JPH03123205U - - Google Patents
Info
- Publication number
- JPH03123205U JPH03123205U JP3103990U JP3103990U JPH03123205U JP H03123205 U JPH03123205 U JP H03123205U JP 3103990 U JP3103990 U JP 3103990U JP 3103990 U JP3103990 U JP 3103990U JP H03123205 U JPH03123205 U JP H03123205U
- Authority
- JP
- Japan
- Prior art keywords
- phase
- electro
- imaging
- measurement
- changing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000003384 imaging method Methods 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims 3
- 230000000694 effects Effects 0.000 claims 2
- 230000010363 phase shift Effects 0.000 claims 1
- 230000010287 polarization Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Description
第１図は本考案の一実施例の系統図、第２図、
第３図は従来例の系統図である。 １……レーザ発振器、４……偏光ビームスプリ
ツタ、６，９……1/4波長板、１８……電気光学
結晶、２２……ピエゾ素子、３１……変倍光学系
レンズ、３２……結像光学系レンズ。
第３図は従来例の系統図である。 １……レーザ発振器、４……偏光ビームスプリ
ツタ、６，９……1/4波長板、１８……電気光学
結晶、２２……ピエゾ素子、３１……変倍光学系
レンズ、３２……結像光学系レンズ。
Claims (1)
- 【実用新案登録請求の範囲】 １ レーザ光の互いに偏光面が直交する二直線偏
光をそれぞれ参照光、測定光とするレーザ干渉測
定系における前記二直線偏光の共通の光路中に、
電気光学効果をもつ部材と、前記部材に電圧を印
加する装置とを備え、電気光学効果をもつ部材の
移相量が０，π／２，π，3/2πとなる様に印加
電圧を制御し、参照光と測定光間の位相差をπ／
２毎に変化させ、各干渉縞パターンをフレームメ
モリに取り込み、演算処理する手段を設けたこと
を特徴とする位相測定干渉計。 ２ 請求項１において、被測定物がＴＶカメラの
撮像面に結像する結像光学系手段、前記被測定物
の撮像倍率を変える事のできる変倍光学系手段を
持つ位相測定干渉計。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3103990U JPH03123205U (ja) | 1990-03-28 | 1990-03-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3103990U JPH03123205U (ja) | 1990-03-28 | 1990-03-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03123205U true JPH03123205U (ja) | 1991-12-16 |
Family
ID=31533766
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3103990U Pending JPH03123205U (ja) | 1990-03-28 | 1990-03-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03123205U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009152000A (ja) * | 2007-12-19 | 2009-07-09 | Nec Electronics Corp | 半導体装置用ソケット |
-
1990
- 1990-03-28 JP JP3103990U patent/JPH03123205U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009152000A (ja) * | 2007-12-19 | 2009-07-09 | Nec Electronics Corp | 半導体装置用ソケット |
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