JPH03105833A - 電子源 - Google Patents
電子源Info
- Publication number
- JPH03105833A JPH03105833A JP2239803A JP23980390A JPH03105833A JP H03105833 A JPH03105833 A JP H03105833A JP 2239803 A JP2239803 A JP 2239803A JP 23980390 A JP23980390 A JP 23980390A JP H03105833 A JPH03105833 A JP H03105833A
- Authority
- JP
- Japan
- Prior art keywords
- electron source
- electron
- cathode
- source according
- flat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 239000010406 cathode material Substances 0.000 claims description 3
- 229910052746 lanthanum Inorganic materials 0.000 claims description 3
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 238000004377 microelectronic Methods 0.000 description 4
- 229910025794 LaB6 Inorganic materials 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/13—Solid thermionic cathodes
- H01J1/15—Cathodes heated directly by an electric current
- H01J1/16—Cathodes heated directly by an electric current characterised by the shape
Landscapes
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
- Solid Thermionic Cathode (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP89116881.7 | 1989-09-12 | ||
| EP89116881A EP0417340A1 (de) | 1989-09-12 | 1989-09-12 | Elektronenquelle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03105833A true JPH03105833A (ja) | 1991-05-02 |
Family
ID=8201884
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2239803A Pending JPH03105833A (ja) | 1989-09-12 | 1990-09-10 | 電子源 |
Country Status (2)
| Country | Link |
|---|---|
| EP (1) | EP0417340A1 (de) |
| JP (1) | JPH03105833A (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009069335A1 (ja) * | 2007-11-30 | 2009-06-04 | Denki Kagaku Kogyo Kabushiki Kaisha | 電子放出源及び電子放出源の製造方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR903976A (fr) * | 1942-08-19 | 1945-10-23 | Fides Gmbh | Perfectionnements aux cathodes destinées à la production d'un faisceau électronique |
| US4528474A (en) * | 1982-03-05 | 1985-07-09 | Kim Jason J | Method and apparatus for producing an electron beam from a thermionic cathode |
| US4551649A (en) * | 1983-12-08 | 1985-11-05 | Rockwell International Corporation | Rounded-end protuberances for field-emission cathodes |
| EP0207772A3 (de) * | 1985-07-02 | 1987-11-19 | Wilhelm Heinrich Dr. Brünger | Lanthan-Hexaboridelektronenquelle und Verfahren zur Herstellung derselben |
-
1989
- 1989-09-12 EP EP89116881A patent/EP0417340A1/de not_active Withdrawn
-
1990
- 1990-09-10 JP JP2239803A patent/JPH03105833A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009069335A1 (ja) * | 2007-11-30 | 2009-06-04 | Denki Kagaku Kogyo Kabushiki Kaisha | 電子放出源及び電子放出源の製造方法 |
| US8456076B2 (en) | 2007-11-30 | 2013-06-04 | Denki Kagaku Kogyo Kabushiki Kaisha | Electron emitting source and manufacturing method of electron emitting source |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0417340A1 (de) | 1991-03-20 |
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