JPH0415992Y2 - - Google Patents

Info

Publication number
JPH0415992Y2
JPH0415992Y2 JP1989001192U JP119289U JPH0415992Y2 JP H0415992 Y2 JPH0415992 Y2 JP H0415992Y2 JP 1989001192 U JP1989001192 U JP 1989001192U JP 119289 U JP119289 U JP 119289U JP H0415992 Y2 JPH0415992 Y2 JP H0415992Y2
Authority
JP
Japan
Prior art keywords
cryopanel
cryopump
shield
argon
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1989001192U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0294381U (2
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989001192U priority Critical patent/JPH0415992Y2/ja
Publication of JPH0294381U publication Critical patent/JPH0294381U/ja
Application granted granted Critical
Publication of JPH0415992Y2 publication Critical patent/JPH0415992Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP1989001192U 1989-01-11 1989-01-11 Expired JPH0415992Y2 (2)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989001192U JPH0415992Y2 (2) 1989-01-11 1989-01-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989001192U JPH0415992Y2 (2) 1989-01-11 1989-01-11

Publications (2)

Publication Number Publication Date
JPH0294381U JPH0294381U (2) 1990-07-26
JPH0415992Y2 true JPH0415992Y2 (2) 1992-04-09

Family

ID=31200869

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989001192U Expired JPH0415992Y2 (2) 1989-01-11 1989-01-11

Country Status (1)

Country Link
JP (1) JPH0415992Y2 (2)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS606085A (ja) * 1983-06-23 1985-01-12 Arubatsuku Kuraio Kk クライオポンプ装置

Also Published As

Publication number Publication date
JPH0294381U (2) 1990-07-26

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