JPH029433U - - Google Patents
Info
- Publication number
- JPH029433U JPH029433U JP1988087169U JP8716988U JPH029433U JP H029433 U JPH029433 U JP H029433U JP 1988087169 U JP1988087169 U JP 1988087169U JP 8716988 U JP8716988 U JP 8716988U JP H029433 U JPH029433 U JP H029433U
- Authority
- JP
- Japan
- Prior art keywords
- spark
- ultraviolet
- ultraviolet detection
- intensity
- photomultiplier tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/0711—Apparatus therefor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/015—Manufacture or treatment of bond wires
- H10W72/01551—Changing the shapes of bond wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/0711—Apparatus therefor
- H10W72/07141—Means for applying energy, e.g. ovens or lasers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/075—Connecting or disconnecting of bond wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/075—Connecting or disconnecting of bond wires
- H10W72/07511—Treating the bonding area before connecting, e.g. by applying flux or cleaning
Landscapes
- Wire Bonding (AREA)
Description
第1図は本考案のワイヤボンダのスパーク制御
装置の実施例の構成図である。 1……光電子増倍管、2……駆動電源、3……
電流―電圧変換回路、5……紫外線検出電圧信号
、6……比較部、7……基準電圧信号、8……制
御増幅器、9……電力増幅器、10……スパーク
ジエネレータ、11……ワイヤ、12……キヤピ
ラリ、14……カツトクランプ、15……スパー
クロツド。
装置の実施例の構成図である。 1……光電子増倍管、2……駆動電源、3……
電流―電圧変換回路、5……紫外線検出電圧信号
、6……比較部、7……基準電圧信号、8……制
御増幅器、9……電力増幅器、10……スパーク
ジエネレータ、11……ワイヤ、12……キヤピ
ラリ、14……カツトクランプ、15……スパー
クロツド。
Claims (1)
- ワイヤボンダのボール形成時のスパークによつ
て生ずる紫外線を受け、その強さに対応する陰極
電流を流す光電子増倍管と;該光電子増倍管を駆
動する駆動電源と;前記の陰極電流を検出して紫
外線検出信号を出力する紫外線検出回路と;紫外
線検出信号を受け、そのレベルが、所定の紫外線
の強さに対応させて予め定められている設定レベ
ル値と同じになるまでスパークの電流を上昇また
は下降させるスパーク発生用電源回路と;を具備
することを特徴とするワイヤボンダのスパーク制
御装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988087169U JPH0451477Y2 (ja) | 1988-06-30 | 1988-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988087169U JPH0451477Y2 (ja) | 1988-06-30 | 1988-06-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH029433U true JPH029433U (ja) | 1990-01-22 |
| JPH0451477Y2 JPH0451477Y2 (ja) | 1992-12-03 |
Family
ID=31311791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988087169U Expired JPH0451477Y2 (ja) | 1988-06-30 | 1988-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0451477Y2 (ja) |
-
1988
- 1988-06-30 JP JP1988087169U patent/JPH0451477Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0451477Y2 (ja) | 1992-12-03 |
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