JPH03102738A - Manufacture of gas discharge display device - Google Patents
Manufacture of gas discharge display deviceInfo
- Publication number
- JPH03102738A JPH03102738A JP23930689A JP23930689A JPH03102738A JP H03102738 A JPH03102738 A JP H03102738A JP 23930689 A JP23930689 A JP 23930689A JP 23930689 A JP23930689 A JP 23930689A JP H03102738 A JPH03102738 A JP H03102738A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- cathode electrode
- mercury
- electrode
- aging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 230000032683 aging Effects 0.000 claims abstract description 39
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims abstract description 28
- 229910052753 mercury Inorganic materials 0.000 claims abstract description 28
- 239000002245 particle Substances 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000007789 sealing Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 47
- 239000006121 base glass Substances 0.000 description 7
- 239000005357 flat glass Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 239000005394 sealing glass Substances 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 230000003679 aging effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002431 foraging effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 150000002835 noble gases Chemical class 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、ガス放電表示装置の！！ｌ！遣方法に関し、
詳細には、電極の水銀付着の均一化を図るものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a gas discharge display device! ! l! Regarding the method of sending
Specifically, the purpose is to make the mercury adhesion on the electrodes uniform.
第２図はガス放電表示装置の内部構造を示す斜視図であ
る．
同図に示されるように、ガス放電表示装置においては、
ベースガラスｌ上に複数のカソード電極２が備えられ、
その上にカソード電極２に直交ずる方向に延びる複数の
隔壁３が備えられている。Figure 2 is a perspective view showing the internal structure of the gas discharge display device. As shown in the figure, in the gas discharge display device,
A plurality of cathode electrodes 2 are provided on the base glass l,
A plurality of partition walls 3 extending in a direction perpendicular to the cathode electrode 2 are provided thereon.
一方、ウィンドウガラス４上にはカソード電極２に直交
ずる方向に延びる複数の透１ｊＪＪ電極４が備えれれて
いる．そして、ベースガラスｌとウインドウガラス５と
は重ね合わせされ周囲をシールガラス６でシールされて
、両ガラス５，６間に放電室７を形成している．そして
、この放電室７には表示用の希ガスが封入される。尚、
２ａはカソード電極２に接続される外部電極である．
第３図は上記ガス放電表示装置の従来の！Ｉ！ｌ！造工
程の一部を示すフローチャートである．同図に示される
ように、従来は、ベースガラスとウィンドウガラスとが
シールガラスによりシールされ、放電室に希ガスを含む
表示用ガスと水銀が封入され（ステップ１１）、アノー
ド電極とカソード電極の間に電圧が印加され、カソード
電極の表面の汚れを取り除く一次エージング工程がなさ
れる（ステップ１２〉．次に、加熱処理により水銀を均
一に拡散させカソード電極表面に水銀粒子を均一に付着
させ（ステップ１３）、その後、放電状態を安定化させ
るための二次エージングエ程がなされる〈ステップ１４
〉．
〔発明が解決しようとする課題〕
ところで、上記一次エージング工程は電極表面にイオン
粒子を衝突させることにより電極表面の汚れを除去する
働きを持ち、その後の水銀粒子の付着はカソード電極表
面におけるスパッタを防止する働きを持つ。On the other hand, a plurality of transparent 1jJJ electrodes 4 are provided on the window glass 4 and extend in a direction perpendicular to the cathode electrode 2. The base glass l and the window glass 5 are overlapped and the periphery thereof is sealed with a sealing glass 6 to form a discharge chamber 7 between the two glasses 5 and 6. This discharge chamber 7 is filled with a rare gas for display purposes. still,
2a is an external electrode connected to the cathode electrode 2. FIG. 3 shows the conventional gas discharge display device described above! I! l! This is a flowchart showing part of the manufacturing process. As shown in the figure, conventionally, a base glass and a window glass are sealed with a seal glass, a display gas containing a rare gas and mercury are sealed in a discharge chamber (step 11), and an anode electrode and a cathode electrode are sealed. A voltage is applied between them, and a primary aging process is performed to remove dirt on the surface of the cathode electrode (Step 12).Next, by heat treatment, mercury is uniformly diffused and mercury particles are uniformly attached to the surface of the cathode electrode (Step 12). Step 13), then a secondary aging process is performed to stabilize the discharge state (Step 14).
〉． [Problems to be Solved by the Invention] By the way, the above primary aging process has the function of removing dirt on the electrode surface by colliding ion particles with the electrode surface, and the subsequent adhesion of mercury particles prevents sputtering on the cathode electrode surface. It has the function of preventing.
