JPH03110823U - - Google Patents
Info
- Publication number
- JPH03110823U JPH03110823U JP1991090U JP1991090U JPH03110823U JP H03110823 U JPH03110823 U JP H03110823U JP 1991090 U JP1991090 U JP 1991090U JP 1991090 U JP1991090 U JP 1991090U JP H03110823 U JPH03110823 U JP H03110823U
- Authority
- JP
- Japan
- Prior art keywords
- target
- harmonic
- magneto
- divided
- direct current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Thin Magnetic Films (AREA)
Description
第１図ａ，ｂは本考案の一実施例を示す断面図
、第２図ａ，ｂは本考案の他の実施例を示す断面
図、第３図は従来例を示す断面図である。
１……ターゲツト、２……エロージヨン。
1A and 1B are sectional views showing one embodiment of the present invention, FIGS. 2A and 2B are sectional views showing another embodiment of the present invention, and FIG. 3 is a sectional view showing a conventional example. 1...Target, 2...Erosion.
Claims (1)
ゲツトにおいて、該ターゲツトをエロージヨンの
発生する部分と他の部分とで分割していることを
特徴とする光磁気材料ターゲツト。 1. A magneto-optical material target for direct current or harmonic magnetron sputtering, characterized in that the target is divided into a portion where erosion occurs and another portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1991090U JPH03110823U (en) | 1990-02-28 | 1990-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1991090U JPH03110823U (en) | 1990-02-28 | 1990-02-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03110823U true JPH03110823U (en) | 1991-11-13 |
Family
ID=31523012
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1991090U Pending JPH03110823U (en) | 1990-02-28 | 1990-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03110823U (en) |
-
1990
- 1990-02-28 JP JP1991090U patent/JPH03110823U/ja active Pending