JPH03114687U

JPH03114687U -

Info

Publication number: JPH03114687U
Application number: JP2329590U
Authority: JP
Priority date: 1990-03-08
Filing date: 1990-03-08
Publication date: 1991-11-26

Description

[Brief explanation of drawings]

第１図は、この考案の一実施例に係る真空用バ
ルブを示す断面図である。第２図は、従来のベロ
ーズを使用した真空用バルブの一例を示す断面図
である。第３図は、従来のパツキンを使用した真
空用バルブの一例を示す断面図である。２２……弁胴、２４……弁体、２６……弁軸、
３０……シリンダ、３２……内筒、３４……外筒
、４０……ピストン、４６，４８……磁石。 FIG. 1 is a sectional view showing a vacuum valve according to an embodiment of this invention. FIG. 2 is a sectional view showing an example of a vacuum valve using a conventional bellows. FIG. 3 is a sectional view showing an example of a vacuum valve using a conventional packing. 22... Valve body, 24... Valve body, 26... Valve stem,
30...Cylinder, 32...Inner cylinder, 34...Outer cylinder, 40...Piston, 46, 48...Magnet.

Claims

[Scope of utility model registration request]

A valve body, a valve body that partitions a gas passage inside the valve body, a cylinder connected to the valve body, an inner cylinder made of a non-magnetic material and communicating with the inside of the valve body, and an outer cylinder outside the valve body. a piston that is provided between the inner cylinder and the outer cylinder of the cylinder and is driven by the driving fluid supplied thereto; and a piston that is connected to the valve body and a portion of which is connected to the cylinder. 1. A vacuum valve comprising: a valve shaft inserted into an inner cylinder so as to be movable in a direct manner; and magnets that are respectively provided on the valve shaft and the piston and attract each other.