JPH03120568U - - Google Patents

Info

Publication number
JPH03120568U
JPH03120568U JP2977990U JP2977990U JPH03120568U JP H03120568 U JPH03120568 U JP H03120568U JP 2977990 U JP2977990 U JP 2977990U JP 2977990 U JP2977990 U JP 2977990U JP H03120568 U JPH03120568 U JP H03120568U
Authority
JP
Japan
Prior art keywords
shaft
airtight container
pulling
single crystal
crucible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2977990U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2977990U priority Critical patent/JPH03120568U/ja
Publication of JPH03120568U publication Critical patent/JPH03120568U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図、および第２図は、本考案の一実施例を
示す縦断面図であり、第３図は、この従来例を示
す縦断面図である。 １……容器上部、２……容器下部、１ａ，２ａ
……カツプ部、１ｂ……貫通穴、１ｃ，２ｃ……
連絡部、１ｄ，２ｄ……ヒータ、３……気密容器
、４……シール材、５……押上げ下軸、６……応
力緩衝機構、７……ルツボ、８……サセプタ、８
ａ……サセプタ下軸、９……ヒータ、１０……蒸
気圧制御部、１１……引上軸、１１ａ……垂れ止
め、１２……引上装置、１３……軸シール材、１
４……観察窓。 1 and 2 are longitudinal sectional views showing one embodiment of the present invention, and FIG. 3 is a longitudinal sectional view showing this conventional example. 1... upper part of the container, 2... lower part of the container, 1a, 2a
...Cup part, 1b...Through hole, 1c, 2c...
Communication portion, 1d, 2d... Heater, 3... Airtight container, 4... Sealing material, 5... Lower push-up shaft, 6... Stress buffer mechanism, 7... Crucible, 8... Susceptor, 8
a...Susceptor lower shaft, 9...Heater, 10...Steam pressure control unit, 11...Lifting shaft, 11a...Dragging stopper, 12...Lifting device, 13...Shaft sealing material, 1
4...Observation window.

Claims (1)

【実用新案登録請求の範囲】 気密容器の内部に、この気密容器を貫通して挿
通された下軸によつて支持された受け台を設置し
、この受け台に半導体の原料融液を保持するルツ
ボを配置し、前記気密容器を貫通して前記ルツボ
の上方に垂下した引上軸を引上装置し連結し、前
記原料融液から単結晶を引上げる単結晶引上装置
における軸シール構造において、 前記気密容器の、前記引上軸および下軸の少な
くとも一方の挿通部に筒状の連絡部を設け、この
連絡部の先端部に液状の軸シール材を保持するカ
ツプ部を設けることを特徴とする単結晶引上装置
における軸シール構造。[Claim for Utility Model Registration] A holder supported by a lower shaft inserted through the airtight container is installed inside the airtight container, and a semiconductor raw material melt is held in this holder. A shaft seal structure in a single crystal pulling device for arranging a crucible, connecting a pulling shaft penetrating the airtight container and hanging above the crucible to a pulling device, and pulling a single crystal from the raw material melt. A cylindrical communication part is provided in the insertion part of at least one of the lifting shaft and the lower shaft of the airtight container, and a cup part for holding a liquid shaft sealing material is provided at the tip of the communication part. Shaft seal structure in single crystal pulling equipment.
JP2977990U 1990-03-23 1990-03-23 Pending JPH03120568U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2977990U JPH03120568U (en) 1990-03-23 1990-03-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2977990U JPH03120568U (en) 1990-03-23 1990-03-23

Publications (1)

Publication Number Publication Date
JPH03120568U true JPH03120568U (en) 1991-12-11

Family

ID=31532529

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2977990U Pending JPH03120568U (en) 1990-03-23 1990-03-23

Country Status (1)

Country Link
JP (1) JPH03120568U (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5551876A (en) * 1978-10-06 1980-04-15 Hoechst Ag Using of quarterized ether amine as fiber conditioner
JPH0196086A (en) * 1987-10-07 1989-04-14 Sumitomo Electric Ind Ltd Compound crystal pulling device
JPH01108195A (en) * 1987-10-19 1989-04-25 Sumitomo Electric Ind Ltd Compound crystal pulling device
JPH0274585A (en) * 1988-09-08 1990-03-14 Sumitomo Electric Ind Ltd High dissociation pressure compound single crystal production equipment

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5551876A (en) * 1978-10-06 1980-04-15 Hoechst Ag Using of quarterized ether amine as fiber conditioner
JPH0196086A (en) * 1987-10-07 1989-04-14 Sumitomo Electric Ind Ltd Compound crystal pulling device
JPH01108195A (en) * 1987-10-19 1989-04-25 Sumitomo Electric Ind Ltd Compound crystal pulling device
JPH0274585A (en) * 1988-09-08 1990-03-14 Sumitomo Electric Ind Ltd High dissociation pressure compound single crystal production equipment

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