JPH03122807A - Magnetic head - Google Patents

Abstract

PURPOSE:To prevent the deterioration in soft magnetic characteristics by forming a gap material layer of laminated films provided with silicon oxide films between both silicon nitride films provided on surfaces facing the gap to prevent the reaction with alloy magnetic material layers. CONSTITUTION:A pair of the alloy magnetic material layers 31, 35 are integrated via the gap material layer 45. This gap material layer 45 is formed of the laminated films of the silicon nitride film 46, 46 provided on the opposite surfaces of these alloy magnetic material layers 31, 35 and the silicon oxide films 47, 47 provided between the these two silicon nitride films. The silicon nitride films 46, therefore, come into direct contact with the two alloy magnetic material layers 31, 35. Since the silicon nitride films 46 are thermally and chemically extremely stable materials, the chemical reaction of the alloy magnetic material layers 31, 35 and the gap material layer 45 does not arise. The deterioration in the magnetic characteristics of the soft magnetic characteristics by the chemical reaction on the surfaces of the alloy magnetic material layers 31, 35 is prevented in this way.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic head used for high-density recording/reproduction on a magnetic recording medium having a high coercive force.

[Conventional technology]

In recent years, with the increase in recording density in magnetic recording and reproducing devices such as video tape recorders, magnetic heads using alloy magnetic materials with high magnetic permeability and high saturation magnetic flux density have been frequently used.

The above magnetic head is manufactured through the steps shown in FIGS. 11 to 19. That is, as shown in FIG. 11, first, external winding grooves are formed in one block l of the pair as an alloy magnetic material layer made of an alloy magnetic material such as sendust having high permeability and high saturation magnetic flux density. 2. Glass filling groove 3
and an internal winding groove 4. Further, as shown in FIG. 12, an external winding groove 2 and a glass filling groove 3 are formed in the other block 5.

Next, the sliding surface 7, which is the surface in sliding contact with the magnetic tape of the block 5, and the gap facing surface 6 are polished to a mirror finish.

Next, as shown in FIGS. 13 and 14, in order to obtain a predetermined track width, a plurality of track grooves 8 are formed on each gap facing surface 6 of the block 5.

Next, as shown in FIGS. 15 and 16, a gap is formed on the gap facing surface 6 of the blocked 5 and on the inner surfaces of the glass filling groove 3, internal winding groove 4, track groove 8... As a material layer, a non-magnetic oxide film 10 made of Sin, etc.
10 is formed to a thickness of 1500 mm to obtain a gap material laminated block 11-12.

Next, as shown in FIG. 17, the gap material laminated blocks 11 and 12 are pasted with the nonmagnetic oxide films 10 and 10 facing each other, and then the glass filling grooves 3 and the internal winding grooves 4 Rod-shaped glass fillers 9 are arranged in each gap formed by the above.

Next, when the glass fillers 9, 9 are heated and melted, the glass fillers 9, 9 are melted into the internal winding grooves, as shown in FIG. 18, which is shown upside down from FIG. 17. The glass layer 13 is filled in the upper part of the track groove 8 . . . and the glass filling groove 3, and the gap material laminated blocks 11 and 12 are integrated.

Next, the sliding surfaces 7 of the gap material laminated blocks 11 and 12 are polished to give them a curvature, and then cut from the position indicated by the two-dot chain line to obtain the core 14 shown in FIG. 19.

Thereafter, the core 14 is attached to a head base (not shown), and coils are wound between the gap of the internal winding groove 4 and the external winding groove 2 of the core 14, respectively.
A magnetic head is obtained.

[Problem to be solved by the invention]

However, in the above-mentioned conventional magnetic head, as shown in FIG.
Since the block 5 is in direct contact with the alloy magnetic material 10, the surface of the blocked 5, which is an alloy magnetic material, is a non-magnetic oxide film 10.1 such as Sin.
It will be oxidized by oxygen in zero, and the soft magnetic properties will deteriorate. Therefore, there is a problem in that the effective gap length of the magnetic head increases, resulting in a decrease in the sensitivity of the magnetic head.

