JPH03111563U - - Google Patents
Info
- Publication number
- JPH03111563U JPH03111563U JP1946890U JP1946890U JPH03111563U JP H03111563 U JPH03111563 U JP H03111563U JP 1946890 U JP1946890 U JP 1946890U JP 1946890 U JP1946890 U JP 1946890U JP H03111563 U JPH03111563 U JP H03111563U
- Authority
- JP
- Japan
- Prior art keywords
- processing apparatus
- sample stage
- chamber
- plasma processing
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims 2
Landscapes
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1946890U JPH0640590Y2 (ja) | 1990-03-01 | 1990-03-01 | プラズマ処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1946890U JPH0640590Y2 (ja) | 1990-03-01 | 1990-03-01 | プラズマ処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03111563U true JPH03111563U (2) | 1991-11-14 |
| JPH0640590Y2 JPH0640590Y2 (ja) | 1994-10-26 |
Family
ID=31522584
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1946890U Expired - Lifetime JPH0640590Y2 (ja) | 1990-03-01 | 1990-03-01 | プラズマ処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0640590Y2 (2) |
-
1990
- 1990-03-01 JP JP1946890U patent/JPH0640590Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0640590Y2 (ja) | 1994-10-26 |
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