JPH0312028A - Production of magnetic recording medium - Google Patents

Production of magnetic recording medium

Info

Publication number
JPH0312028A
JPH0312028A JP14478589A JP14478589A JPH0312028A JP H0312028 A JPH0312028 A JP H0312028A JP 14478589 A JP14478589 A JP 14478589A JP 14478589 A JP14478589 A JP 14478589A JP H0312028 A JPH0312028 A JP H0312028A
Authority
JP
Japan
Prior art keywords
medium
magnetic
thin film
burnishing
magnetic recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14478589A
Other languages
Japanese (ja)
Inventor
Kaoru Kawada
薫 河田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP14478589A priority Critical patent/JPH0312028A/en
Publication of JPH0312028A publication Critical patent/JPH0312028A/en
Pending legal-status Critical Current

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  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To prevent local deterioration or long-term secular change variation of magnetic characteristics and to improve reliability of the medium by burnishing the surface of a magnetic thin film and then heat-treating the medium to remove residual strain in the thin film and a substrate. CONSTITUTION:A magnetic film provided on a nonmagnetic supporting body is subjected to burnishing treatment with a tape, etc. Residual strain in the thin film and the supporting body due to burnishing treatment is removed by heat-treating the medium in vacuum or inert atmosphere. Thereby, troubles such as data loss can be prevented.

Description

【発明の詳細な説明】 [産業上の利用分野] この発明は、磁気記録媒体の信頼生の向上、特に・イニ
ンング加工後に熱処理を行うものに関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to improving the reliability of magnetic recording media, particularly to those in which heat treatment is performed after inning processing.

[従来の技術] 磁気ディスク装置の高記録密度化と共に、磁気ヘッドと
媒体のスペーシング量は、その記録密度に多大な影響を
与えるが、記録密度の増大要求にともない、ヘッド浮上
高は極小化している。このため、媒体表面は、高精度の
加工が必要となり、い(つかの表面平滑化加工が行われ
ている。
[Prior Art] As the recording density of magnetic disk devices increases, the amount of spacing between the magnetic head and the medium has a great effect on the recording density. However, with the demand for increased recording density, the flying height of the head is being minimized. ing. For this reason, the surface of the medium needs to be processed with high precision, and some surface smoothing processing is performed.

例えば第2図は特開昭59−1163号公報に示された
、従来の媒体表面を平滑化するためのバニシングヘッド
と、媒体の関係を示す概要図、第3図はバニンングヘッ
ドの斜視図、第4図はバニシングヘッドの溝の断面形状
を示す拡大断面図である。
For example, FIG. 2 is a schematic diagram showing the relationship between a conventional burnishing head for smoothing the surface of a medium and a medium, as disclosed in Japanese Patent Application Laid-open No. 59-1163, and FIG. 3 is a perspective view of the burnishing head. FIG. 4 is an enlarged sectional view showing the cross-sectional shape of the groove of the burnishing head.

図において(1)は磁気記録媒体、<2)はバニシング
ヘッド、(3)は微小突起、(4〉は溝である。バニン
ングヘッド(2〉のスライダ面は、第4図に示すように
凸部〈5〉と凹部〈6〉から形成され、このような凸部
及び凹部からなる溝(4)を形成したスライダー面を有
するバニンングヘッド(2〉を、回転する磁気記録媒体
〈1〉上に浮上させ、矢印方向に往復シークさせ、媒体
表面上の微小突起を除去し、媒体表面を平滑化する方法
が行われている。
In the figure, (1) is a magnetic recording medium, <2) is a burnishing head, (3) is a microprotrusion, and (4> is a groove.The slider surface of the burnishing head (2>) has a convex part as shown in Figure 4. A banning head (2) having a slider surface formed of a groove (4) consisting of a convex part and a concave part (5) and a concave part (6) is levitated above the rotating magnetic recording medium (1). , a method is used in which the medium surface is smoothed by reciprocating seek in the direction of the arrow to remove minute protrusions on the medium surface.

