JPH03115656U - - Google Patents
Info
- Publication number
- JPH03115656U JPH03115656U JP2441190U JP2441190U JPH03115656U JP H03115656 U JPH03115656 U JP H03115656U JP 2441190 U JP2441190 U JP 2441190U JP 2441190 U JP2441190 U JP 2441190U JP H03115656 U JPH03115656 U JP H03115656U
- Authority
- JP
- Japan
- Prior art keywords
- carbon evaporation
- carbon
- sample
- cartridge
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 14
- 229910052799 carbon Inorganic materials 0.000 claims description 14
- 230000008020 evaporation Effects 0.000 claims description 10
- 238000001704 evaporation Methods 0.000 claims description 10
- 238000010586 diagram Methods 0.000 description 5
- 238000009434 installation Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000012790 confirmation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の一実施例に係る炭素蒸着源の
装着図、第２図は本考案の炭素蒸着装置に係る炭
素蒸着部の概略図、第３図は従来のペンシル式炭
素蒸着源の装着図、第４図は従来のニードル式炭
素蒸着源の装着図、第５図は従来の炭素蒸着装置
に係る炭素蒸着部の概略図である。
１……カートリツジ式炭素棒、２……炭素棒ホ
ルダー、３……スプリング、４……試料、５……
試料台、６……蒸着部移動カーソル、７……試料
位置確認カーソル、８……電源コード、９……ス
ケール、１０……シヤドウイング用蒸着ヒーター
、１１……炭素棒加工側ホルダー、１２……炭素
棒平坦側ホルダー。
Fig. 1 is an installation diagram of a carbon evaporation source according to an embodiment of the present invention, Fig. 2 is a schematic diagram of the carbon evaporation section of the carbon evaporation apparatus of the present invention, and Fig. 3 is a diagram of a conventional pencil-type carbon evaporation source. FIG. 4 is an installation diagram of a conventional needle-type carbon evaporation source, and FIG. 5 is a schematic diagram of a carbon evaporation section of a conventional carbon evaporation apparatus. 1...Cartridge type carbon rod, 2...Carbon rod holder, 3...Spring, 4...Sample, 5...
Sample stage, 6... Vapor deposition unit movement cursor, 7... Sample position confirmation cursor, 8... Power cord, 9... Scale, 10... Vapor deposition heater for shadowing, 11... Carbon rod processing side holder, 12... Carbon rod flat side holder.
Claims (1)
ツジ化すると共に試料との距離を一定化するカー
ソル式移動炭素蒸着部とスケールを設けてなるこ
とを特徴とするカートリツジ式炭素蒸着装置。 A cartridge-type carbon evaporation apparatus characterized in that a carbon evaporation rod is converted into a cartridge in a shape that can accommodate a sample, and a cursor-type movable carbon evaporation part and a scale are provided to keep the distance from the sample constant.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2441190U JPH03115656U (en) | 1990-03-13 | 1990-03-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2441190U JPH03115656U (en) | 1990-03-13 | 1990-03-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03115656U true JPH03115656U (en) | 1991-11-29 |
Family
ID=31527375
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2441190U Pending JPH03115656U (en) | 1990-03-13 | 1990-03-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03115656U (en) |
-
1990
- 1990-03-13 JP JP2441190U patent/JPH03115656U/ja active Pending