JPH0312944A - Inking device and inking method - Google Patents

Inking device and inking method

Info

Publication number
JPH0312944A
JPH0312944A JP1148765A JP14876589A JPH0312944A JP H0312944 A JPH0312944 A JP H0312944A JP 1148765 A JP1148765 A JP 1148765A JP 14876589 A JP14876589 A JP 14876589A JP H0312944 A JPH0312944 A JP H0312944A
Authority
JP
Japan
Prior art keywords
ink
core
dotting
inking
ink reservoir
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1148765A
Other languages
Japanese (ja)
Inventor
Kazuichi Hayashi
和一 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP1148765A priority Critical patent/JPH0312944A/en
Publication of JPH0312944A publication Critical patent/JPH0312944A/en
Pending legal-status Critical Current

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  • Pens And Brushes (AREA)
  • Duplication Or Marking (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To prevent the amount of set ink upon printing from being increased and decreased and the ink from sagging excepting the time of the printing by providing ink sagging preventive part on the tip end of an ink reservoir part, said ink sagging preventive part forming over the internal surface thereof slidable close contact with the outer surface of a printing center core. CONSTITUTION:There is provided on the tip end of an ink reservoir part 1 5 an ink sagging preventive part 17 which forms in its internal surface a slidable close contact with the outer surface of a printing center core 14. For providing the ink sagging preventive part 17 under the ink reservoir part 15 utilizing a capillary phenomenon, the interior of the ink sagging part is taken to be a waiting position of the printing center core 14. Further, ink 11 is supplied by once raising the printing center core 14 up to the inside of the ink reservoir part 15 located above the waiting position from the same. Hereby, the ink 11 is prevented from flowing and at the time excepting the time of printing, and the amount of ink per one time is accurately set.

Description

【発明の詳細な説明】 「発明の1」的] (産業上の利用分野) 本発明は、インキング装置とそれを用いたインキング方
法に関する。
DETAILED DESCRIPTION OF THE INVENTION [First Invention] (Field of Industrial Application) The present invention relates to an inking device and an inking method using the same.

(従来の技術) 例えばプローブ装置においては、半導体ウェハ上に多数
形成された半導体チップの試験測定後に、不良と判断さ
れた半導体チップにマーキングを行うインキング装置が
設けられている。
(Prior Art) For example, a probe device is provided with an inking device that marks semiconductor chips determined to be defective after testing and measuring a large number of semiconductor chips formed on a semiconductor wafer.

第3図は、従来のインキング装置の要部の構成を示す断
面図である。マーキンク用のインク1か収容されている
インク収容部2内には、駆動機構3によって進退自在と
された打点用中芯4が配置されている。また、インク収
容部2の下方には、打点用中芯4のガイド部となると共
に、打点用中芯4先端へのインク供給部となる円筒状の
インク溜部5が接続されている。このインク溜部5の内
径は、打点用中芯4の外面との間隙が毛管現象を引起こ
すように設定されており、この毛管現象によって打点用
中芯4の先端に所定量のインク]aが溜るよう構成され
ている。
FIG. 3 is a sectional view showing the configuration of main parts of a conventional inking device. In an ink accommodating portion 2 in which marking ink 1 is accommodated, a dotting core 4 that is movable forward and backward by a drive mechanism 3 is arranged. Further, a cylindrical ink reservoir 5 is connected to the lower part of the ink storage portion 2, which serves as a guide portion for the dotting core 4 and also serves as an ink supply portion to the tip of the dotting core 4. The inner diameter of this ink reservoir 5 is set such that a gap between it and the outer surface of the dotting core 4 causes a capillary phenomenon, and a predetermined amount of ink is delivered to the tip of the dotting core 4 by this capillary phenomenon. It is structured so that it accumulates.

そして打点用中芯4を被処理物6側に突出させ、その先
端に溜っているインク1aを被処理物6上に転写するこ
とによってマーキングが行われる。
Then, marking is performed by projecting the dot core 4 toward the workpiece 6 and transferring the ink 1a accumulated at its tip onto the workpiece 6.

(発明が解決しようとする課題) ところで、上述したインキング装置においては、インク
溜部5の内面と打点用中芯4の外面との間隙を毛管状態
とすることによって、マーキングを行う時以外は、イン
ク1の表面張力によってインク溜部5からインク1が被
処理物6側に流出することを防止している。
(Problems to be Solved by the Invention) In the above-described inking device, the gap between the inner surface of the ink reservoir portion 5 and the outer surface of the dotting core 4 is made into a capillary state, so that the inking device is not used except when marking is performed. The surface tension of the ink 1 prevents the ink 1 from flowing out from the ink reservoir 5 toward the object to be treated 6.

