JPH0284324U - - Google Patents
Info
- Publication number
- JPH0284324U JPH0284324U JP16487988U JP16487988U JPH0284324U JP H0284324 U JPH0284324 U JP H0284324U JP 16487988 U JP16487988 U JP 16487988U JP 16487988 U JP16487988 U JP 16487988U JP H0284324 U JPH0284324 U JP H0284324U
- Authority
- JP
- Japan
- Prior art keywords
- hangers
- carriers
- tank
- space
- etched
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000969 carrier Substances 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Weting (AREA)
Description
第１図は本考案の実施例１を示す断面図、第２
図は本考案の実施例２を示す断面図、第３図は従
来の処理槽を示す断面図、第４図はハンガーがキ
ヤリアを離した状態を示す図、第５図はチヤツク
した状態を示す図である。
１…薬液、２，３…処理槽、ａ…ハンガー全開
状態寸法、ｂ…キヤリアが入るための最小寸法、
ｃ…キヤリアをチヤツクしたときの最小寸法。
Fig. 1 is a sectional view showing the first embodiment of the present invention;
The figure is a cross-sectional view showing Embodiment 2 of the present invention, Figure 3 is a cross-sectional view of a conventional processing tank, Figure 4 is a diagram showing a state in which the hanger is released from the carrier, and Figure 5 is a diagram showing a state in which it is checked. It is a diagram. 1... Chemical solution, 2, 3... Processing tank, a... Hanger fully open size, b... Minimum size for carrier to enter,
c...Minimum dimensions when checking the carrier.
Claims (1)
投入、洗浄、エツチングする処理槽において、槽
内の上段に、少なくとも前記ハンガーの開閉に必
要な空間を確保し、下段の空間を前記キヤリアの
収納に必要な最小限の寸法としたことを特徴とす
る処理槽。 In a processing tank in which semiconductor substrates are loaded, cleaned, and etched by holding them together with carriers on hangers, at least the space necessary for opening and closing the hangers is secured in the upper part of the tank, and the space in the lower part is set aside for storing the carriers. A treatment tank characterized by having minimum dimensions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16487988U JPH0284324U (en) | 1988-12-20 | 1988-12-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16487988U JPH0284324U (en) | 1988-12-20 | 1988-12-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0284324U true JPH0284324U (en) | 1990-06-29 |
Family
ID=31450863
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16487988U Pending JPH0284324U (en) | 1988-12-20 | 1988-12-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0284324U (en) |
-
1988
- 1988-12-20 JP JP16487988U patent/JPH0284324U/ja active Pending
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