[Means for Solving the Problems] In order to solve the above problems, the magnetic head of the present invention has the following features:
In a magnetic head in which a gap material layer is provided between a pair of alloy magnetic material layers to form a magnetic gap, the gap material layer includes a silicon nitride film provided on the gap-opposing surfaces of both alloy magnetic material layers; It is characterized by being composed of a laminated film including a silicon oxide film provided between both silicon nitride films.

[For production]

According to the above configuration, a pair of alloy magnetic material layers are integrated through a gap material layer, and this gap material layer is connected to the silicon nitride film provided on the gap-opposing surfaces of both alloy magnetic material layers, and to the silicon nitride film provided on the gap-opposing surfaces of both alloy magnetic material layers. Since it is a laminated film including a silicon oxide film provided between silicon nitride films, the silicon nitride film is in direct contact with both alloy magnetic material layers. Since this silicon nitride film is a very stable substance both thermally and chemically, no chemical reaction occurs between the alloy magnetic material layer and the gap material layer. Therefore, deterioration of soft magnetic properties due to chemical reactions on the surface of the alloy magnetic material layer can be prevented.

In addition, for example, when the gap material layer is a single layer of silicon nitride film, the glass layer that integrates both alloy magnetic material layers and the silicon nitride film are in direct contact with each other, and in this case, many air bubbles exist in the glass layer. This causes an inconvenience. On the other hand, when the gap material layer is a laminated film consisting of a silicon nitride film provided on the alloy magnetic material layer side and a silicon oxide film provided between the silicon nitride films as in the present invention, Since the silicon oxide film that is compatible with glass is in contact with the glass layer, no bubbles are generated.

〔Example〕

An embodiment of the present invention will be described below with reference to FIGS. 1 to 10.

The magnetic head according to the present invention includes a core 44 shown in FIG. This core 44 is a gap material laminated block 41
- 42 is formed by being integrated with glass layers 43 placed between them. As shown in FIG. 2, the gap material laminated blocks 41 and 42 are a pair of blocks 31 and 42 as alloy magnetic material layers made of an alloy magnetic material having high magnetic flux density and high saturation magnetic flux density, such as sendust.
35, and a silicon nitride film 46 formed on the gap facing surface 36, which will be described later, in these blocks 3I and 35,
A silicon oxide film 47 is formed on this silicon nitride film 46. These silicon nitride 11946 and silicon oxide film 47 constitute a gap material layer for forming the magnetic gap 45.

Further, the sliding surface of the core 44 that comes into contact with the magnetic tape is given a curvature to form a sliding surface 37 . Then, the core 44 is attached to a head base (not shown), and
A magnetic head is formed by winding a coil (not shown) between the gap in the internal winding groove 34 of the core 44 and the external winding groove 32 in each of the gap material laminated blocks 41 and 42.

In the above configuration, the present magnetic head is manufactured through the steps shown in FIGS. 3 to 10 and FIG. That is, as shown in FIG. 3, first, an outer winding groove 32 is formed on one side of one of the paired blocks 31 made of an alloy magnetic material such as sendust, and a glass filling groove 33 and an inner winding groove are formed on the opposite side. A line groove 34 is formed. Further, as shown in FIG. 4, an external winding groove 32 is formed on one surface of the other block 35, and a glass filling groove 33 is formed on the opposite surface.

Next, each sliding surface 37 in the blocks 31 and 35 described above
and the gap facing surface 36 are polished to a mirror finish.

Next, as shown in FIGS. 5 and 6, block 31
・Glass filling groove 3 in each gap facing surface 36 of 35
A plurality of track grooves 38...
form.

Next, as shown in FIGS. 7 and 8, block 31
- On the gap facing surface 36 of 35 and the glass filling groove 33,
A silicon nitride film 46 with a thickness of approximately 800 mm is formed on the inner surfaces of the internal winding grooves 34 and track grooves 38 by reactive sputtering, etc. By sputtering method etc.
A silicon oxide film 47 is formed to a thickness of approximately 700 mm. As a result, a pair of gap material laminated blocks 41 and 42 are obtained.