しかしながら、上記した従来の方法によると、封入され
るガスの種類や圧力によっては、一次エージング工程に
おける電極表面の汚れの除去が不充分な場合があり、水
銀をカソードＮ’ｆｈの表面に均一に付着させることが
できないことがあった．この場合には、カソード電極に
おけるスパッタの発生を防止できず、製品寿命が短くな
るという問題があった．
そこで、本発明は上記したような従来技術の課題を解決
するためになされたものであり、その目的とするところ
は、製品寿命を長くできるガス放電表示装置の製造方法
を提供することにある。However, according to the above-mentioned conventional method, depending on the type and pressure of the sealed gas, the removal of dirt from the electrode surface during the primary aging process may be insufficient, and mercury is not uniformly applied to the surface of the cathode N'fh. Sometimes it was not possible to attach it. In this case, there was a problem that spatter could not be prevented from occurring at the cathode electrode, resulting in a shortened product life. Therefore, the present invention has been made to solve the problems of the prior art as described above, and its purpose is to provide a method for manufacturing a gas discharge display device that can extend the product life.
本発明に係るガス放電表示装置のｔＭ造方法は、アノー
ド電極を備えた基板とカソード電極を備えた基板との間
に形成され、その中で上記アノード電極と上記カソード
電極とを対向配置させる放電室内に希ガスを含むエージ
ング用のガスを封入し、上記アノード電極と上記カソー
ド電極間に所定の電圧を印加することにより予備エージ
ングを施す工程と、上記放電室に封入されたエージング
用のガスを箱ガスを含む表示用のガスと水銀に置換する
工程と、上記表示用のガス内にある上記アノード電極と
上記カソード電極間に所定の電圧を印加することにより
エージングを施す工程と、加熱することに上り上記水銀
を拡敗させて上記カソード電極の表向に水銀粒子を付着
させる工程とを有することを特徴としている。The tM manufacturing method of a gas discharge display device according to the present invention is such that a discharge is formed between a substrate provided with an anode electrode and a substrate provided with a cathode electrode, and the anode electrode and the cathode electrode are disposed facing each other. A step of performing preliminary aging by filling a chamber with an aging gas containing a rare gas and applying a predetermined voltage between the anode electrode and the cathode electrode; a step of replacing mercury with a display gas containing a box gas; a step of aging by applying a predetermined voltage between the anode electrode and the cathode electrode in the display gas; and heating. The method is characterized by comprising a step of causing the mercury to spread over the surface of the cathode electrode, thereby causing mercury particles to adhere to the surface of the cathode electrode.
本発明においては、放電室内にエージング用のガスを封
入して予備エージングを施した後に、エージング用のガ
スを表示用のガスと置換するので、エージング用のガス
として汚れ除去効果の高いもの《例えば、質量数の大き
な希ガスを含むガス〉を選択できる．このためカソード
電極表面の汚れを少なくでき、汚れにより水銀が付着で
きない部分が少なくなるので、カソード電極表面に水銀
粒子を均一にイ一Ｉ着できる。In the present invention, after preliminary aging is performed by sealing an aging gas in the discharge chamber, the aging gas is replaced with a display gas. , gases containing noble gases with large mass numbers can be selected. Therefore, the amount of dirt on the surface of the cathode electrode can be reduced, and since there are fewer areas where mercury cannot adhere due to dirt, mercury particles can be deposited uniformly on the surface of the cathode electrode.
以下に本発明を図示の実施例に基づいて説明する．
第１図は本発明に係るガス放電表示装置の製造方法の一
実施例を示すフローチャートである。尚、本実施例の製
造方法が適用されるガス放電表示装置の梢造は第２図の
ものと同一であるので、以下の説明においては第１図と
共に第２図をも参照する。The present invention will be explained below based on illustrated embodiments. FIG. 1 is a flowchart showing one embodiment of a method for manufacturing a gas discharge display device according to the present invention. The top structure of the gas discharge display device to which the manufacturing method of this embodiment is applied is the same as that shown in FIG. 2, so in the following description, FIG. 2 will be referred to as well as FIG. 1.
