JPH0284321U - - Google Patents
Info
- Publication number
- JPH0284321U JPH0284321U JP1988164701U JP16470188U JPH0284321U JP H0284321 U JPH0284321 U JP H0284321U JP 1988164701 U JP1988164701 U JP 1988164701U JP 16470188 U JP16470188 U JP 16470188U JP H0284321 U JPH0284321 U JP H0284321U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- reaction tube
- raw material
- material gas
- mocvd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988164701U JPH0284321U (af) | 1988-12-20 | 1988-12-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988164701U JPH0284321U (af) | 1988-12-20 | 1988-12-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0284321U true JPH0284321U (af) | 1990-06-29 |
Family
ID=31450542
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988164701U Pending JPH0284321U (af) | 1988-12-20 | 1988-12-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0284321U (af) |
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1988
- 1988-12-20 JP JP1988164701U patent/JPH0284321U/ja active Pending