3a and solidifying.
その後、型４から基板３を取り出すと、第１Ｄ図に示す
様に、溝３ａの部分に光導波路１２が形成された先導波
路体が得られる。Thereafter, when the substrate 3 is taken out from the mold 4, a guide waveguide body is obtained in which the optical waveguide 12 is formed in the groove 3a, as shown in FIG. 1D.
なお、第１Ａ図の工程で基板３を射出成形した時点でこ
の基板３を金型２から取り出さず、この金型２をそのま
ま型４の代りに用いてもよい。Incidentally, the substrate 3 may not be taken out from the mold 2 after injection molding in the step shown in FIG. 1A, and the mold 2 may be used as it is instead of the mold 4.
第２図は、第２実施例を示している。この第２実施例は
、光導波路１２をも射出成形で形成することを除いて、
上述の第１実施例と実質的に同様の工程を有している。FIG. 2 shows a second embodiment. This second embodiment has the following features, except that the optical waveguide 12 is also formed by injection molding.
This embodiment has substantially the same steps as the first embodiment described above.
即ち、第１Ａ図の工程が終了すると、金型２と略同−形
状の金型６内へ基板３を挿入し、平板状の金型５を金型
１の代りに用いて、射出成形を行う。That is, when the process shown in FIG. 1A is completed, the substrate 3 is inserted into a mold 6 having approximately the same shape as the mold 2, and injection molding is performed using a flat mold 5 instead of the mold 1. conduct.
この様な第２実施例でも、上述の第１実施例と同様に、
第１Ｄ図に示す様な光導波路体が得られる。In such a second embodiment, similarly to the above-mentioned first embodiment,
An optical waveguide body as shown in FIG. 1D is obtained.
なお、この第２実施例でも、第１Ａ図の工程で基板３を
射出成形した時点でこの基板３を金型２から取り出さず
、この金型２をそのまま金型６の代りに用い、金型１の
みを金型５に取り代えて射出成形を行うという、いわゆ
る２色成形を行ってもよい。In this second embodiment as well, the substrate 3 is not taken out from the mold 2 after injection molding in the process shown in FIG. 1A, but the mold 2 is used as it is in place of the mold 6, and So-called two-color molding may be performed in which injection molding is performed by replacing only mold 1 with mold 5.
この様な２色成形を行えば、より高い精度の光導波路体
をより高い生産性で製造することができる。If such two-color molding is performed, it is possible to manufacture an optical waveguide body with higher precision and higher productivity.
ところで、以上の様な第１及び第２実施例の何れにおい
ても、基板３及び光導波路１２の材料としては、透光性
の樹脂であれば特に制限はないが、光導波路体の性質上
、基板３の屈折率よりも先導波路体１２の屈折率の方が
常に高くなければならない。By the way, in both the first and second embodiments as described above, there is no particular restriction on the material of the substrate 3 and the optical waveguide 12 as long as it is a transparent resin, but due to the nature of the optical waveguide body, The refractive index of the guiding waveguide body 12 must always be higher than the refractive index of the substrate 3.
通常の光ファイバでは開口数が０．５程度であるので、
光導波路１２の開口数もこれに近い値にするには、基板
３及び光導波路１２の屈折率を夫々ｎ１及びｎ２とした
とき、
ｎ 、 ｎ 、 ２ ＃０ 、５
となる様に基板３及び光導波路１２の材料を選択すれば
よい。Since the numerical aperture of a normal optical fiber is about 0.5,
In order to make the numerical aperture of the optical waveguide 12 close to this value, the substrate 3 and the optical waveguide 12 should be set so that n, n, 2 #0, 5, where the refractive index of the substrate 3 and the optical waveguide 12 are n1 and n2, respectively. The material of the optical waveguide 12 may be selected.
例えば、基板３の材料として屈折率が１．４９のアクリ
ル樹脂を用いると、先導波路１２の材料としては屈折率
が１．５５〜１．６の範囲のポリカーボネート樹脂、ポ
リスチレン、メタクリル酸メチルスチレン共重合体、ア
クリロニトリル−スチレン共重合体等を用いることがで
きる。For example, if acrylic resin with a refractive index of 1.49 is used as the material for the substrate 3, the material for the leading waveguide 12 may be polycarbonate resin, polystyrene, methylstyrene methacrylate, etc., with a refractive index in the range of 1.55 to 1.6. Polymers, acrylonitrile-styrene copolymers, etc. can be used.
第３図は、第３実施例で製造した光導波路体を示してい
る。この第３実施例は、第１または第２実施例の工程に
引き続き、基板３のうちで光導波路１２のパターンが現
れている面に保護層１０を形成する工程を有している。FIG. 3 shows an optical waveguide body manufactured in the third example. The third embodiment includes a step of forming a protective layer 10 on the surface of the substrate 3 on which the pattern of the optical waveguide 12 is exposed, following the steps of the first or second embodiment.
保護層１０の材料としては、光導波路１２の材料により
も屈折率の低いものを用いる必要がある。As the material of the protective layer 10, it is necessary to use a material with a refractive index lower than that of the material of the optical waveguide 12.
従って、基板３と同一の材料を用いることが好ましいが
、必ずしもこれには限定されない。Therefore, it is preferable to use the same material as the substrate 3, but the material is not necessarily limited to this.
