JPH0294381U - - Google Patents

Info

Publication number: JPH0294381U
Authority: JP; Japan
Prior art keywords: cryopanel; cryopump; pump case; conductive material; utility
Prior art date: 1989-01-11
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP119289U

Other languages

English (en)

Japanese (ja)

Other versions

JPH0415992Y2 (2

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1989-01-11

Filing date

1989-01-11

Publication date

1990-07-26

1989-01-11 Application filed filed Critical

1989-01-11 Priority to JP1989001192U priority Critical patent/JPH0415992Y2/ja

1990-07-26 Publication of JPH0294381U publication Critical patent/JPH0294381U/ja

1992-04-09 Application granted granted Critical

1992-04-09 Publication of JPH0415992Y2 publication Critical patent/JPH0415992Y2/ja

Status Expired legal-status Critical Current

Links

239000004020 conductor Substances 0.000 claims 1

Landscapes

Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

JP1989001192U 1989-01-11 1989-01-11 Expired JPH0415992Y2 (2)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP1989001192U JPH0415992Y2 (2)	1989-01-11	1989-01-11

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP1989001192U JPH0415992Y2 (2)	1989-01-11	1989-01-11

Publications (2)

Publication Number	Publication Date
JPH0294381U true JPH0294381U (2)	1990-07-26
JPH0415992Y2 JPH0415992Y2 (2)	1992-04-09

Family

ID=31200869

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP1989001192U Expired JPH0415992Y2 (2)	1989-01-11	1989-01-11

Country Status (1)

Country	Link
JP (1)	JPH0415992Y2 (2)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS606085A (ja) *	1983-06-23	1985-01-12	Arubatsuku Kuraio Kk	クライオポンプ装置

1989
- 1989-01-11 JP JP1989001192U patent/JPH0415992Y2/ja not_active Expired

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS606085A (ja) *	1983-06-23	1985-01-12	Arubatsuku Kuraio Kk	クライオポンプ装置

Also Published As

Publication number	Publication date
JPH0415992Y2 (2)	1992-04-09

Similar Documents

Publication	Publication Date	Title
JPH0278715U (2)	1990-06-18
JPH0294381U (2)	1990-07-26
JPH0270131U (2)	1990-05-28
JPH01154880U (2)	1989-10-25
JPH0311824U (2)	1991-02-06
JPH0325050U (2)	1991-03-14
JPH02117570U (2)	1990-09-20
JPS6159886U (2)	1986-04-22
JPH02125681U (2)	1990-10-16
JPH02125923U (2)	1990-10-17
JPH0344310U (2)	1991-04-24
JPS636378U (2)	1988-01-16
JPS6263402U (2)	1987-04-20
JPH0447137U (2)	1992-04-22
JPS62154243U (2)	1987-09-30
JPH0387984U (2)	1991-09-09
JPS6333018U (2)	1988-03-03
JPS63120062U (2)	1988-08-03
JPH0262111U (2)	1990-05-09
JPH0434476U (2)	1992-03-23
JPH0325125U (2)	1991-03-14
JPS62167013U (2)	1987-10-23
JPS6297316U (2)	1987-06-20
JPH02119979U (2)	1990-09-27
JPH02100829U (2)	1990-08-10