JPH03120034U - - Google Patents
Info
- Publication number
- JPH03120034U JPH03120034U JP2831690U JP2831690U JPH03120034U JP H03120034 U JPH03120034 U JP H03120034U JP 2831690 U JP2831690 U JP 2831690U JP 2831690 U JP2831690 U JP 2831690U JP H03120034 U JPH03120034 U JP H03120034U
- Authority
- JP
- Japan
- Prior art keywords
- turntable
- substrate
- processed
- frame
- spin dryer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Description
第１図は本考案の一実施例に被処理基板を収納
した状態の断面図、第２図は第１図の枠体の斜視
図、第３図は従来のスピン乾燥機の斜視図、第４
図は従来のスピン乾燥機に係る基板収納治具の斜
視図、第５図は洗浄用トレーの斜視図、第６図は
洗浄用トレーを用いた従来のスピン乾燥機の断面
図である。
１……ターンテーブル、２……モーター、３…
…枠体、４……治具、５……洗浄用トレー、６…
…仕切り板、７……支持軸、８……ガイドレール
、９，９′……被処理基板。
FIG. 1 is a sectional view of an embodiment of the present invention in which a substrate to be processed is housed, FIG. 2 is a perspective view of the frame shown in FIG. 1, and FIG. 3 is a perspective view of a conventional spin dryer. 4
5 is a perspective view of a substrate storage jig related to a conventional spin dryer, FIG. 5 is a perspective view of a cleaning tray, and FIG. 6 is a sectional view of a conventional spin dryer using a cleaning tray. 1...turntable, 2...motor, 3...
...Frame, 4...Jig, 5...Cleaning tray, 6...
...Partition plate, 7... Support shaft, 8... Guide rail, 9, 9'... Substrate to be processed.
Claims (1)
の枠体に被処理基板を収納した洗浄用トレーをセ
ツトし、前記ターンテーブルを水平回転させて前
記被処理基板の水切りを行うスピン乾燥機におい
て、前記洗浄用トレーは前記ターンテーブルの回
転面に対し１０°〜８０°範囲内の一定角度をも
つて前記枠体にセツトされていることを特徴とす
るスピン乾燥機。 In a spin dryer, a plurality of frames are arranged on a turntable, a cleaning tray containing a substrate to be processed is set in the frame, and the turntable is horizontally rotated to drain water from the substrate to be processed. . A spin dryer, characterized in that the cleaning tray is set on the frame at a constant angle within a range of 10° to 80° with respect to the rotating surface of the turntable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2831690U JPH03120034U (en) | 1990-03-19 | 1990-03-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2831690U JPH03120034U (en) | 1990-03-19 | 1990-03-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03120034U true JPH03120034U (en) | 1991-12-10 |
Family
ID=31531124
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2831690U Pending JPH03120034U (en) | 1990-03-19 | 1990-03-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03120034U (en) |
-
1990
- 1990-03-19 JP JP2831690U patent/JPH03120034U/ja active Pending
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