しかしなから、実際にはインク収容部2内のインク1の
収容量や、打点用中芯4のインク溜部5内での停止時間
、またインク粘度の変化等によって、打点用中芯4先端
に溜るインク量か増加したり、さらには打点時以外にイ
ンク1か被処理物6側に垂れる等の問題か発生している
However, in reality, the tip of the dotting core 4 may vary depending on the amount of ink 1 stored in the ink storage portion 2, the stopping time of the dotting core 4 in the ink reservoir 5, changes in ink viscosity, etc. Problems have occurred, such as an increase in the amount of ink that accumulates in the printing area, or even ink 1 or dripping onto the object 6 at times other than printing.

そして、例えばプローブ装置におけるマーキングは、不
良品と判定された微小面積の半導体チップ内のみに確実
に行わなければならない。しかし、打点用中芯4の先端
に溜るインク量の増加は、不良品に隣接した良品までイ
ンク1の転写を招き、また、打点時以外のインク1の垂
れは、良品まで誤って廃除しやすくなる等、検査精度の
低下を招いている。
For example, marking in a probe device must be performed reliably only on a small area of a semiconductor chip that is determined to be a defective product. However, an increase in the amount of ink that collects at the tip of the dotting core 4 causes ink 1 to be transferred to a good item adjacent to a defective item, and dripping of ink 1 at times other than when dotting makes it easy to accidentally discard even good items. This results in a decrease in inspection accuracy.

本発明は、このような課題に対処するためになされたも
ので、打点時の設定インク量の増減を防止し、かつ打点
時以外のインクの垂れを防止したインキング装置および
それを用いたインキング方法を提供することを目的とし
ている。
The present invention has been made to address these problems, and provides an inking device that prevents the set amount of ink from increasing or decreasing during dotting, and prevents ink from dripping at times other than dotting, and an inking device using the same. The purpose is to provide a method for kings.

[発明の構成] (課題を解決するための手段) すなわち本発明のインキング装置は、インクが収容され
打点用中芯が進退自在に配置されたインク収容部と、前
記打点用中芯の移動経路に沿って前記インク収容部の下
方に設けられ、前記打点用中芯の外面との間隙に毛管現
象を利用したインク供給路が形成されるインク溜部とを
具備するインキング装置において、前記インク溜部の先
端に、その内面が前記打点用中芯の外面と摺動可能な密
着状態を形成するインク垂れ防止部を設けたことを特徴
としている。
[Structure of the Invention] (Means for Solving the Problems) In other words, the inking device of the present invention includes an ink accommodating portion in which ink is stored and a dotting core arranged so as to be movable back and forth, and a movable dotting core. an ink reservoir section provided below the ink accommodating section along a path, and in which an ink supply path utilizing capillary action is formed in a gap with the outer surface of the dotting core; The present invention is characterized in that an ink drip prevention part is provided at the tip of the ink reservoir part, the inner surface of which forms a slidable and close contact with the outer surface of the dot core.

また、本発明のインキング方法は、打点用中芯外面と摺
動可能な密着状態を形成するインク垂れ防止部内で該打
点用中芯を待機させる工程と、前記インク垂れ防止部上
方に配置され毛管現象を利用したインク溜部内まで前記
打点用中芯を上昇させ、該打点用中芯の先端に所定量の
インクを供給する工程と、前記打点用中芯を下降させ・
てインキングを行う工程と、前記打点用中芯を前記待機
位置まで上昇させる工程とを具備し、前記各工程をイン
キング動作に応じて繰返し行うことを特徴としている。
The inking method of the present invention also includes a step of waiting the dot core within an ink drip prevention part that forms a slidable and close contact with the outer surface of the dot dot core, and a step of waiting the dot core within the ink drip prevention part, which is arranged above the ink drip prevention part. A step of raising the dotting core into an ink reservoir using capillary phenomenon and supplying a predetermined amount of ink to the tip of the dotting core, and lowering the dotting core.
The invention is characterized in that it comprises a step of performing inking using the inking operation, and a step of raising the dot core to the standby position, and each step is repeatedly performed in accordance with the inking operation.

(作 用) 本発明においては、毛管現象を利用したインク溜部の下
方にインク垂れ防止部を設けているため、このインク垂
れ防止部内を打点用中芯の待機位置とすることによって
、打点動作時以外のインクの垂れが防止される。
(Function) In the present invention, since the ink dripping prevention part is provided below the ink reservoir part that utilizes capillary phenomenon, the dotting core can be used as a standby position within this ink dripping prevention part to prevent dotting. This prevents ink from dripping at other times.

