JPH0282735U - - Google Patents
Info
- Publication number
- JPH0282735U JPH0282735U JP16039288U JP16039288U JPH0282735U JP H0282735 U JPH0282735 U JP H0282735U JP 16039288 U JP16039288 U JP 16039288U JP 16039288 U JP16039288 U JP 16039288U JP H0282735 U JPH0282735 U JP H0282735U
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- supply device
- material supply
- mass flow
- flow meter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims description 8
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims 1
- 239000013307 optical fiber Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Glass Melting And Manufacturing (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Description
第１図は本考案の原料供給装置の概略図、第２
図は従来の原料供給装置の概略図を示す。
図中、１は原材料（ＳｉＣ１４）、２は原料タ
ンク、３は配管、４は質量流量計、５はガスライ
ンフイルタを示す。
Figure 1 is a schematic diagram of the raw material supply device of the present invention, Figure 2
The figure shows a schematic diagram of a conventional raw material supply device. In the figure, 1 is a raw material (SiC1 4 ), 2 is a raw material tank, 3 is piping, 4 is a mass flow meter, and 5 is a gas line filter.
Claims (1)
して原料ガスとし、質量流量計を経て反応系に供
給する光フアイバ用原料供給装置において、原料
タンクと質量流量計の間にフツ素樹脂或いはフロ
ロカーボン製で且つ０．３μｍ以下の目径を有す
るガスラインフイルタを設置したことを特徴とす
る原料供給装置。 In an optical fiber raw material supply device that heats the liquefied raw material in the raw material tank to increase its vapor pressure and supplies it to the reaction system via a mass flow meter, a fluororesin or A raw material supply device characterized in that a gas line filter made of fluorocarbon and having a diameter of 0.3 μm or less is installed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16039288U JPH0282735U (en) | 1988-12-12 | 1988-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16039288U JPH0282735U (en) | 1988-12-12 | 1988-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0282735U true JPH0282735U (en) | 1990-06-26 |
Family
ID=31442418
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16039288U Pending JPH0282735U (en) | 1988-12-12 | 1988-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0282735U (en) |
-
1988
- 1988-12-12 JP JP16039288U patent/JPH0282735U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS63195550U (en) | ||
| JPS6370649U (en) | ||
| JPS63166799U (en) | ||
| JPH0363849U (en) | ||
| JPS637341U (en) | ||
| JPH0224352U (en) | ||
| JPH0295599U (en) | ||
| JPS5956474U (en) | tube inverter | |
| JPS6227299U (en) | ||
| JPH0410209U (en) | ||
| JPS63185537U (en) | ||
| JPS61155018U (en) | ||
| JPS61161482U (en) | ||
| JPS6138391U (en) | Air system piping for water pressure control unit | |
| JPH01151021U (en) | ||
| JPH0189733U (en) | ||
| JPS6245533U (en) | ||
| JPS6140134U (en) | gas generator | |
| JPS62145131U (en) | ||
| JPH02126068U (en) | ||
| JPS6344131U (en) | ||
| JPS62199594U (en) | ||
| JPH01102137U (en) | ||
| JPS646484U (en) | ||
| JPS60128964U (en) | Carburetor fuel supply system |