JPH028355Y2 - - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to a multipolar electrode that is optimal for use in an electrostatic deflector such as an electron beam exposure apparatus.

In electron beam exposure equipment, etc., it is necessary to deflect the electron beam at high speed and precisely.Recently, as a deflector for this purpose, a plurality of electrodes located at the same distance from the optical axis are alternately arranged such as an X-direction deflection electrode, a Y-direction deflection electrode, and a Y-direction deflection electrode. The X direction deflection electrode and the Y direction deflection electrode are
A system has been proposed in which aberrations are reduced over a wide range by arranging the aberrations in a symmetrical position with respect to an axis located at an angle of 45 degrees from the Y axis (see Japanese Patent Laid-Open No. 57-202630).

The purpose of the present invention is to provide a specific multipolar electrode that is optimal for use in such an electrostatic deflector.

The present invention is a novel multipolar electrode made by combining two or more curved electrodes each having one or more teeth on the concave side into a hollow cylindrical shape by insulating the electrodes so that the teeth intersect with each other alternately. This is what we provide.

Figures 1a, b, and c are schematic diagrams of a multipolar electrode showing an embodiment of the present invention.The multipolar electrode has a hollow cylindrical shape as a whole, but it is shown in Figure 1a for convenience. Part of it is shown. Figure 1b is A of Figure 1a.
-A sectional view and FIG. 1c are BB sectional views of FIG. 1a, showing the entire circumference, respectively.

In the figure, 4a, 4b and 5a, 5b are electrode bodies created by dividing a cylindrical metal into two in the axial direction, and making an appropriate number of grooves at appropriate intervals in the axial direction on the inner surface of each divided piece. be. The electrode body is
As shown in FIG. 2 (4a is shown as an example), there are five teeth T ₁₁ , T ₁₂ , T ₁₃ , T ₁₄ , T ₁₅ , T ₂₁ , T having the same shape and appropriately spaced inside. _{twenty two} ,
T ₂₃ , T ₂₄ , T ₂₅ , T ₃₁ , T ₃₂ , T ₃₃ , T ₃₄ , T ₃₅ ,
They are made in exactly the same shape with T ₄₁ , T ₄₂ , T ₄₃ , T ₄₄ , and T ₄₅ , and 4a and 4b are insulators 6a and 6b
5a and 5b face each other via insulators 7a,
7b. And electrodes 5a, 5
B is turned upside down with respect to the electrodes 4a and 4b, and assembled via a ring-shaped insulator 8 so that the teeth 5a and 5b fit between the opposing teeth 4a and 4b. At this time, supporting ring-shaped insulators 9a and 9b are respectively fitted around the ends of the multipolar electrode in which the electrodes 4a, 4b and 5a, 5b are combined.

The thus assembled multipolar electrode is incorporated into the housing of an electron beam device such as an electron beam exposure device as a deflection electrode, and connected to a terminal (not shown) provided on the back of each electrode of the multipolar electrode. By applying an appropriate voltage from a voltage source (not shown) (for example, +X volts and -X volts to 4a and 4b, and +Y volts and -Y volts to 5a and 5b, respectively), the central part of the multipolar electrode The electron beam passing through is appropriately deflected.

In the above embodiment, a four-pole multipolar electrode is shown, but each electrode may be divided as appropriate to create another multipolar electrode. In this case, an insulator is inserted between each electrode.

According to the present invention, the electrode body is made by dividing two cylindrical metals into equal parts axially symmetrically, making grooves in the axial direction on the concave side of the divided parts, and then assembling the electrodes. Errors in electrode processing are extremely small, and errors in assembling each electrode are also extremely small, making it possible to precisely align the distance from the optical axis to each electrode and the distance between each electrode, making it ideal for electron beam exposure equipment. etc., it is possible to deflect an electron beam at high speed and precisely.

[Brief explanation of the drawing]

FIGS. 1a, b, and c are schematic views of a multipolar electrode according to an embodiment of the present invention, and FIG. 2 is a partially detailed view thereof. 4a, 4b, 5a, 5b: electrode, 6a, 6b,
7a, 7b: insulator; 8, 9a, 9b: ring-shaped insulator.

Claims (1)

[Scope of utility model registration request] A multipolar electrode made by combining two or more curved electrode bodies having one or more teeth on the concave side into a hollow cylindrical shape by insulating them so that the teeth alternately fit into each other.