[発明が解決しようとする課題] 従来の磁気記録媒体の製造方法であるバニシング加工は
、異常突起物の除去には有効であり、ヘッドの低浮上化
を可能とするが、基本的には切削加工であり、加工部に
残留応力を生じることにな固定ディスク装置は不揮発性
のビット当り単価の安価な記憶装置であるが、上記のよ
うに残留応力が存在する部分は、応力のため、局所的に
磁気特性が不良であったり、書き込み時には良好であっ
ても、媒体の熱膨張のために、応力分布が微小に変化す
ることで、例えば磁気特性の劣化を生じ、データの消失
という課題を生じる。
[Problems to be Solved by the Invention] Burnishing, which is a conventional manufacturing method for magnetic recording media, is effective in removing abnormal protrusions and makes it possible to lower the flying height of the head. Fixed disk devices are non-volatile storage devices with a low unit price per bit, but as mentioned above, the areas where residual stress exists are localized due to the stress. Even if the magnetic properties are poor during writing, the stress distribution changes slightly due to thermal expansion of the medium, resulting in deterioration of the magnetic properties and data loss. arise.

二の発明は、上記のような課題を解消するためになされ
たもので、バニシング加工による残留応力をなくし、信
頼性の高い磁気記録媒体を得ることを目的とする。
The second invention was made to solve the above-mentioned problems, and aims to eliminate residual stress caused by burnishing and obtain a highly reliable magnetic recording medium.

[課題を解決するための手段] この発明に係わる磁気記録媒体の製造方法は、磁性薄膜
の膜表面をバニシング加工した後に、バニシング加工に
よる磁性薄膜の残雪応力を、熱処理で無(するようにし
たものである。
[Means for Solving the Problems] A method for manufacturing a magnetic recording medium according to the present invention includes burnishing the surface of a magnetic thin film, and then using heat treatment to eliminate residual snow stress in the magnetic thin film caused by the burnishing process. It is something.

[作 用コ この発明における磁気記録媒体の製造方法は、磁性薄膜
の膜表面をスライダー、或はテープ等でバニシング加工
した後に、真空中、または不活性雰囲気中等で、熱処理
を施すため、バニシング加工による磁性薄膜の残雪応力
をなくすることができる。
[Function] The method for producing a magnetic recording medium according to the present invention involves burnishing the surface of a magnetic thin film using a slider or tape, and then heat-treating it in a vacuum or an inert atmosphere. It is possible to eliminate stress caused by residual snow on the magnetic thin film.

[実施例コ 以下この発明の一実施例について説明する。[Example code] An embodiment of this invention will be described below.

第1図は媒体表面のバニンング加工後、下記の条件で熱
処理を施した媒体と、熱処理を施していない媒体につい
て、C5S (コンタクト・スタート・ストップ)試験
中のデータの消失、または著しい出力レベルの低下ビッ
ト個数を示す説明図である。
Figure 1 shows media that were heat-treated under the following conditions after the media surface was burnished, and media that were not heat-treated. FIG. 3 is an explanatory diagram showing the number of degraded bits.

熱処理条件 真空中 250°C1hr  後、自然放冷但し媒体は
C/Cr/Co−Ni/Cr/N1−P/^1熱処理を
施していない媒体の場合は、C8Sによるヘッド・円板
の接触に伴う応力集中により、バニンング加工で残雪応
力を生じていた部分で、応力場に大きな変化が生じ、磁
性膜に力が加わることで逆磁歪効果により磁化が消失す
る。
Heat treatment conditions: 250°C in vacuum for 1 hr, then allowed to cool naturally. However, if the medium is C/Cr/Co-Ni/Cr/N1-P/^1 and has not been heat-treated, contact between the head and the disc due to C8S. The accompanying stress concentration causes a large change in the stress field in the area where residual snow stress was generated during the bunning process, and force is applied to the magnetic film, causing magnetization to disappear due to the inverse magnetostriction effect.

これに対し、熱処理を施した媒体においては、このよう
な現象が認められず、データ消失等の問題を解消するこ
とができる。
On the other hand, in a heat-treated medium, such a phenomenon is not observed, and problems such as data loss can be solved.