本実施例の製造方法においては、先ず、複数本のカソー
ド電極２と複数本の隔壁３とを備えたベースガラス１と
、複数本のアノード電極５を備えたウインドウガラス４
とを用意し、カソード電極２とアノード電極５とが対向
ずるようにベースガラス１とウィンドウガラス４とを重
ね合わせる．次に、重ね合わされたベースガラス１とウ
インドウガラス４の周囲をシールガラス６でシールして
、ベースガラス１とウィンドウガラス４との間に放電室
７を形成し、この放電室７内にエージング用のガス（Ｎ
ｅ，Ａｒ，Ｋｒ等のａガスをベースとしたガス）を封入
する（ステップ１）．但し、この段階ではシールガラス
６によるシールを完全に施すのではなく、ガス封入用の
排気管《図示せず）の一部を残しておき、後に封入ガス
の置換を可能にしておく．
次に、アノード電極５とカソード電極２間に所定の電圧
を印加して放電させる予備エージングを行う《ステップ
２》．これは、この工程によりカソード電［！２表面に
イオンが衝突して、カソード電極２表面に付着している
汚れを取り除くことが可能だからである．
次に、排気管を用いて、エージング用ガスと予備エージ
ング時に発生した不純物ガスを加熱脱気し、表示用のガ
ス（Ｈｅ，Ｎｅ等の希ガスをベースガスとしたガス〉と
水銀を放電室７に封入し、排気管を除去する《ステップ
３）．
次に、アノード電極５とカソード電極２間に所定の電圧
を印加して放電さぜる一次エージングを行う（ステップ
４）．
次に、加熱処理により放電室７内で水銀を均一に拡散さ
せカソード電極２表面に水銀粒子を均一に付着させる（
ステップ５）。In the manufacturing method of this embodiment, first, a base glass 1 including a plurality of cathode electrodes 2 and a plurality of partition walls 3, and a window glass 4 including a plurality of anode electrodes 5 are prepared.
A base glass 1 and a window glass 4 are stacked so that the cathode electrode 2 and the anode electrode 5 face each other. Next, the periphery of the stacked base glass 1 and window glass 4 is sealed with a sealing glass 6 to form a discharge chamber 7 between the base glass 1 and the window glass 4. gas (N
(Step 1). However, at this stage, the sealing glass 6 is not completely sealed, but a portion of the exhaust pipe (not shown) for gas filling is left in place to allow replacement of the filled gas later. Next, preliminary aging is performed by applying a predetermined voltage between the anode electrode 5 and the cathode electrode 2 to cause discharge <<Step 2>>. This process creates a cathode voltage [! This is because ions collide with the surface of the cathode electrode 2 to remove dirt adhering to the surface of the cathode electrode 2. Next, using an exhaust pipe, the aging gas and the impurity gas generated during pre-aging are heated and degassed, and the display gas (gas based on rare gases such as He and Ne) and mercury are transferred to the discharge chamber. 7 and remove the exhaust pipe [Step 3]. Next, primary aging is performed by applying a predetermined voltage between the anode electrode 5 and the cathode electrode 2 to generate a discharge (step 4). Next, mercury is uniformly diffused in the discharge chamber 7 by heat treatment, and mercury particles are uniformly attached to the surface of the cathode electrode 2 (
Step 5).
ｆｉｆ＆に、放電状態を安定化させるための二次エージ
ング工程を行う（ステップ６）。fif& is subjected to a secondary aging process to stabilize the discharge state (step 6).
以上説明したように、本実施例においては、放電室７内
にエージング用のガスを封入して予備二一ジングを施し
た後に、エージング用のガスを表示用のガスと置換する
ので、エージング用のガスとして汚れ除去効果の高いも
のを選択できる．このためカソード電極２表面の汚れを
ほとんどなくすることができ、汚れにより水銀が付着で
きない部分がほとんどなくなるので、カソード電極２表
面に水銀粒子を均一に付着させることができる．この結
果、カソードＺ４ｆ！２におけるスパッタの発生が少な
くなり、製品寿命が向上する．また、製品寿命の向上は
試験によっても確認されている．試験によると、初めか
らＨｅをベースガスとする表示用ガスを封入した従来の
場合には表示不艮が短時間で発生したが、Ｎｅをベース
ガスとしたエージング用ガスを使用し２５０Ｖ程度で予
備エージングを施した場合には表示不良が生じず製品寿
命が長いことが確認された。As explained above, in this embodiment, after the aging gas is sealed in the discharge chamber 7 and preliminary aging is performed, the aging gas is replaced with the display gas. You can select a gas with a high dirt removal effect. Therefore, the surface of the cathode electrode 2 can be almost completely free from dirt, and since there are almost no areas where mercury cannot adhere due to dirt, mercury particles can be evenly deposited on the surface of the cathode electrode 2. As a result, cathode Z4f! 2, the occurrence of spatter is reduced and the product life is improved. The improvement in product life has also been confirmed through tests. According to tests, in the conventional case where a display gas with He as the base gas was filled in, the display failed for a short time, but when an aging gas with Ne as the base gas was used, it was possible to prepare the display at around 250V. It was confirmed that when aging was applied, no display defects occurred and the product life was long.