Next, as shown in FIG. 9, the gap material laminated block 4
1 and 42 are pasted with the silicon oxide films 47 and 47 facing each other, and then rod-shaped glass fillers 39 and 39 are placed in each gap formed by the glass filling grooves 33 and the internal winding groove 34. Allocate.

Next, when the above-mentioned glass fillers 39, 39 are heated and melted, the glass fillers 39, 39 are melted into the internal winding grooves 39, as shown in FIG. 10, which is shown upside down from FIG. The glass layer 43 is filled in the upper part of the track groove 38 and the glass filling groove 33, and the gap material laminated blocks 41 and 42 are integrated.

Next, the sliding surfaces 37 of the integrated gap material laminated blocks 41 and 42 are polished to give them curvature, and then cut from the position indicated by the two-dot chain line to form the core 44 shown in FIG. obtain.

Therefore, the above-mentioned core 44 has a pair of cut gap material laminated blocks 41 and 42 in close contact with each other at the top and bottom, and the width of the opposing portion of the upper close contact portion is regulated by the track grooves 38 and 3 on both sides. This results in a magnetic gap 45 having a predetermined gap width.

Next, the above-mentioned core 44 is attached to a head base (not shown), and the gap of the internal winding groove 34 of the core 44 and the external winding groove 3 of each gap material laminated block 41 and 42 are attached.
A magnetic head is completed by winding coils (not shown) between the two.

The thus obtained magnetic head has a silicon nitride film 46, which is a thermally and chemically very stable substance, provided on the gap facing surfaces 36 of the blocks 31 and 35 made of alloy magnetic material. Therefore, no chemical reaction occurs between the blocks 31 and 35 and the silicon nitride film 46, and the block 3
It is designed to prevent deterioration of the soft magnetic properties of 1.35. In addition, since the glass N43 that integrates the gap material laminated blocks 41 and 42 is in contact with the silicon oxide film 47, which is compatible with glass, many air bubbles may be generated in the glass layer 43. Chemical reactions are prevented.

〔Effect of the invention〕

As described above, the magnetic head of the present invention is a magnetic head in which a gap material layer is provided between a pair of alloy magnetic material layers to form a magnetic gap. This structure consists of a laminated film of a silicon nitride film provided on the surface facing the gap and a silicon oxide film provided between both silicon nitride films.

Therefore, the oxidation reaction of the alloy magnetic material layer can be prevented, and the deterioration of the soft magnetic properties of the alloy magnetic material layer in the vicinity of the gap-opposing surface can be prevented. This produces the effect that a highly sensitive magnetic head can be obtained.

It is something.

FIG. 1 is a perspective view showing the core of the magnetic head.

FIG. 2 is a partially enlarged plan view of the core shown in FIG. 1.

FIGS. 3 to 1O are perspective views showing the manufacturing process of the magnetic head.

11 to 20 show conventional examples.

11 to 19 are perspective views showing the manufacturing process of the magnetic head.

FIG. 20 is a partially enlarged plan view of the core shown in FIG. 19.

31 and 35 are blocks (alloy magnetic material layer), 36 is a gap facing surface, 41 and 42 are gap material laminated blocks, 44
is a core, 45 is a magnetic gap, 46 is a silicon nitride film,
47 is a silicon oxide film.

[Brief explanation of drawings]

1 to 10 show an embodiment of the present invention.
Fig. 2 Fig. 3 Fig. 1 Fig. □ --- Fig. 5 Fig. 3 Fig. 4° 1 7 111 Fig. 3g 12 Fig. 15 Fig. 16 Fig. ji' 13 Fig. 14 Fig. 17 1

Claims (1)

[Claims] 1. In a magnetic head in which a gap material layer is provided between a pair of alloy magnetic material layers to form a magnetic gap, the gap material layer is formed on the gap-opposing surfaces of both alloy magnetic material layers. A magnetic head comprising a laminated film of a silicon nitride film provided and a silicon oxide film provided between both silicon nitride films.