JPH03106357U - - Google Patents
Info
- Publication number
- JPH03106357U JPH03106357U JP1581690U JP1581690U JPH03106357U JP H03106357 U JPH03106357 U JP H03106357U JP 1581690 U JP1581690 U JP 1581690U JP 1581690 U JP1581690 U JP 1581690U JP H03106357 U JPH03106357 U JP H03106357U
- Authority
- JP
- Japan
- Prior art keywords
- base
- substrate
- holder
- sputtering
- support rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 238000004544 sputter deposition Methods 0.000 claims description 8
- 239000011810 insulating material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1581690U JPH03106357U ( ) | 1990-02-19 | 1990-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1581690U JPH03106357U ( ) | 1990-02-19 | 1990-02-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03106357U true JPH03106357U ( ) | 1991-11-01 |
Family
ID=31519106
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1581690U Pending JPH03106357U ( ) | 1990-02-19 | 1990-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03106357U ( ) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007140809A (ja) * | 2005-11-17 | 2007-06-07 | Matsushita Electric Ind Co Ltd | 携帯用防犯ブザー |
| JP2016541117A (ja) * | 2013-11-25 | 2016-12-28 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 熱エネルギー伝達低減のための基板キャリア |
-
1990
- 1990-02-19 JP JP1581690U patent/JPH03106357U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007140809A (ja) * | 2005-11-17 | 2007-06-07 | Matsushita Electric Ind Co Ltd | 携帯用防犯ブザー |
| JP2016541117A (ja) * | 2013-11-25 | 2016-12-28 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 熱エネルギー伝達低減のための基板キャリア |
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