JPH03103251U - - Google Patents
Info
- Publication number
- JPH03103251U JPH03103251U JP1243090U JP1243090U JPH03103251U JP H03103251 U JPH03103251 U JP H03103251U JP 1243090 U JP1243090 U JP 1243090U JP 1243090 U JP1243090 U JP 1243090U JP H03103251 U JPH03103251 U JP H03103251U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- sample chamber
- reaction vessel
- reaction
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- Glanulating (AREA)
- Powder Metallurgy (AREA)
Description
第１図及び第２図は、本考案の装置における反
応容器の垂直断面図、第３図〜第１０図は、本考
案の装置における反応容器内に備わるガス方向変
更板の断面図である。
第１図及び第２図中の、１……反応容器、２…
…ガス導入口、３……ガス方向変更板、４……試
料室、５……第１ガスガス流出口、６……第２ガ
ス流出口、７……ガス排出口、８……ガス反応室
、９……防止板、１０……振動機構。
1 and 2 are vertical cross-sectional views of a reaction vessel in the apparatus of the present invention, and FIGS. 3 to 10 are cross-sectional views of a gas direction changing plate provided within the reaction vessel in the apparatus of the present invention. In FIGS. 1 and 2, 1... reaction vessel, 2...
...Gas inlet, 3...Gas direction change plate, 4...Sample chamber, 5...First gas outlet, 6...Second gas outlet, 7...Gas outlet, 8...Gas reaction chamber , 9... Prevention plate, 10... Vibration mechanism.
Claims (1)
導入口及び排出口付の反応容器とを少なくとも備
えた気相反応装置において、該反応容器は、試料
が設置される試料室と、該試料室へガスを流入さ
せ、かつ該ガス導入口から流入したガスの流れ方
向を変更させるガス方向変更板とを具備している
ことを特徴とする高効率気相反応装置。 (2) ガス導入手段と加熱手段と減圧手段とガス
導入口及び排出口付の反応容器とを少なくとも備
えた気相反応装置において、該反応容器は、試料
が設置される試料室と、該試料室へガスを流入さ
せ、かつ該ガス導入口から流入したガスの流れ方
向を変更させるガス方向変更板と、該ガス方向変
更板で変更される前にガスを相互反応させる反応
室とを具備していることを特徴とする高効率気相
反応装置。 (3) 上記反応容器は、上記ガス反応室と上記試
料室とが一体物となつていることを特徴とする実
用新案登録請求の範囲第２項記載の高効率気相反
応装置。 (4) 上記反応容器は、上記ガス反応室と上記試
料室とが一体物となり、かつ該一体物を振動及び
／又は回転させて振動機構が設けられていること
を特徴とする実用新案登録請求の範囲第２項記載
の高効率気相反応装置。 (5) 上記試料室は、該試料室を覆つてなる防止
板が設けられていることを特徴とする実用新案登
録請求の範囲第１項、第２項又は第３項記載の高
効率気相反応装置。[Scope of Claim for Utility Model Registration] (1) A gas phase reaction apparatus comprising at least a gas introduction means, a heating means, a pressure reduction means, and a reaction vessel with a gas introduction port and a discharge port, the reaction vessel having a sample installed therein. A high-efficiency gas phase reaction characterized by comprising: a sample chamber in which gas flows into the sample chamber; and a gas direction changing plate that causes gas to flow into the sample chamber and changes the flow direction of the gas flowing in from the gas inlet. Device. (2) In a gas phase reaction apparatus equipped with at least a gas introduction means, a heating means, a pressure reduction means, and a reaction vessel with a gas inlet and an outlet, the reaction vessel includes a sample chamber in which a sample is installed, and a reaction vessel equipped with a gas inlet and an outlet. A gas direction changing plate that allows gas to flow into the chamber and changes the flow direction of the gas flowing from the gas inlet, and a reaction chamber that causes the gases to react with each other before being changed by the gas direction changing plate. A high-efficiency gas phase reactor characterized by: (3) The high-efficiency gas-phase reaction apparatus according to claim 2, wherein the reaction vessel includes the gas reaction chamber and the sample chamber integrated into one unit. (4) A request for registration of a utility model characterized in that the reaction vessel is provided with a vibration mechanism in which the gas reaction chamber and the sample chamber are integrated, and the integrated structure is vibrated and/or rotated. The high-efficiency gas phase reactor according to item 2. (5) The high-efficiency gas phase according to claim 1, 2, or 3 of the utility model registration claim, characterized in that the sample chamber is provided with a prevention plate that covers the sample chamber. Reactor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1243090U JPH03103251U (en) | 1990-02-09 | 1990-02-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1243090U JPH03103251U (en) | 1990-02-09 | 1990-02-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03103251U true JPH03103251U (en) | 1991-10-28 |
Family
ID=31515908
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1243090U Pending JPH03103251U (en) | 1990-02-09 | 1990-02-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03103251U (en) |
-
1990
- 1990-02-09 JP JP1243090U patent/JPH03103251U/ja active Pending
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