JPH0282735U - - Google Patents

Info

Publication number
JPH0282735U
JPH0282735U JP16039288U JP16039288U JPH0282735U JP H0282735 U JPH0282735 U JP H0282735U JP 16039288 U JP16039288 U JP 16039288U JP 16039288 U JP16039288 U JP 16039288U JP H0282735 U JPH0282735 U JP H0282735U
Authority
JP
Japan
Prior art keywords
raw material
supply device
material supply
mass flow
flow meter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16039288U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16039288U priority Critical patent/JPH0282735U/ja
Publication of JPH0282735U publication Critical patent/JPH0282735U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)

Description

【図面の簡単な説明】
第１図は本考案の原料供給装置の概略図、第２
図は従来の原料供給装置の概略図を示す。 図中、１は原材料（ＳｉＣ１４）、２は原料タ
ンク、３は配管、４は質量流量計、５はガスライ
ンフイルタを示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. 原料タンクの液化原料を加熱して蒸気圧を高く
    して原料ガスとし、質量流量計を経て反応系に供
    給する光フアイバ用原料供給装置において、原料
    タンクと質量流量計の間にフツ素樹脂或いはフロ
    ロカーボン製で且つ０．３μｍ以下の目径を有す
    るガスラインフイルタを設置したことを特徴とす
    る原料供給装置。
JP16039288U 1988-12-12 1988-12-12 Pending JPH0282735U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16039288U JPH0282735U (ja) 1988-12-12 1988-12-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16039288U JPH0282735U (ja) 1988-12-12 1988-12-12

Publications (1)

Publication Number Publication Date
JPH0282735U true JPH0282735U (ja) 1990-06-26

Family

ID=31442418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16039288U Pending JPH0282735U (ja) 1988-12-12 1988-12-12

Country Status (1)

Country Link
JP (1) JPH0282735U (ja)

Similar Documents

Publication Publication Date Title
JPS63195550U (ja)
JPS6370649U (ja)
JPS63166799U (ja)
JPH0363849U (ja)
JPS637341U (ja)
JPH0224352U (ja)
JPH0295599U (ja)
JPS5956474U (ja) チユ−ブ反転器
JPS6227299U (ja)
JPH0410209U (ja)
JPS63185537U (ja)
JPS61155018U (ja)
JPS61161482U (ja)
JPS6138391U (ja) 水圧制御ユニツト用エア系管路
JPH01151021U (ja)
JPH0189733U (ja)
JPS6245533U (ja)
JPS6140134U (ja) ガス発生装置
JPS62145131U (ja)
JPH02126068U (ja)
JPS6344131U (ja)
JPS62199594U (ja)
JPH01102137U (ja)
JPS646484U (ja)
JPS60128964U (ja) 気化器の燃料供給装置