JPH03118600U - - Google Patents
Info
- Publication number
- JPH03118600U JPH03118600U JP2714990U JP2714990U JPH03118600U JP H03118600 U JPH03118600 U JP H03118600U JP 2714990 U JP2714990 U JP 2714990U JP 2714990 U JP2714990 U JP 2714990U JP H03118600 U JPH03118600 U JP H03118600U
- Authority
- JP
- Japan
- Prior art keywords
- accelerator tube
- magnetic field
- ion accelerator
- electrostatic
- accelerating electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
Description
第１図は本考案の一実施例で静電型イオン加速
管方式の後段加速部の電極構成図、第２図は第１
図の各加速電極の構造を示す図、第３図は静電型
イオン加速管を使用したイオン打込装置の基本構
成図である。
１……イオン源、２……質量分離部、３……後
段加速部、４……打込室部、５……イオンビーム
、６……永久磁石、７……高透磁率部材、８……
イオンビーム通過孔、９……磁場、１０……二次
電子。
Figure 1 is an example of the present invention, and is a diagram of the electrode configuration of the latter stage acceleration section using an electrostatic ion accelerator tube.
FIG. 3 is a diagram showing the structure of each accelerating electrode in the figure, and is a basic configuration diagram of an ion implantation apparatus using an electrostatic ion accelerating tube. DESCRIPTION OF SYMBOLS 1... Ion source, 2... Mass separation part, 3... Post-acceleration part, 4... Impression chamber part, 5... Ion beam, 6... Permanent magnet, 7... High magnetic permeability member, 8... …
Ion beam passage hole, 9...Magnetic field, 10...Secondary electrons.
Claims (1)
に、イオンビーム軸を横切る方向に磁場を印加し
たことを特徴とする静電型イオン加速管。 ２ 請求項第１項記載の静電型イオン加速管にお
いて、磁場印加手段として各加速電極内に永久磁
石を設置したことを特徴とする静電型イオン加速
管。 ３ 請求項第２項記載の静電型イオン加速管にお
いて、上記永久磁石の他に更に磁路を設置したこ
とを特徴とする静電型イオン加速管。 ４ 請求項第１項から第３項記載の静電型イオン
加速管において、各加速電極に印加する磁場の方
向を、一段毎反転するよう磁場印加手段を設置し
たことを特徴とする静電型イオン加速管。[Claims for Utility Model Registration] 1. An electrostatic ion accelerator tube, characterized in that a magnetic field is applied to each accelerating electrode section in a direction transverse to the ion beam axis. 2. The electrostatic ion accelerator tube according to claim 1, characterized in that a permanent magnet is installed in each accelerating electrode as a magnetic field applying means. 3. The electrostatic ion accelerator tube according to claim 2, further comprising a magnetic path in addition to the permanent magnet. 4. The electrostatic type ion accelerator tube according to any one of claims 1 to 3, characterized in that a magnetic field applying means is installed to reverse the direction of the magnetic field applied to each accelerating electrode step by step. Ion accelerator tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2714990U JPH03118600U (en) | 1990-03-19 | 1990-03-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2714990U JPH03118600U (en) | 1990-03-19 | 1990-03-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03118600U true JPH03118600U (en) | 1991-12-06 |
Family
ID=31530017
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2714990U Pending JPH03118600U (en) | 1990-03-19 | 1990-03-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03118600U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015137150A1 (en) * | 2014-03-12 | 2015-09-17 | 株式会社アルバック | Ion radiation device and ion radiaiton method |
-
1990
- 1990-03-19 JP JP2714990U patent/JPH03118600U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015137150A1 (en) * | 2014-03-12 | 2015-09-17 | 株式会社アルバック | Ion radiation device and ion radiaiton method |
| JP5877936B1 (en) * | 2014-03-12 | 2016-03-08 | 株式会社アルバック | Ion irradiation apparatus and ion irradiation method |
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