なお、上記実施例では熱処理条件として、真空中とした
が、媒体と反応することのない不活性ガス中においても
同様の効果を奏することができる。
In the above embodiments, the heat treatment conditions were in a vacuum, but the same effect can be achieved even in an inert gas that does not react with the medium.

また、二の熱処理工程を、媒体に残雪応力を生じせしめ
るような他の媒体製造工程の後に取り入れることにより
、−層、応力緩和が促進され、より一層の効果を奏する
ことができる。
In addition, by introducing the second heat treatment step after other media manufacturing steps that cause residual snow stress in the media, stress relaxation is promoted and further effects can be achieved.

[発明の効果コ 以上のようにこの発明によれば、磁性薄膜の膜表面をバ
ニシング加工した麦に、バニシング加工による磁性薄膜
の残雪応力を、熱処理で無くするようにしたことにより
、局所的な磁気特性の劣化、及び経時変化をなくシ、デ
ーダの消失等の問題点を極めて少なくし、信頼性の高い
磁気記録媒体を辱うことができる。
[Effects of the Invention] As described above, according to the present invention, wheat that has been burnished on the surface of the magnetic thin film is heat-treated to eliminate residual snow stress on the magnetic thin film due to the burnishing process. Deterioration of magnetic properties and changes over time can be eliminated, problems such as data loss can be extremely reduced, and highly reliable magnetic recording media can be improved.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、二の発明の一実施例により得られた媒体と熱
処理を施していない媒体について、C3S試験中のデー
タの消失、または著しい出力レベルの低下ビット個数を
示す説明図、第2図は従来の磁気記録媒体表面を平滑化
するためのバニシングヘッドと媒体の関係を示す概要図
、第3図はバニシンクヘウドの斜視図、第4図はバニシ
ングへ・ノドの溝の断面形状を示す拡大断面図である。 図において(1)は磁気記録媒体、(2)はバニシング
ヘッド、(3)は微小突起、<4)は溝、(5〉は溝の
凸部、(6)は溝の凹部である。 なお、図中同一符号は同一または相当部分を示す。
FIG. 1 is an explanatory diagram showing the loss of data or significant decrease in the number of bits in the output level during the C3S test for a medium obtained according to an embodiment of the second invention and a medium not subjected to heat treatment, and FIG. 1 is a schematic diagram showing the relationship between a burnishing head and a medium for smoothing the surface of a conventional magnetic recording medium, FIG. 3 is a perspective view of a burnishing head, and FIG. 4 is an enlarged cross-section showing the cross-sectional shape of the burnishing groove. It is a diagram. In the figure, (1) is the magnetic recording medium, (2) is the burnishing head, (3) is the microprotrusion, <4) is the groove, (5> is the convex part of the groove, and (6) is the concave part of the groove. , the same reference numerals in the figures indicate the same or corresponding parts.

Claims (1)

【特許請求の範囲】[Claims] 非磁性基体上に、磁性薄膜を設けた磁気記録媒体の製造
方法において、上記磁性薄膜の膜表面をバニシング加工
した後に、バニシング加工による磁性薄膜の残留応力を
、熱処理で無くするようにしたことを特徴とする磁気記
録媒体の製造方法。
In a method of manufacturing a magnetic recording medium in which a magnetic thin film is provided on a non-magnetic substrate, after the surface of the magnetic thin film is burnished, residual stress in the magnetic thin film due to the burnishing process is eliminated by heat treatment. A method for manufacturing a magnetic recording medium.
JP14478589A 1989-06-06 1989-06-06 Production of magnetic recording medium Pending JPH0312028A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14478589A JPH0312028A (en) 1989-06-06 1989-06-06 Production of magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14478589A JPH0312028A (en) 1989-06-06 1989-06-06 Production of magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH0312028A true JPH0312028A (en) 1991-01-21

Family

ID=15370388

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14478589A Pending JPH0312028A (en) 1989-06-06 1989-06-06 Production of magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH0312028A (en)

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