Ｈｅをベースガスとしたエージング用ガスを使用し放電
電圧２６０Ｖ程度で予備エージングを施した場合にも同
様に製品寿命の向上が確認された．さらに、Ａｒをベー
スガスとしたエージング用ガスとした場合．及びＫｒを
ベースガスとしたエージング用ガスとした場合にも同様
な予備エージングの効果が確認された。ここで、予備エ
ージングの効果（冫りれの除去効率）は希ガスの質量が
大きい方が大きい．
尚、上記実施例においては予備エージング後に一次エー
ジンダ、水銀拡散、二次エージングの順に処理を施した
場合について説明したが、本発明はこれには限定されず
、予備エージング後に水銀拡散工程を行なう限り同様な
効果が得られる．〔発明の効果〕
以上説明したように、本発明によれば、汚れ除去効果の
高いエージング用ガスで予備エージングを施すのでカソ
ード電極表面の汚れをほとんどなくずることができる、
カソード電極表面に水銀粒子をカーに付着させることが
できる．よって、カソード電極におけるスパッタの発生
が少なくなり、製品寿命を向上させることができるとい
う効果がある。A similar improvement in product life was confirmed when preliminary aging was performed at a discharge voltage of approximately 260 V using an aging gas containing He as a base gas. Furthermore, when Ar is used as an aging gas as a base gas. Similar preliminary aging effects were also confirmed when Kr was used as the base gas for aging. Here, the effect of pre-aging (degradation removal efficiency) is greater when the mass of the rare gas is larger. In the above embodiments, the case where the primary aging, mercury diffusion, and secondary aging were performed in this order after preliminary aging was explained, but the present invention is not limited to this, and as long as the mercury diffusion step is performed after preliminary aging. A similar effect can be obtained. [Effects of the Invention] As explained above, according to the present invention, since preliminary aging is performed using an aging gas with a high dirt removal effect, most of the dirt on the surface of the cathode electrode can be removed.
Mercury particles can be attached to the surface of the cathode electrode. Therefore, the occurrence of spatter on the cathode electrode is reduced, and the product life can be improved.
第１図は本発明に係るガス放電表示装置の製造方法の一
実施例を示すフローチャート、第２図はガス放電表示装
置の内部構造を示す斜視図、
第３図は従来のガス放電表示装置の’ｌ！遣方法の一部
を示すフローチャートである．FIG. 1 is a flowchart showing an embodiment of the method for manufacturing a gas discharge display device according to the present invention, FIG. 2 is a perspective view showing the internal structure of the gas discharge display device, and FIG. 3 is a diagram showing a conventional gas discharge display device. 'l! This is a flowchart showing part of the method.
Claims (1)
との間に形成され、その中で上記アノード電極と上記カ
ソード電極とを対向配置させる放電室内に希ガスを含む
エージング用のガスを封入し、上記アノード電極と上記
カソード電極間に所定の電圧を印加することにより予備
エージングを施す工程と、 上記放電室に封入されたエージング用のガスを希ガスを
含む表示用のガスと水銀に置換する工程と、 上記表示用のガス内にある上記アノード電極と上記カソ
ード電極間に所定の電圧を印加することによりエージン
グを施す工程と、 加熱することにより上記水銀を拡散させて上記カソード
電極の表面に水銀粒子を付着させる工程とを有すること
を特徴とするガス放電表示装置の製造方法。[Claims] A discharge chamber formed between a substrate provided with an anode electrode and a substrate provided with a cathode electrode, in which the anode electrode and the cathode electrode are disposed facing each other, contains a rare gas. A step of performing preliminary aging by filling a gas in the discharge chamber and applying a predetermined voltage between the anode electrode and the cathode electrode; a step of substituting the mercury with mercury; a step of aging by applying a predetermined voltage between the anode electrode and the cathode electrode in the display gas; and a step of diffusing the mercury by heating. A method for manufacturing a gas discharge display device, comprising the step of attaching mercury particles to the surface of a cathode electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23930689A JPH03102738A (en) | 1989-09-14 | 1989-09-14 | Manufacture of gas discharge display device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23930689A JPH03102738A (en) | 1989-09-14 | 1989-09-14 | Manufacture of gas discharge display device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03102738A true JPH03102738A (en) | 1991-04-30 |
Family
ID=17042757
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23930689A Pending JPH03102738A (en) | 1989-09-14 | 1989-09-14 | Manufacture of gas discharge display device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03102738A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6864570B2 (en) | 1993-12-17 | 2005-03-08 | The Regents Of The University Of California | Method and apparatus for fabricating self-assembling microstructures |
| US7510082B2 (en) | 2004-05-19 | 2009-03-31 | Nippon Mining & Metals Co., Ltd. | Wafer storage container |
-
1989
- 1989-09-14 JP JP23930689A patent/JPH03102738A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6864570B2 (en) | 1993-12-17 | 2005-03-08 | The Regents Of The University Of California | Method and apparatus for fabricating self-assembling microstructures |
| US7510082B2 (en) | 2004-05-19 | 2009-03-31 | Nippon Mining & Metals Co., Ltd. | Wafer storage container |
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