JPH0295338U - - Google Patents
Info
- Publication number
- JPH0295338U JPH0295338U JP368689U JP368689U JPH0295338U JP H0295338 U JPH0295338 U JP H0295338U JP 368689 U JP368689 U JP 368689U JP 368689 U JP368689 U JP 368689U JP H0295338 U JPH0295338 U JP H0295338U
- Authority
- JP
- Japan
- Prior art keywords
- chart
- deposited
- chromium
- oxide film
- series
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 claims description 2
- 229910000423 chromium oxide Inorganic materials 0.000 claims description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 239000011651 chromium Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Silver Salt Photography Or Processing Solution Therefor (AREA)
Description
第１図：露光時の入射光の散乱を示す模式図。
第２図：散乱光のために生じるボケた画像の断面
模式図。第３図：空間周波数の高いパターンに対
応するボケた画像の断面模式図。第４図：本考案
に係る酸化クロム膜を蒸着した解像力チヤート断
面模式図。第５図：本考案の解像力チヤートで得
られるボケない画像の断面模式図。第６図および
第７図：画像濃度およびＣＴＦの空間周波数依存
性を示すグラフ。
FIG. 1: Schematic diagram showing scattering of incident light during exposure.
Figure 2: Schematic cross-sectional view of a blurred image caused by scattered light. Figure 3: Schematic cross-sectional diagram of a blurred image corresponding to a pattern with a high spatial frequency. FIG. 4: Schematic cross-sectional view of a resolution chart in which a chromium oxide film according to the present invention is deposited. Figure 5: Schematic cross-sectional view of a blur-free image obtained with the resolution chart of the present invention. Figures 6 and 7: Graphs showing the spatial frequency dependence of image density and CTF.
Claims (1)
の空間周波数を含む線画像パターンを有するチヤ
ートにおいて、前記クロム蒸着膜の表面に厚み７
００Å〜９００Åの酸化クロム膜が蒸着されたこ
とを特徴とする解像力測定用チヤート。 In a chart having a line image pattern including a series of spatial frequencies formed of a chromium vapor deposited film on a glass substrate, a thickness of 7
A chart for measuring resolution, characterized in that a chromium oxide film of 00 Å to 900 Å is deposited.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP368689U JPH0295338U (en) | 1989-01-17 | 1989-01-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP368689U JPH0295338U (en) | 1989-01-17 | 1989-01-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0295338U true JPH0295338U (en) | 1990-07-30 |
Family
ID=31205541
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP368689U Pending JPH0295338U (en) | 1989-01-17 | 1989-01-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0295338U (en) |
-
1989
- 1989-01-17 JP JP368689U patent/JPH0295338U/ja active Pending
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