JPH03104189U - - Google Patents

Info

Publication number
JPH03104189U
JPH03104189U JP1337890U JP1337890U JPH03104189U JP H03104189 U JPH03104189 U JP H03104189U JP 1337890 U JP1337890 U JP 1337890U JP 1337890 U JP1337890 U JP 1337890U JP H03104189 U JPH03104189 U JP H03104189U
Authority
JP
Japan
Prior art keywords
cryopump
gas
refrigerator
compressor
stage cryopanel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1337890U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1337890U priority Critical patent/JPH03104189U/ja
Publication of JPH03104189U publication Critical patent/JPH03104189U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Description

【図面の簡単な説明】
第１図は本考案のクライオポンプの構造説明図
、第２図は第１図のＡ−Ａ断面図である。 １……第一段クライオパネル、２……第二段ク
ライオパネル、２ａ……フイン、３……冷凍機。

Claims (1)

    【実用新案登録請求の範囲】
  1. 作動ガスを圧縮する圧縮機と、この圧縮機より
    吐出された常温高圧の作動ガスの断熱膨張により
    低温を発生させる冷凍機と、この冷凍機により冷
    却される２段のクライオパネルを設けたクライオ
    ポンプにおいて、第二段クライオパネルの外面に
    クライオポンプの気体分子の進入開口面に対して
    直角方向に複数のフインを設けて被吸着ガスの凝
    縮面積を増大したことを特徴とするクライオポン
    プ。
JP1337890U 1990-02-13 1990-02-13 Pending JPH03104189U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1337890U JPH03104189U (ja) 1990-02-13 1990-02-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1337890U JPH03104189U (ja) 1990-02-13 1990-02-13

Publications (1)

Publication Number Publication Date
JPH03104189U true JPH03104189U (ja) 1991-10-29

Family

ID=31516794

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1337890U Pending JPH03104189U (ja) 1990-02-13 1990-02-13

Country Status (1)

Country Link
JP (1) JPH03104189U (ja)

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