JPH0295232U - - Google Patents
Info
- Publication number
- JPH0295232U JPH0295232U JP398389U JP398389U JPH0295232U JP H0295232 U JPH0295232 U JP H0295232U JP 398389 U JP398389 U JP 398389U JP 398389 U JP398389 U JP 398389U JP H0295232 U JPH0295232 U JP H0295232U
- Authority
- JP
- Japan
- Prior art keywords
- lower cup
- cup
- spin chuck
- wafer
- skirt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Description
第１図はこの考案の一実施例を示す断面図、第
２図は第１図スピンチヤツク６の下方斜視図、第
３図はこの考案の他の実施例を示すフアンの斜視
図、第４図は従来のレジスト塗布装置の断面図で
ある。
図において、１は下カツプ、２は上カツプ、４
は駆動モータ、５は回転軸、６はスピンチヤツク
、７はスカート、１０はウエハ、１１はフアン、
１２は取付け用ビスである。なお各図中同一符号
は同一又は相当部分を示す。
Fig. 1 is a sectional view showing one embodiment of this invention, Fig. 2 is a lower perspective view of the spin chuck 6 of Fig. 1, Fig. 3 is a perspective view of a fan showing another embodiment of this invention, and Fig. 4. 1 is a sectional view of a conventional resist coating device. In the figure, 1 is the lower cup, 2 is the upper cup, and 4 is the lower cup.
is a drive motor, 5 is a rotating shaft, 6 is a spin chuck, 7 is a skirt, 10 is a wafer, 11 is a fan,
12 is a mounting screw. Note that the same reference numerals in each figure indicate the same or equivalent parts.
Claims (1)
の開口側を覆い処理液を吐出するノズルが取付ら
れた上カツプ、上記下カツプを貫通して上記下カ
ツプ内に突出する回転軸、この回転軸の上端に結
合され、上面でウエハを支持する皿状のスピンチ
ヤツク、このスピンチヤツクを筒状で囲んで上記
下カツプに結合され、上記ウエハの下面に上端が
対向するスカート、このスカートの内側において
、上記スピンチヤツク下面に結合され、径方向へ
風を送出するフアンを備えたレジスト処理装置。 a cylindrical lower cup with an open upper end; an upper cup to which a nozzle that covers the open side of the lower cup and discharges a processing liquid is attached; a rotating shaft that passes through the lower cup and projects into the lower cup; a dish-shaped spin chuck connected to the upper end of the shaft and supporting the wafer on the upper surface; a skirt surrounding the spin chuck in a cylindrical shape and connected to the lower cup, the upper end facing the lower surface of the wafer; on the inside of the skirt; A resist processing apparatus comprising a fan coupled to the lower surface of the spin chuck and sending out air in a radial direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP398389U JPH0295232U (en) | 1989-01-18 | 1989-01-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP398389U JPH0295232U (en) | 1989-01-18 | 1989-01-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0295232U true JPH0295232U (en) | 1990-07-30 |
Family
ID=31206098
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP398389U Pending JPH0295232U (en) | 1989-01-18 | 1989-01-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0295232U (en) |
-
1989
- 1989-01-18 JP JP398389U patent/JPH0295232U/ja active Pending