また、上記待機位置からその上方に位置するインク溜部
内まで、−旦打点用中芯を上昇させることによってイン
クを供給しているので、1回のインキングのために供給
するインク量も安定する。
In addition, since ink is supplied from the standby position to the ink reservoir located above by raising the core for dotting points, the amount of ink supplied for one inking is also stable. .

(実施例) 以下、本発明のインキング装置およびそれを用いたイン
キング方法の実施例を図面を参照して説明する。
(Example) Hereinafter, an example of an inking device of the present invention and an inking method using the same will be described with reference to the drawings.

マーキング用のインク1]は、例えば円筒容器状のイン
ク収容部12内に収容されており、このインク収容部]
2内には、駆動機構13例えばバネと電磁石との組合せ
による駆動によって進退自在とされた打点用中芯]4が
配置されている。
The marking ink 1] is stored in, for example, a cylindrical container-shaped ink accommodating section 12, and this ink accommodating section]
In the center 2, a hitting point core 4 is arranged which is movable forward and backward by a driving mechanism 13, for example, a combination of a spring and an electromagnet.

また、インク収容部12の下方には、打点用中芯14の
移動経路に沿って設けられガイド部となると共に、打点
用中芯14の先端14aへのインク供給部となる円筒状
のインク溜部15が接続されている。このインク溜部1
5の内面と打点用中芯14の外面との間隙16は、毛管
現象によるインク供給路を形成するように、例えば1m
m以下程度に設定されている。
Further, below the ink storage section 12, a cylindrical ink reservoir is provided along the moving path of the dotting core 14, and serves as a guide section and an ink supply section to the tip 14a of the dotting core 14. section 15 is connected. This ink reservoir 1
The gap 16 between the inner surface of the dot 5 and the outer surface of the dot core 14 is, for example, 1 m so as to form an ink supply path by capillary action.
m or less.

上記インク溜部15の下端には、このインク溜部15に
連設してインク垂れ防止部17が設けられている。この
インク垂れ防止部17は、打点用中芯14の外面と摺動
可能な範囲で密着状態が形成されるように、内径が設定
された例えば円筒状部材によって形成されている。
An ink drip prevention section 17 is provided at the lower end of the ink reservoir section 15 so as to be continuous with the ink reservoir section 15 . The ink drip prevention portion 17 is formed of, for example, a cylindrical member having an inner diameter set so as to be in close contact with the outer surface of the dot core 14 within a slidable range.

そして、打点用中芯14がインク溜部15内およびイン
ク垂れ防止部17内を上下動することによって、打点用
中芯14の先端14aに溜ったインクを図示を省略した
被処理物上にインキングするよう構成されている。
By moving the dotting core 14 up and down within the ink reservoir section 15 and the ink drip prevention section 17, the ink accumulated at the tip 14a of the dotting core 14 is injected onto the workpiece (not shown). It is configured to be king.

上記構成のこの実施例のインキング装置の動作を、第2
図を参照して説明する。
The operation of the inking device of this embodiment having the above configuration is described in the second example.
This will be explained with reference to the figures.

まず、打点用中芯14の先端14aは、インク垂れ防止
部17内で、その内面と密着状態を形成する位置に待機
している(同図−a)。この状態が、この実施例のイン
キング装置の初期状態となると共に、後述するように打
点動作時以外の待機状態となる。
First, the tip 14a of the dotting core 14 is waiting in the ink drip prevention portion 17 at a position where it is in close contact with the inner surface of the ink drip prevention portion 17 (FIG. 3-a). This state is the initial state of the inking device of this embodiment, and is also a standby state other than during dotting operations, as will be described later.

次に、打点情報が人力されると、打点用中芯14は、−
1,インク溜部]5内にその先端14aが位置する状態
まで」1昇しく同図−b)、打点用中芯]4はこの位置
に停止する。この状態での停止により、インク溜部15
の内面と打点用中芯]4の外面との間隙]6の毛管現象
によって、1回分のインキング量のインク]、 1 a
が打点用中芯14の先端14aに溜る。
Next, when the dot information is entered manually, the dot center core 14 is -
1. The ink reservoir section] 5 is raised until its tip 14a is located in the same figure (b), and the dotting core 4 stops at this position. By stopping in this state, the ink reservoir 15
The gap between the inner surface of the core and the outer surface of the dot core] 6], the amount of ink for one inking is created by the capillary phenomenon of 6], 1 a
is accumulated at the tip 14a of the center core 14 for hitting point.