以上の第１〜第３実施例は何れも２：１の光分岐・合流
器の製造に本発明を適用したものであるが、任意の分岐
数（ｎ ： ｍ）の光分岐・合流器の製造にも本発明を
適用することができる。In the first to third embodiments described above, the present invention is applied to the production of a 2:1 optical branch/combiner, but the present invention can be applied to the manufacture of an optical branch/combiner with an arbitrary number of branches (n:m). The present invention can also be applied to manufacturing.
また、光分岐・合流器以外に、受発光素子、レンズグレ
ーティング、スイッチング素子等を組み込んだいわゆる
光回路部品全般に係る光導波路体の製造にも本発明を適
用することができる。Furthermore, the present invention can also be applied to the manufacture of optical waveguide bodies related to so-called optical circuit components in general that incorporate light receiving/emitting elements, lens gratings, switching elements, etc. in addition to optical branching/combining devices.
本発明による先導波路体の製造方法では、光導波路のパ
ターンの現れている面が平坦な光導波路体を製造するこ
とができるので、光導波路が破損しにくくて品質が高く
、取扱いも容易な先導波路体を製造することができる。In the method for manufacturing a guiding waveguide body according to the present invention, it is possible to manufacture an optical waveguide body in which the surface on which the optical waveguide pattern appears is flat. A corrugated body can be manufactured.
また、溝を有する基板を射出成形で形成しているので、
厚膜光導波路を有する先導波路体をも効率的に製造する
ことができる。In addition, since the substrate with grooves is formed by injection molding,
A guide waveguide body having a thick film optical waveguide can also be efficiently manufactured.
第１図は本発明の第１実施例を順次に示す斜視図、第２
図は第２実施例の一部を示す斜視図、第３図は第３実施
例によって製造した光導波路体の斜視図である。
なお図面に用いた符号において、
・・−・・−・基板
ａ
・・・・・−・・・−・−溝
樹脂
光導波路
である。
代
理
人
土
屋
勝
第ＪＡ図
第１Ｂ図
第２図
先導波路体
第３５９1 is a perspective view sequentially showing a first embodiment of the present invention; FIG.
The figure is a perspective view showing a part of the second embodiment, and FIG. 3 is a perspective view of an optical waveguide body manufactured according to the third embodiment. In addition, in the reference numerals used in the drawings, . . . substrate a . . . groove resin optical waveguide. Agent Masaru Tsuchiya Figure 1B Figure 2 Leading wave body No. 359
Claims (1)
透光性の第１の樹脂の射出成形で形成する工程と、 前記第１の樹脂よりも屈折率の高い透光性の第２の樹脂
を前記溝へ充填して前記光導波路を形成する工程とを夫
々具備する光導波路体の製造方法。 ２、前記基板を下型とする注型成形によって前記溝に前
記光導波路を形成する請求項１記載の光導波路体の製造
方法。 ３、前記溝を金型で覆い、射出成形によって前記溝に前
記光導波路を形成する請求項１記載の光導波路体の製造
方法。 ４、前記基板の射出成形時における第１の金型にこの基
板を挿入したまま前記溝を第２の金型で覆い、射出成形
によって前記溝に前記光導波路を形成する請求項１また
は３記載の光導波路体の製造方法。 ５、前記基板のうちで前記光導波路のパターンが現れて
いる面に、前記光導波路の材料よりも屈折率の低い材料
で保護層を形成する工程を更に具備する請求項１〜４の
何れか一項に記載の光導波路体の製造方法。[Claims] 1. A step of forming a substrate having grooves in a pattern of an optical waveguide to be formed by injection molding of a first transparent resin; and forming the optical waveguide by filling the groove with a second optical resin. 2. The method of manufacturing an optical waveguide body according to claim 1, wherein the optical waveguide is formed in the groove by cast molding using the substrate as a lower mold. 3. The method of manufacturing an optical waveguide body according to claim 1, wherein the groove is covered with a mold and the optical waveguide is formed in the groove by injection molding. 4. According to claim 1 or 3, the groove is covered with a second mold while the substrate is inserted into a first mold during injection molding of the substrate, and the optical waveguide is formed in the groove by injection molding. A method for manufacturing an optical waveguide body. 5. Any one of claims 1 to 4, further comprising the step of forming a protective layer on a surface of the substrate on which the pattern of the optical waveguide appears, using a material having a lower refractive index than the material of the optical waveguide. 1. A method for manufacturing an optical waveguide body according to item 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23457288A JPH0282205A (en) | 1988-09-19 | 1988-09-19 | Method for manufacturing optical waveguide body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23457288A JPH0282205A (en) | 1988-09-19 | 1988-09-19 | Method for manufacturing optical waveguide body |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0282205A true JPH0282205A (en) | 1990-03-22 |
Family
ID=16973118
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23457288A Pending JPH0282205A (en) | 1988-09-19 | 1988-09-19 | Method for manufacturing optical waveguide body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0282205A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002098851A (en) * | 2000-09-21 | 2002-04-05 | Sony Corp | Method for manufacturing optical bus member and optical bus device |
-
1988
- 1988-09-19 JP JP23457288A patent/JPH0282205A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002098851A (en) * | 2000-09-21 | 2002-04-05 | Sony Corp | Method for manufacturing optical bus member and optical bus device |
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