JPH03100290A - クリーン窓機構 - Google Patents

クリーン窓機構

Info

Publication number
JPH03100290A
JPH03100290A JP2177640A JP17764090A JPH03100290A JP H03100290 A JPH03100290 A JP H03100290A JP 2177640 A JP2177640 A JP 2177640A JP 17764090 A JP17764090 A JP 17764090A JP H03100290 A JPH03100290 A JP H03100290A
Authority
JP
Japan
Prior art keywords
window
gas
wall
chamber
clean
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2177640A
Other languages
English (en)
Japanese (ja)
Inventor
Neil A Johnson
ニール・アンソニー・ジョンソン
Russell Scott Miller
ラッセル・スコット・ミラー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of JPH03100290A publication Critical patent/JPH03100290A/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B17/00—Methods preventing fouling
    • B08B17/02—Preventing deposition of fouling or of dust
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D21/00—Arrangement of monitoring devices; Arrangement of safety devices
    • F27D21/02—Observation or illuminating devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D3/00—Charging; Discharging; Manipulation of charge
    • F27D3/16—Introducing a fluid jet or current into the charge
    • F27D2003/161—Introducing a fluid jet or current into the charge through a porous element
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D25/00—Devices or methods for removing incrustations, e.g. slag, metal deposits, dust; Devices or methods for preventing the adherence of slag
    • F27D25/008—Devices or methods for removing incrustations, e.g. slag, metal deposits, dust; Devices or methods for preventing the adherence of slag using fluids or gases, e.g. blowers, suction units

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Thermally Insulated Containers For Foods (AREA)
  • Filling Of Jars Or Cans And Processes For Cleaning And Sealing Jars (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
  • Aerodynamic Tests, Hydrodynamic Tests, Wind Tunnels, And Water Tanks (AREA)
JP2177640A 1989-08-07 1990-07-06 クリーン窓機構 Pending JPH03100290A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US39005289A 1989-08-07 1989-08-07
US390,052 1989-08-07

Publications (1)

Publication Number Publication Date
JPH03100290A true JPH03100290A (ja) 1991-04-25

Family

ID=23540836

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2177640A Pending JPH03100290A (ja) 1989-08-07 1990-07-06 クリーン窓機構

Country Status (6)

Country Link
JP (1) JPH03100290A (it)
AU (1) AU5704290A (it)
CA (1) CA2015524A1 (it)
FR (1) FR2650516A1 (it)
GB (1) GB2235548A (it)
IT (1) IT1246433B (it)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150371882A1 (en) * 2014-06-20 2015-12-24 Taiwan Semiconductor Manufacturing Company Ltd. Semiconductor manufacturing apparatus
CN105312272A (zh) * 2015-12-07 2016-02-10 南通星球石墨设备有限公司 一种hcl合成炉视镜自动清洗装置

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5821428A (en) * 1995-08-11 1998-10-13 Koch Enterprises, Inc. Sealed observation element for sulfur recovery unit
US9417122B2 (en) 2012-06-15 2016-08-16 Empire Technology Development Llc Self-cleaning lens
CN103913072B (zh) * 2014-04-09 2016-01-20 宝钢工程技术集团有限公司 一种自清洁观察窗装置
CN104729311B (zh) * 2015-04-10 2017-02-01 核工业理化工程研究院 应用于真空系统的吹气保护观察窗
CN107560447A (zh) * 2017-09-14 2018-01-09 宁波鑫利成真空科技有限公司 一种快门式真空炉观察窗
CN108444306B (zh) * 2018-03-16 2019-08-09 株洲稀美泰材料有限责任公司 用于观察金属熔炼过程的观察窗
SE546802C2 (en) * 2022-04-05 2025-02-18 Teksic Ab Viewport protection system
JP2024001695A (ja) * 2022-06-22 2024-01-10 株式会社ニューフレアテクノロジー 基板処理装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150371882A1 (en) * 2014-06-20 2015-12-24 Taiwan Semiconductor Manufacturing Company Ltd. Semiconductor manufacturing apparatus
US10269599B2 (en) * 2014-06-20 2019-04-23 Taiwan Semiconductor Manufacturing Company Ltd. Semiconductor manufacturing apparatus
CN105312272A (zh) * 2015-12-07 2016-02-10 南通星球石墨设备有限公司 一种hcl合成炉视镜自动清洗装置

Also Published As

Publication number Publication date
IT1246433B (it) 1994-11-18
FR2650516A1 (fr) 1991-02-08
IT9021236A1 (it) 1992-02-07
IT9021236A0 (it) 1990-08-07
GB9014915D0 (en) 1990-08-22
GB2235548A (en) 1991-03-06
CA2015524A1 (en) 1991-02-07
AU5704290A (en) 1991-02-07

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