次いで打点用中芯14は、その先端14aが図示を省略
した被処理物の表面近傍に到達するまで下降しく同図−
〇)、先端14aに溜っている1回分のインキング量の
インク1]−aを転写し、インキングが行われる。
Next, the dot core 14 descends until its tip 14a reaches the vicinity of the surface of the workpiece (not shown).
〇), Ink 1]-a, which is the amount of ink for one time, accumulated on the tip 14a is transferred, and inking is performed.

この後、打点用中芯14は第2図(a)に示した初期位
置まで上昇し、この状態で次回の打点情報が入力される
まで待機する。
Thereafter, the dot center core 14 rises to the initial position shown in FIG. 2(a), and waits in this state until the next dot information is input.

そして、これらの動作を打点情報に応じて繰返し行うこ
とにより、順次インキングか行われる。
By repeating these operations in accordance with the dot information, inking is performed sequentially.

すなわち、この実施例のインキング装置では、まずイン
ク溜部]5の下端に、打点用中芯14の外面と摺動可能
な密着状態が形成されるインク垂れ防止部]7を設けて
いるため、このインク垂れ防止部]7内に打点用中芯1
4の先端14 aが位置する状態を待機位置とすること
によって、打点用中芯14の外面とインク垂れ防止部1
7の内面との間隙からはインク11が流出することがな
い。
That is, in the inking device of this embodiment, first, the ink drip prevention part 7 is provided at the lower end of the ink reservoir part 5, and the ink drip prevention part 7 is in slidable contact with the outer surface of the dotting core 14. , this ink drip prevention part] 7 has a center core 1 for dots.
By setting the state in which the tip 14a of 4 is located as the standby position, the outer surface of the dotting core 14 and the ink drip prevention part 1
The ink 11 does not flow out from the gap with the inner surface of the ink 7.

よって、打点時以外は被処理物側にインク11が垂れる
ことが防止される。
Therefore, the ink 11 is prevented from dripping onto the object to be processed except during dotting.

また、上記待機状態にある打点用中芯]4の先端14a
には、インク]−1が存在していないため、この状態か
ら打点用中芯14をインク溜部15側に上昇させること
によって、たえず一定量のインり1 ]、 aを打点用
中芯14の先端14aに溜めることが可能となる。よっ
て、インク量の増加によるインキング不良(設定範囲外
へのインキング等)が解消される。
Also, the tip 14a of the dot core]4 in the standby state.
Since there is no ink ]-1 in this state, by raising the dot core 14 toward the ink reservoir 15 side, a constant amount of ink 1] is added to the dot core 14. This makes it possible to store the liquid at the tip 14a. Therefore, inking defects (inking outside the set range, etc.) due to an increase in the amount of ink are eliminated.

このように、この実施例のインキング装置においては、
打点時以外のインクの垂れが防止でき、また打点時にお
けるインク量も安定する。よって、半導体ウェハ」二に
多数形成された半導体チップの検査を行うプローブ装置
等において、微小面積の各半導体チップ上に確実にマー
キングを行うことが可能となり、マーキング不良による
検査精度の低下等か防止でき、非常に有効である。
In this way, in the inking device of this embodiment,
Dripping of ink at times other than dotting can be prevented, and the amount of ink at dotting is also stabilized. Therefore, in a probe device or the like that inspects a large number of semiconductor chips formed on a semiconductor wafer, it becomes possible to reliably mark each semiconductor chip in a micro area, and prevent a drop in inspection accuracy due to marking defects. It is possible and very effective.

なお、本発明のインキング装置およびそれを用いたイン
キング方法は、プローブ装置におけるマキングに限らず
、例えばパッケージングしてIC製品となったものの背
面等にマーキングを行う装置等、各種のインキングに適
用することが可能である。
The inking device of the present invention and the inking method using the same are not limited to marking in a probe device, but can also be applied to various types of inking, such as a device that marks the back side of an IC product that has been packaged. It is possible to apply it to

[発明の効果] 以上説明したように、本発明によれば、打点時]0 以外のインクの流出か防1にでき、かつインキング1回
当りのインク量を正確に設定することができる。よって
、例えば正確にマーキングを行うことが可能となる等、
インキング動作の精度が大幅に向上する。
[Effects of the Invention] As described above, according to the present invention, it is possible to prevent ink from flowing out at points other than 0 at the time of printing, and to accurately set the amount of ink per inking. Therefore, for example, it becomes possible to mark accurately, etc.
The accuracy of the inking operation is greatly improved.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例のインキング装置のの要部の
構成を示す断面図、第2図(a)〜(c)は第1図のイ
ンキング装置の動作を説明するための図、第3図は従来
のインキング1回当の要部の構成を示す断面図である。 11・・・・・・インク、12・・・・・・インク収容
部、14・・・・・・打点用中芯、1−5・・・・・・
インク溜部、16・・・・・・毛管現象によるインク供
給路を形成する間隙、17・・・・・・インク垂れ防止
部。
FIG. 1 is a sectional view showing the configuration of the main parts of an inking device according to an embodiment of the present invention, and FIGS. 2(a) to (c) are diagrams for explaining the operation of the inking device of FIG. 3 are cross-sectional views showing the structure of the main parts of a conventional inking machine for one time. 11...Ink, 12...Ink storage section, 14...Dot core, 1-5...
Ink reservoir portion, 16... Gap forming an ink supply path by capillary action, 17... Ink drip prevention portion.

Claims (2)

【特許請求の範囲】[Claims] (1)インクが収容され打点用中芯が進退自在に配置さ
れたインク収容部と、 前記打点用中芯の移動経路に沿って前記インク収容部の
下方に設けられ、前記打点用中芯の外面との間隙に毛管
現象を利用したインク供給路が形成されるインク溜部と を具備するインキング装置において、 前記インク溜部の先端に、その内面が前記打点用中芯の
外面と摺動可能な密着状態を形成するインク垂れ防止部
を設けたことを特徴とするインキング装置。
(1) An ink accommodating part in which ink is stored and a dotting core is movably arranged; and an ink accommodating part provided below the ink accommodating part along the moving path of the dotting core, In an inking device comprising an ink reservoir in which an ink supply path using capillary phenomenon is formed in a gap between the ink reservoir and the outer surface, the inner surface of the ink reservoir is provided at the tip of the ink reservoir so that the inner surface thereof slides on the outer surface of the dot core. An inking device characterized in that it is provided with an ink drip prevention part that forms a close contact state.
(2)打点用中芯外面と摺動可能な密着状態を形成する
インク垂れ防止部内で該打点用中芯を待機させる工程と
、 前記インク垂れ防止部上方に配置され毛管現象を利用し
たインク溜部内まで前記打点用中芯を上昇させ、該打点
用中芯の先端に所定量のインクを供給する工程と、 前記打点用中芯を下降させてインキングを行う工程と、 前記打点用中芯を前記待機位置まで上昇させる工程とを
具備し、 前記各工程をインキング動作に応じて繰返し行うことを
特徴とするインキング方法。
(2) A step of waiting the dotting core within an ink drip prevention part that forms a slidable and close contact with the outer surface of the dot dot core, and an ink reservoir that is arranged above the ink drip prevention part and utilizes capillary phenomenon. raising the dotting core to the inside of the dotting core and supplying a predetermined amount of ink to the tip of the dotting core; lowering the dotting core to perform inking; an inking method, comprising the step of raising the printer to the standby position, and repeating each of the steps according to the inking operation.
JP1148765A 1989-06-12 1989-06-12 Inking device and inking method Pending JPH0312944A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1148765A JPH0312944A (en) 1989-06-12 1989-06-12 Inking device and inking method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1148765A JPH0312944A (en) 1989-06-12 1989-06-12 Inking device and inking method

Publications (1)

Publication Number Publication Date
JPH0312944A true JPH0312944A (en) 1991-01-21

Family

ID=15460149

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1148765A Pending JPH0312944A (en) 1989-06-12 1989-06-12 Inking device and inking method

Country Status (1)

Country Link
JP (1) JPH0312944A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1002570A1 (en) * 1998-11-20 2000-05-24 Corning Incorporated Capillary transfer device for high density arrays
JP2010219321A (en) * 2009-03-17 2010-09-30 Mitsubishi Electric Corp Marking device and marking method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5021819A (en) * 1973-06-30 1975-03-08
JPS57157767A (en) * 1981-03-24 1982-09-29 Ricoh Co Ltd Printer
JPS60126844A (en) * 1983-12-14 1985-07-06 Oki Electric Ind Co Ltd Marking ink for semiconductor devices

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5021819A (en) * 1973-06-30 1975-03-08
JPS57157767A (en) * 1981-03-24 1982-09-29 Ricoh Co Ltd Printer
JPS60126844A (en) * 1983-12-14 1985-07-06 Oki Electric Ind Co Ltd Marking ink for semiconductor devices

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1002570A1 (en) * 1998-11-20 2000-05-24 Corning Incorporated Capillary transfer device for high density arrays
JP2010219321A (en) * 2009-03-17 2010-09-30 Mitsubishi Electric Corp Marking device and marking method

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